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Front Load Sputtering Sensors

All of the following crystal sensors are compatible with all INFICON quartz crystal controllers, except where noted. One or more of these sensors should be purchased with each controller. Each sensor comes completely assembled and includes integral water tubes, in-vacuum coaxial cable (Front Load) or in-vacuum conduit (Cool Drawer), water tube bending tool, crystal snatcher (Front Load), and operating instructions. All air and water tubes (except the bakeable sensor) are 1/8 inch (0.32cm) O.D. All shuttered sensors require the 750-420-G1 pneumatic control valve. Xtal 2 Switch is designed for use only with the XTC/3 and Cygnus Thin Film Deposition Controllers. Limited use with other controllers is possible call KJLC or email: sales@lesker.com with any technical questions.

NOTE:

  • Orders for sensors welded to feedthroughs cannot be entered without signed-off dimensional drawing (KJLC to provide). Once special length or manufactured order is confirmed, it can not be canceled.
  • Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough.
  • For sensors ordered without a weld connection (option "0" or "8"), tubes are made to a length of 29.75" (756mm) for "E" length and Cool Drawer sensors and 44.75" (1137mm) for "G" length sensors.
  • Includes 78 cm (30.75") in-vac cable, crystal snatcher and manual (other length cables ordered separately). Custom parts, special bends and other non-standard parts available - Consult factory.
  • Shutter air tube is connected to the feedthrough tube using VCR fittings for field replacement.
  • The STM-2 USB Thin Film Thickness/Rate Deposition Monitor cannot be used with shuttered versions of this sensor

Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Ordering Table

Power
Supply
Part No Price In Stock Add
Item
Power
Supply
Part No Price In Stock Add
Item
Sputtering Sensor Shutter Module, (Sensor not included)
750-005-G1
P.O.R.
Call for Availability
Sputtering Sensor, 30 in.(76 cm), (Feedthrough not included)
750-618-G1
P.O.R.
Call for Availability

Contact international@lesker.com for more information, including pricing and options, and to discuss your specific process application requirements.


Accessories Table

Type Description Part Number Price In Stock Add
Item
Type Description Part Number Price In Stock Add
Item
Cable
In-vacuum cable, 78.1 cm (30.75 in.)
007-044
P.O.R.
In Stock
Cable
In-vacuum cable, 91.4 cm (36 in.)
007-059
P.O.R.
Call for Availability
Cable
In-vacuum cable, 61.0 cm (24 in.)
321-039-G11
P.O.R.
Call for Availability
Cable
In-vacuum cable, 15.2 cm (6 in.)
321-039-G12
P.O.R.
Call for Availability
Spare Parts
Magnet for sputtering head cover
007-009
P.O.R.
Call for Availability
Spare Parts
Ceramic Retainer
007-023
P.O.R.
In Stock
Spare Parts
Sputtering head cover with water lines
007-047
P.O.R.
Call for Availability
Spare Parts
Crystal Holder, Sputtering Sensor
007-049
P.O.R.
Call for Availability
Spare Parts
CRYSTAL SNATCHER
008-007
P.O.R.
Call for Availability
Spare Parts
Retaining ring (installs onto shaft of shutter assembly)
070-0440
P.O.R.
Call for Availability
Spare Parts
Spacer (installs onto shaft of shutter assembly)
070-0441
P.O.R.
Call for Availability
Spare Parts
Retaining ring (installs onto shaft of shutter assembly)
070-0442
P.O.R.
Call for Availability
Spare Parts
2-56 x 1/8 in. set screw for 750-619-G1 sputtering head body
082-029-P1
P.O.R.
Call for Availability
Spare Parts
Pneumatic shutter assembly for Sputtering Sensor
750-005-G1
P.O.R.
Call for Availability
Spare Parts
Pivot cover (installs onto shaft of shutter assembly)
750-009-P2
P.O.R.
Call for Availability
Spare Parts
Shutter assembly for pneumatic shutter assembly
750-046-G2
P.O.R.
Call for Availability
Spare Parts
Retainer spring for 007-048 and 751-619-G1 sputtering head bodies
750-048-P1
P.O.R.
Call for Availability
Spare Parts
Bellows assembly for pneumatic shutter assembly
750-169-P4
P.O.R.
Call for Availability
Spare Parts
Sputtering head body with coax connector
750-619-G1
P.O.R.
Call for Availability
Valve
Solenoid Valve, 24V
750-420-G1
P.O.R.
Call for Availability