Representative Image

Front Load Sputtering Sensors

Overview
A Complete Package Consists of

All of the following crystal sensors are compatible with all INFICON quartz crystal controllers, except where noted. One or more of these sensors should be purchased with each controller. Each sensor comes completely assembled and includes integral water tubes, in-vacuum coaxial cable (Front Load) or in-vacuum conduit (Cool Drawer), water tube bending tool, crystal snatcher (Front Load), and operating instructions. All air and water tubes (except the bakeable sensor) are 1/8 inch (0.32cm) O.D. All shuttered sensors require the 750-420-G1 pneumatic control valve. Xtal 2 Switch is designed for use only with the XTC/3 and Cygnus Thin Film Deposition Controllers. Limited use with other controllers is possible call KJLC or click here with any technical questions.

NOTE:

Orders for sensors welded to feedthroughs cannot be entered without signed-off dimensional drawing (KJLC to provide). Once special length or manufactured order is confirmed, it can not be canceled.
Sensor lengths are measured from center of the crystal to the vacuum side (sealing surface) of the feedthrough.
For sensors ordered without a weld connection (option "0" or "8"), tubes are made to a length of 29.75" (756mm) for "E" length and Cool Drawer sensors and 44.75" (1137mm) for "G" length sensors.
Includes 78 cm (30.75") in-vac cable, crystal snatcher and manual (other length cables ordered separately). Custom parts, special bends and other non-standard parts available - Consult factory.
Shutter air tube is connected to the feedthrough tube using VCR fittings for field replacement.
The STM-2 USB Thin Film Thickness/Rate Deposition Monitor cannot be used with shuttered versions of this sensor

A Complete Package Consists of

Note: Below you will find common methods to either monitor or control the deposition rate of your process. Please note that not all controllers are listed. If you do not see the equipment that you need, please contact your local KJLC Sales Representative.

If you would like to monitor the deposition rate:

STM-2
FTM-2400

If you would like to control the deposition rate:

FTC-2800
XTC/3S
XTC/3M
IC6

Compatible Part	Description	Components Needed
Inficon STM-2 USB Thin Film Thickness/Rate Deposition Monitor	The STM-2 is a USB powered thin film monitor that allows for deposition monitoring via a laptop of 1 QCM. Up to 8 STM-2’s can be connected to a laptop at once.	Inficon Sputtering Sensor with feedthrough, STM-2, and Crystals; oscillator, 6-inch BNC cable (oscillator to feedthrough), and 16 ft. USB cable (oscillator to computer) are included. Note: Shuttered units cannot be used with the STM-2.
KJLC FTM-2400 Multi-Channel Quartz Crystal Monitor	The KJLC FTM-2400 is a user-friendly deposition monitor with digital input, relay outputs, and the capability to connect up to 6 single QCMs or 1 dual QCM for sequential display.	Inficon Sputtering Sensor with feedthrough, KJLC FTM-2400, oscillator kit, and crystals.
KJLC FTC-2800 Multi-Channel Quartz Crystal Controller	The KJLC FTC-2800 is an economical, user-friendly deposition controller, able to control your deposition rate and connect up to 4 single QCMs or 2 dual QCMs. The KJLC FTC-2800C also allows for co-deposition.	Inficon Sputtering Sensor with feedthrough, KJLC FTC-2800, oscillator kit, and crystals.
Inficon XTC/3S Deposition Controller	The Inficon XTC/3S is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a single layer process. The XTC/3S allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon Sputtering Sensor with feedthrough, Inficon XTC/3S, ModeLock oscillator kit, and crystals.
Inficon XTC/3M Multi-Layer Deposition Controller	The Inficon XTC/3M is a deposition controller that includes the patented ModeLock frequency measurement to provide highly accurate control of a multi-layer process. The XTC/3M allows the control of up to 2 sources, 2 single QCMs, or 2 dual QCMs.	Inficon Sputtering Sensor with feedthrough, Inficon XTC/3S, ModeLock oscillator kit, and crystals.
Inficon IC6 Thin Film Deposition Controller	The Inficon IC6 is the industry standard for deposition and includes the patented ModeLock frequency measurement for high-resolution rates and thicknesses. The IC6 has the capability to control up to 6 sources, 8 single QCMs or 4 dual QCMs.	Inficon Sputtering Sensor with feedthrough, Inficon IC6, ModeLock oscillator kit, and crystals.

