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Front Load Dual Sensor

Overview

INFICON Front Load Dual crystal sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. The dual sensor provides a backup crystal and is essential for critical processes where it is desirable to have the second crystal in the vacuum chamber.

The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion. Assembled mechanically rather than soldered, parts can be replaced conveniently in the field, if necessary. Sensors can be ordered individually or in a sensor/feedthrough combination that can be either welded or assembled with compression fittings

Each sensor comes completely assembled and includes integral water tubes, in-vacuum coaxial cable (Front Load) or in-vacuum conduit (Cool Drawer), water tube bending tool, crystal snatcher (Front Load), and operating instructions. All air and water tubes (except the bakeable sensor) are 1/8 inch (0.32cm) O.D. All shuttered sensors require the 750-420-G1 pneumatic control valve. Limited use with other controllers is possible call KJLC +1 412 387 9200 or click here to contact us with any technical questions.

Features

Dual crystals
Crystal shutter
Front load crystal holder
Easy installation
Available with: 2.54 cm (1 inch) bolt feedthrough and CF40 feedthrough
Adjustable length if ordered with compression fittings
No brazing required if ordered with compression fittings or welded to feedthrough
Sensor/feedthrough combinations available welded to customer specified lengths

Specifications

	Front Load Dual Sensor
Maximum bakeout temp with no water	130° C
Maximum operating isothermal environment temperature with minimum water flow	400 ° C
Size (maximum envelope without shutter)	1.54" x 3.23" x 1.95" (39.12 mm x 82.04 mm x 49.54 mm)
Water tube and coax length, "E" sensor	Standard 30" (762 mm)
Crystal exchange	Front-loading, self-contained package for ease of exchange. Shutter flips up to ease access to the holders.
Mounting	Two #4-40 tapped holes on the back of the sensor body
Installation Requirements
Feedthrough	Qty. (1) 2.75" (69.85 mm) ConFlat^® with 2 Microdot^®, 2 pass water and air, or Qty. (1) 1" (25.4 mm) bolt with 2 Microdot, 2 pass water and air.
Other	1) Valve assembly for air-IPN 750-420-G1 2) Two oscillators or one oscillator and 779-220-G1 CrystalTwo Switch designed to interface with the deposition controller. 3) For automatic operation, the deposition process controller must be designed for the implementation of this feature.
Utilities	1) Minimum water flow 150-200 cc/min, 30°C max (Do not allow to freeze.) 2) Air, 80 PSIG (5.5 bar) [552 kPa] very low volume, DO NOT EXCEED 110 PSIG (7.6 bar) [760 kPa]
Water quality	Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity.
Materials
Body and holder	304 Type stainless steel
Springs	Au plated Be-Cu
Water tubes	S-304, 0.125" (3.175 mm) OD x 0.015" (0.381 mm) Wall thickness seamless stainless steel tubing
Connector (Microdot)	Stainless steel, Teflon^® and glass insulated
Insulators	>99% Al₂O₃
Wire	Teflon insulated copper
Other mechanical parts	304 or 18-8 stainless steel
Braze	Vacuum process high temperature Ni-Cr alloy
Crystal	0.550" (13.97 mm) diameter
Feedthrough Specifications 1" bolt and Ultra-Torr (compression fitting) terminations
Materials	304 stainless steel, Teflon, ceramic, beryllium nickel, VITON^®
Temperature	Operational environment to 300°C with water cooling or 165° C without
Mounting	1.015" ±0.010" diameter aperture
Feedthrough Specifications CF 40 (2.75" ConFlat) welded terminations
Materials	304 stainless steel, Teflon, ceramic, beryllium nickel
Temperature	Operational environment to 450° C with water cooling or 165° C without
Mounting	Mates with 2.75" ConFlat type flanges with 1.375" I.D. min.

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NOTES

Orders for sensors welded to the feedthroughs should be requested with a length, in cm, between 20 and 99 cm. If another length is needed, please contact us by clicking here . Once special length or manufactured order is confirmed, it can not be canceled.
Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough.
For sensors ordered without a weld connection (option "0" or "8"), tubes are made to a length of 29.75" (756mm) for "E" length and Cool Drawer sensors and 44.75" (1137mm) for "G" length sensors.
For sensors ordered with the Ultra Torr compression fittings, the length will be set to the maximum length (76 cm). This length can then be adjusted.

