Overview
INFICON Front Load Dual crystal sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for critical processes where it is desirable to have the second crystal in the vacuum chamber.
The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor/feedthrough combination that can be either welded or assembled with compression fittings
Each sensor comes completely assembled and includes integral water tubes, in-vacuum coaxial cable (Front Load) or in-vacuum conduit (Cool Drawer), water tube bending tool, crystal snatcher (Front Load), and operating instructions. All air and water tubes (except the bakeable sensor) are 1/8 inch (0.32cm) O.D. All shuttered sensors require the 750-420-G1 pneumatic control valve. Limited use with other controllers is possible call KJLC +1 800 245 1656 or click here to contact us with any technical questions.
Features
- Dual crystals
- Crystal shutter
- Front load crystal holder
- Easy installation
- Available with: 2.54 cm (1 inch) bolt feedthrough and CF40 feedthrough
- Adjustable length if ordered with compression fittings
- No brazing required if ordered with compression fittings or welded to feedthrough
- Sensor/feedthrough combinations available welded to customer specified lengths
Specifications
Front Load Dual Sensor | ||
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Maximum bakeout temp with no water | 130° C | |
Maximum operating isothermal environment temperature with minimum water flow | 400 ° C | |
Size (maximum envelope without shutter) | 1.54" x 3.23" x 1.95" (39.12 mm x 82.04 mm x 49.54 mm) | |
Water tube and coax length, "E" sensor | Standard 30" (762 mm) | |
Crystal exchange | Front-loading, self-contained package for ease of exchange. Shutter flips up to ease access to the holders. | |
Mounting | Two #4-40 tapped holes on the back of the sensor body | |
Installation Requirements | ||
Feedthrough | Qty. (1) 2.75" (69.85 mm) ConFlat® with 2 Microdot®, 2 pass water and air, or Qty. (1) 1" (25.4 mm) bolt with 2 Microdot, 2 pass water and air. |
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Other | 1) Valve assembly for air-IPN 750-420-G1 2) Two oscillators or one oscillator and 779-220-G1 CrystalTwo Switch designed to interface with the deposition controller. 3) For automatic operation, the deposition process controller must be designed for the implementation of this feature. |
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Utilities | 1) Minimum water flow 150-200 cc/min, 30°C max (Do not allow to freeze.) 2) Air, 80 PSIG (5.5 bar) [552 kPa] very low volume, DO NOT EXCEED 110 PSIG (7.6 bar) [760 kPa] |
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Water quality | Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity. | |
Materials | ||
Body and holder | 304 Type stainless steel | |
Springs | Au plated Be-Cu | |
Water tubes | S-304, 0.125" (3.175 mm) OD x 0.015" (0.381 mm) Wall thickness seamless stainless steel tubing | |
Connector (Microdot) | Stainless steel, Teflon® and glass insulated | |
Insulators | >99% Al2O3 | |
Wire | Teflon insulated copper | |
Other mechanical parts | 304 or 18-8 stainless steel | |
Braze | Vacuum process high temperature Ni-Cr alloy | |
Crystal | 0.550" (13.97 mm) diameter | |
Feedthrough Specifications 1" bolt and Ultra-Torr (compression fitting) terminations | ||
Materials | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® | |
Temperature | Operational environment to 300°C with water cooling or 165° C without | |
Mounting | 1.015" ±0.010" diameter aperture | |
Feedthrough Specifications CF 40 (2.75" ConFlat) welded terminations | ||
Materials | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
Temperature | Operational environment to 450° C with water cooling or 165° C without | |
Mounting | Mates with 2.75" ConFlat type flanges with 1.375" I.D. min. |
Configuration Options
Ordering Code Example: DL-AE00-20
Type of Sensor (Includes in-vacuum cable, crystal snatcher and user manual. Crystals sold separately) |
Code | Configuration |
Standard sensor (water lines parallel) |
A | A |
Length of Sensor (see notes 1 and 5) |
Code | Configuration |
Standard length includes 78.1 cm (30.75") in-vacuum cable (see note 4) |
E | E |
Feedthrough (see note 2) |
Code | Configuration |
None | 0 | 0 |
1" bolt | 3 | |
CF40 | 4 | |
Feedthrough Connection (see notes 3 and 5) |
Code | Configuration |
Sensor not connected to feedthrough | 0 | 0 |
Sensor welded to feedthrough | 7 | |
Feedthrough equipped with Ultra-Torr compression fittings (allows for adjustable sensor length). | 8 | |
Welded Sensor Length (see notes 2 and 5) (Use only when feedthrough connection is 7 Not required when feedthrough connection option is 0 or 8) |
Code | Configuration |
Weld length in centimeters, 20-70 cm (8-27.5") Other lengths may be available: contact factory. Other lengths will be considered a special order and will be subject to additional cost and lead time. |
20-70 | 20 |
Weld length in centimeters, 71-99 cm (28-39") Other lengths may be available: contact factory. Other lengths will be considered a special order and will be subject to additional cost and lead time. |
71-99 |
Start Your Configuration
Accessories Table
Description | Reference | Type | Part Number | Price | In Stock | Add Item | |
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Description | Reference | Type | Part Number | Price | In Stock | Add Item | |
CABLE, |
In-vacuum cable, 78.1 cm (30.75 in.) | Cable |
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IN-VACUUM CABLE 36" CONNECTS SENSOR HEAD TO FEEDTHROUGH | In-vacuum cable, 91.4 cm (36 in.) | Cable |
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LEYBOLD INFICON IN-VACUUM CABLE, |
In-vacuum cable, 61.0 cm (24 in.) | Cable |
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LEYBOLD INFICON IN-VACUUM CABLE ASSEMBLY, |
In-vacuum cable, 15.2 cm (6 in.) | Cable |
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CRYSTALTWO SWITCH, |
CRYSTALTWO Switch, INFICON, Two 6" BNC Cables | Spare Part |
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CRYSTALTWO SWITCH, |
CRYSTALTWO Switch, INFICON, Two 20" BNC Cables | Spare Part |
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CERAMIC RETAINER FOR CASSETTE- STYLE SENSOR HEAD | Ceramic Retainer | Spare Parts |
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CRYSTAL SNATCHER, |
CRYSTAL SNATCHER | Spare Parts |
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FINGER SPRING CONTACT STRIP | Finger spring contact | Spare Parts |
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CRYSTAL HOLDER ASSY, |
Crystal holder (includes retainer spring) | Spare Parts |
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CONNECTOR. FEMALE COAX, |
Female coax | Spare Parts |
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LEYBOLD INFICON PNEUMATIC SHUTTER ASSEMBLY | Shutter module (bellows assembly, shaft assembly, and shutter assembly) | Spare Parts |
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SHUTTER FOR DUAL/COMPACT/STD SENSOR | Shutter assembly (part of shutter module) | Spare Parts |
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PNEUMATIC SHUTTER ACTUATOR CONTROL VALVE, |
Solenoid Valve, 24V | Valve |
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