Ordering Table

X CLOSE

Description	Power Supply	Part Number	Price	In Stock	Add Item
Description	Power Supply	Part Number	Price	In Stock	Add Item
PNEUMATIC SHUTTER ASSEMBLY FOR SPUTTERING HEAD	Sputtering Sensor Shutter Module, (Sensor not included)	750-005-G1	P.O.R.
SENSOR,CRYSTAL,SPUTTERING, REQUIRES F/T	Sputtering Sensor, 30 in.(76 cm), (Feedthrough not included)	750-618-G1	P.O.R.

Contact us by clicking here for more information, including pricing and options, and to discuss your specific process application requirements.

Accessories Table

X CLOSE

Description	Reference	Type	Part Number	Price	In Stock	Add Item
Description	Reference	Type	Part Number	Price	In Stock	Add Item
CABLE,IN VACUUM,FOR HV SENSORS MICRODOT CONNECTOR,1032 THREAD, 30.75 INCHES (78.1 CM) LONG	In-vacuum cable, 78.1 cm (30.75 in.)	Cable	007-044	P.O.R.
IN-VACUUM CABLE 36" CONNECTS SENSOR HEAD TO FEEDTHROUGH	In-vacuum cable, 91.4 cm (36 in.)	Cable	007-059	P.O.R.
LEYBOLD INFICON IN-VACUUM CABLE,2FT LONG	In-vacuum cable, 61.0 cm (24 in.)	Cable	321-039-G11	P.O.R.
LEYBOLD INFICON IN-VACUUM CABLE ASSEMBLY, 6 INCH LENGTH	In-vacuum cable, 15.2 cm (6 in.)	Cable	321-039-G12	P.O.R.
CRYSTALTWO SWITCH, INFICON, TWO 6” BNC CABLES.	CRYSTALTWO Switch, INFICON, Two 6" BNC Cables	Spare Part	779-220-G1	P.O.R.
CRYSTALTWO SWITCH, INFICON, TWO 20” BNC CABLES.	CRYSTALTWO Switch, INFICON, Two 20" BNC Cables	Spare Part	779-220-G2	P.O.R.
—	Magnet for sputtering head cover	Spare Parts	007-009	P.O.R.
CERAMIC RETAINER FOR CASSETTE- STYLE SENSOR HEAD	Ceramic Retainer	Spare Parts	007-023	P.O.R.
SPUTTERING SENSOR FRONT COVER ASSEMBLY	Sputtering head cover with water lines	Spare Parts	007-047	P.O.R.
CRYSTAL HOLDER FOR SPUTTERING SENSOR	Crystal Holder, Sputtering Sensor	Spare Parts	007-049	P.O.R.
CRYSTAL SNATCHER,FOR INFICON CRYSTAL SENSORS	CRYSTAL SNATCHER	Spare Parts	008-007	P.O.R.
—	Retaining ring (installs onto shaft of shutter assembly)	Spare Parts	070-0440	P.O.R.
—	Spacer (installs onto shaft of shutter assembly)	Spare Parts	070-0441	P.O.R.
—	Retaining ring (installs onto shaft of shutter assembly)	Spare Parts	070-0442	P.O.R.
—	2-56 x 1/8 in. set screw for 750-619-G1 sputtering head body	Spare Parts	082-029-P1	P.O.R.
PNEUMATIC SHUTTER ASSEMBLY FOR SPUTTERING HEAD	Pneumatic shutter assembly for Sputtering Sensor	Spare Parts	750-005-G1	P.O.R.
—	Pivot cover (installs onto shaft of shutter assembly)	Spare Parts	750-009-P2	P.O.R.
—	Shutter assembly for pneumatic shutter assembly	Spare Parts	750-046-G2	P.O.R.
—	Retainer spring for 007-048 and 751-619-G1 sputtering head bodies	Spare Parts	750-048-P1	P.O.R.
—	Bellows assembly for pneumatic shutter assembly	Spare Parts	750-169-P4	P.O.R.
CONNECTOR. FEMALE COAX, FOR 750-619-G1 SPUTTERING HEAD BODY	Female coax	Spare Parts	750-174-P2	P.O.R.
SPUTTERING SENSOR BODY ASSEMBLY	Sputtering head body with coax connector	Spare Parts	750-619-G1	P.O.R.
PNEUMATIC SHUTTER ACTUATOR CONTROL VALVE,24V AC/DC	Solenoid Valve, 24V	Valve	750-420-G1	P.O.R.

X CLOSE

Front Load Sputtering Sensors

Ordering Table

Accessories Table

Related Products