Configuration Options

Ordering Code Example: DL-AE00-20

Type of Sensor (Includes in-vacuum cable, crystal snatcher and user manual. Crystals sold separately)	Code	Configuration
Standard sensor (water lines parallel)	A	A
Length of Sensor (see notes 1 and 5)	Code	Configuration
Standard length includes 78.1 cm (30.75") in-vacuum cable (see note 4)	E	E
Feedthrough (see note 2)	Code	Configuration
None	0	0
1" bolt	3
CF40	4
Feedthrough Connection (see notes 3 and 5)	Code	Configuration
Sensor not connected to feedthrough	0	0
Sensor welded to feedthrough	7
Feedthrough equipped with Ultra-Torr compression fittings (allows for adjustable sensor length).	8
Welded Sensor Length (see notes 2 and 5) (Use only when feedthrough connection is 7 Not required when feedthrough connection option is 0 or 8)	Code	Configuration
Weld length in centimeters, 20-70 cm (8-27.5") Other lengths may be available: contact factory. Other lengths will be considered a special order and will be subject to additional cost and lead time.	20-70	20
Weld length in centimeters, 71-99 cm (28-39") Other lengths may be available: contact factory. Other lengths will be considered a special order and will be subject to additional cost and lead time.	71-99	20

NOTES

Orders for a WELDED sensor/feedthrough combination are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough. Once a welded sensor order is confirmed, it cannot be canceled.
Feedthrough configuration varies depending on options selected (Front Load or Cool Drawer, with or without shutter, type of feedthrough, etc.). Example: SL-A0E37 uses feedthrough PN 002-042 while SL-A1E37 uses feedthrough PN 750-030-G1.
Front Load Dual sensors ordered with a CF40 feedthrough cannot be welded due to dimensional limits of the CF40.
For sensors ordered without a weld connection (option "0" or "8"), tubes are made to a length of approximately 76.2 cm (30")
Front Load Dual sensors welded to lengths between 28 and 34 inches will include a 36 inch in-vacuum cable. Sensors welded to lengths between 34 and 39 inches will include a 48 inch in-vacuum cable.
The following combinations are not available: (see notes 3 and 4): DL-AE47, DL-AG47, DL-AE38, DL-AG38 Examples of non-valid part numbers include all options with no feedthrough connection or compression fittings and a welded sensor length; for example, DL-AE40-20, DL-BE40-20, etc.

A Complete Package Consists of

Note: Below you will find common methods to either monitor or control the deposition rate of your process. Please note that not all controllers are listed. If you do not see the equipment that you need, please contact your local KJLC Sales Representative.

If you would like to monitor the deposition rate:

FTM-2400

If you would like to control the deposition rate:

FTC-2800
XTC/3S
XTC/3M
IC6

Compatible Part	Description	Components Needed
KJLC FTM-2400 Multi-Channel Quartz Crystal Monitor	The KJLC FTM-2400 is a user-friendly deposition monitor with digital input, relay outputs, and the capability to connect up to 6 single QCMs or 1 dual QCM for sequential display.	Inficon Front Load Dual Sensor with feedthrough, KJLC FTM-2400, CrystalTwo Switch, oscillator kit, and crystals.
KJLC FTC-2800 Multi-Channel Quartz Crystal Controller	The KJLC FTC-2800 is an economical, user-friendly deposition controller, able to control your deposition rate and connect up to 4 single QCMs or 2 dual QCMs. The KJLC FTC-2800C also allows for co-deposition.	Inficon Front Load Dual Sensor with feedthrough, KJLC FTC-2800, CrystalTwo Switch, oscillator kit, and crystals.
Inficon XTC/3S Deposition Controller	The Inficon XTC/3S is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a single layer process. The XTC/3S allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon Front Load Dual Sensor with feedthrough, Inficon XTC/3S, CrystalTwo Switch, ModeLock oscillator kit, and crystals.
Inficon XTC/3M Multi-Layer Deposition Controller	The Inficon XTC/3M is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a multi-layer process. The XTC/3M allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon Front Load Dual Sensor with feedthrough, Inficon XTC/3S, CrystalTwo Switch, ModeLock oscillator kit, and crystals.
Inficon IC6 Thin Film Deposition Controller	The Inficon IC6 is the industry standard for deposition and includes the patented ModeLock frequency measurement for high-resolution rates and thicknesses. The IC6 has the capability to control up to 6 sources, 8 single QCMs or 4 dual QCMs.	Inficon Front Load Dual Sensor with feedthrough, Inficon IC6, CrystalTwo Switch , ModeLock oscillator kit, and crystals.

