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Front Load Sputtering Sensors

All of the following crystal sensors are compatible with all INFICON quartz crystal controllers, except where noted. One or more of these sensors should be purchased with each controller. Each sensor comes completely assembled and includes integral water tubes, in-vacuum coaxial cable (Front Load) or in-vacuum conduit (Cool Drawer), water tube bending tool, crystal snatcher (Front Load), and operating instructions. All air and water tubes (except the bakeable sensor) are 1/8 inch (0.32cm) O.D. All shuttered sensors require the 750-420-G1 pneumatic control valve. Xtal 2 Switch is designed for use only with the XTC/3 and Cygnus Thin Film Deposition Controllers. Limited use with other controllers is possible call KJLC or click here with any technical questions.

NOTE:

  • Orders for sensors welded to feedthroughs cannot be entered without signed-off dimensional drawing (KJLC to provide). Once special length or manufactured order is confirmed, it can not be canceled.
  • Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough.
  • For sensors ordered without a weld connection (option "0" or "8"), tubes are made to a length of 29.75" (756mm) for "E" length and Cool Drawer sensors and 44.75" (1137mm) for "G" length sensors.
  • Includes 78 cm (30.75") in-vac cable, crystal snatcher and manual (other length cables ordered separately). Custom parts, special bends and other non-standard parts available - Consult factory.
  • Shutter air tube is connected to the feedthrough tube using VCR fittings for field replacement.
  • The STM-2 USB Thin Film Thickness/Rate Deposition Monitor cannot be used with shuttered versions of this sensor

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Ordering Table

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Description Power Supply Part Number Price In Stock Add Item
Description Power Supply Part Number Price In Stock Add Item
PNEUMATIC SHUTTER ASSEMBLY FOR SPUTTERING HEAD Sputtering Sensor Shutter Module, (Sensor not included)
750-005-G1
P.O.R.
Contact KJLC for Availability
SENSOR,CRYSTAL,SPUTTERING, REQUIRES F/T Sputtering Sensor, 30 in.(76 cm), (Feedthrough not included)
750-618-G1
P.O.R.
Contact KJLC for Availability

Contact us by clicking here for more information, including pricing and options, and to discuss your specific process application requirements.


Accessories Table

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Description Reference Type Part Number Price In Stock Add Item
Description Reference Type Part Number Price In Stock Add Item
CABLE,IN VACUUM,FOR HV SENSORS MICRODOT CONNECTOR,1032 THREAD, 30.75 INCHES (78.1 CM) LONG In-vacuum cable, 78.1 cm (30.75 in.) Cable
007-044
P.O.R.
In Stock
IN-VACUUM CABLE 36" CONNECTS SENSOR HEAD TO FEEDTHROUGH In-vacuum cable, 91.4 cm (36 in.) Cable
007-059
P.O.R.
Contact KJLC for Availability
LEYBOLD INFICON IN-VACUUM CABLE,2FT LONG In-vacuum cable, 61.0 cm (24 in.) Cable
321-039-G11
P.O.R.
Contact KJLC for Availability
LEYBOLD INFICON IN-VACUUM CABLE ASSEMBLY, 6 INCH LENGTH In-vacuum cable, 15.2 cm (6 in.) Cable
321-039-G12
P.O.R.
Contact KJLC for Availability
Magnet for sputtering head cover Spare Parts
007-009
P.O.R.
Contact KJLC for Availability
CERAMIC RETAINER FOR CASSETTE- STYLE SENSOR HEAD Ceramic Retainer Spare Parts
007-023
P.O.R.
In Stock
SPUTTERING SENSOR FRONT COVER ASSEMBLY Sputtering head cover with water lines Spare Parts
007-047
P.O.R.
Contact KJLC for Availability
CRYSTAL HOLDER FOR SPUTTERING SENSOR Crystal Holder, Sputtering Sensor Spare Parts
007-049
P.O.R.
Contact KJLC for Availability
CRYSTAL SNATCHER,FOR INFICON CRYSTAL SENSORS CRYSTAL SNATCHER Spare Parts
008-007
P.O.R.
Contact KJLC for Availability
Retaining ring (installs onto shaft of shutter assembly) Spare Parts
070-0440
P.O.R.
Contact KJLC for Availability
Spacer (installs onto shaft of shutter assembly) Spare Parts
070-0441
P.O.R.
Contact KJLC for Availability
Retaining ring (installs onto shaft of shutter assembly) Spare Parts
070-0442
P.O.R.
Contact KJLC for Availability
2-56 x 1/8 in. set screw for 750-619-G1 sputtering head body Spare Parts
082-029-P1
P.O.R.
Contact KJLC for Availability
PNEUMATIC SHUTTER ASSEMBLY FOR SPUTTERING HEAD Pneumatic shutter assembly for Sputtering Sensor Spare Parts
750-005-G1
P.O.R.
Contact KJLC for Availability
Pivot cover (installs onto shaft of shutter assembly) Spare Parts
750-009-P2
P.O.R.
Contact KJLC for Availability
Shutter assembly for pneumatic shutter assembly Spare Parts
750-046-G2
P.O.R.
Contact KJLC for Availability
Retainer spring for 007-048 and 751-619-G1 sputtering head bodies Spare Parts
750-048-P1
P.O.R.
Contact KJLC for Availability
Bellows assembly for pneumatic shutter assembly Spare Parts
750-169-P4
P.O.R.
Contact KJLC for Availability
SPUTTERING SENSOR BODY ASSEMBLY Sputtering head body with coax connector Spare Parts
750-619-G1
P.O.R.
Contact KJLC for Availability
PNEUMATIC SHUTTER ACTUATOR CONTROL VALVE,24V AC/DC Solenoid Valve, 24V Valve
750-420-G1
P.O.R.
Contact KJLC for Availability
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Contact Us - Front Load Sputtering Sensors