Start Your Configuration

1. Base Unit:	Front Load Dual Sensor [DL-]
2. Type of Sensor:	Standard sensor [A]
3. Length of Sensor:	Standard length includes 78.1 cm (30.75") in-vacuum cable [E]
4. Feedthrough:
5. Feedthrough Connection:
6. Length:

NOTES

All shuttered sensors require the 750-420-G1 pneumatic control valve.
The following combinations are not available: DL-AE38, DL-AG38, DL-AE47, DL-AG47.
1" Bolt style Feedthrough require a special feedthrough (contact us for pricing).

Accessories Table

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Description	Reference	Type	Part Number	Price	In Stock	Add Item
Description	Reference	Type	Part Number	Price	In Stock	Add Item
CABLE,IN VACUUM,FOR HV SENSORS MICRODOT CONNECTOR,1032 THREAD, 30.75 INCHES (78.1 CM) LONG	In-vacuum cable, 78.1 cm (30.75 in.)	Cable	007-044	P.O.R.
IN-VACUUM CABLE 36" CONNECTS SENSOR HEAD TO FEEDTHROUGH	In-vacuum cable, 91.4 cm (36 in.)	Cable	007-059	P.O.R.
LEYBOLD INFICON IN-VACUUM CABLE,2FT LONG	In-vacuum cable, 61.0 cm (24 in.)	Cable	321-039-G11	P.O.R.
LEYBOLD INFICON IN-VACUUM CABLE ASSEMBLY, 6 INCH LENGTH	In-vacuum cable, 15.2 cm (6 in.)	Cable	321-039-G12	P.O.R.
CRYSTALTWO SWITCH, INFICON, TWO 6” BNC CABLES.	CRYSTALTWO Switch, INFICON, Two 6" BNC Cables	Spare Part	779-220-G1	P.O.R.
CRYSTALTWO SWITCH, INFICON, TWO 20” BNC CABLES.	CRYSTALTWO Switch, INFICON, Two 20" BNC Cables	Spare Part	779-220-G2	P.O.R.
CERAMIC RETAINER FOR CASSETTE- STYLE SENSOR HEAD	Ceramic Retainer	Spare Parts	007-023	P.O.R.
CRYSTAL SNATCHER,FOR INFICON CRYSTAL SENSORS	CRYSTAL SNATCHER	Spare Parts	008-007	P.O.R.
FINGER SPRING CONTACT STRIP	Finger spring contact	Spare Parts	750-171-P1	P.O.R.
CRYSTAL HOLDER ASSY,DUAL/STD	Crystal holder (includes retainer spring)	Spare Parts	750-172-G1	$86.00
CONNECTOR. FEMALE COAX, FOR 750-619-G1 SPUTTERING HEAD BODY	Female coax	Spare Parts	750-174-P2	P.O.R.
LEYBOLD INFICON PNEUMATIC SHUTTER ASSEMBLY	Shutter module (bellows assembly, shaft assembly, and shutter assembly)	Spare Parts	750-210-G1	P.O.R.
SHUTTER FOR DUAL/COMPACT/STD SENSOR	Shutter assembly (part of shutter module)	Spare Parts	750-216-G1	P.O.R.
PNEUMATIC SHUTTER ACTUATOR CONTROL VALVE,24V AC/DC	Solenoid Valve, 24V	Valve	750-420-G1	P.O.R.

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Part Number:
Price as Configured:	$

Front Load Dual Sensor

Overview

Features

Specifications

Configuration Options

Start Your Configuration

Accessories Table

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