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INFICON Deposition Monitor & Controller Selection Guide


Monitoring vs. Controlling

The quartz crystal microbalance (QCM) monitor displays the deposition rate and total thickness of a depositing thin film but has no outputs or feedback to control the power applied to the deposition source during the deposition. However, some monitors have set-point relays that allow a particular deposition to be stopped when the predetermined film thickness is reached.

The QCM controller also displays the deposition rate and total thickness but by contrast provides instantaneous feedback about the deposition rate to the deposition source’s power supply. That is, during the process, any variation in the deposition rate can be corrected by automatic adjustments to the power supply. Most controllers have internal PID logic that allows the operator to adapt the control characteristics to suit most deposition sources available.

Film Thickness Monitor or Controller Components:

To simplify the ordering process, the following components are required to make up a complete package:

  • Sensor: Holds the crystal in a position where it will be exposed to the material being deposited.
  • Crystal (gold, silver, or alloy, based on application): Determines oscillator frequency which changes as the crystal becomes coated.
  • Optional Sensor Shutter: Air-actuated cover exposes or shields the crystal from the material being deposited. Required for dual sensors. Appropriate feedthrough and shutter control valve needed.
  • In-Vacuum Cable: Coaxial cable connects the sensor to the feedthrough. (Not required for Cool Drawer sensors and Front Load Bakeable Sensors)
  • Feedthrough: Carries electrical signals, cooling water, and/or air through the vacuum chamber wall.
  • 6-inch BNC Cable: Coaxial BNC cable connects feedthrough to oscillator.
  • Oscillator*: The electronics that operate the crystal.
  • Sensor Input Cable: Coaxial BNC or Multi-Conductor cable connects the oscillator to the input of the Monitor/Controller.
  • Monitor/Controller: The electronics and software that operate the system.

A monitor measures deposition rate and thickness. A controller also provides an output signal to control source power supply and deposition rate.

* Oscillators are not interchangeable; they are tuned to a specific monitor or controller

Deposition Monitor & Controller Selection Guide

  FTM-2400-S &
FTM-2400-H Monitors
[View Product]
FTC-2800 &
FTC-2800C Controller
[View Product]
XTC/3M & XTC/3S
Controllers
[View XTC/3M]
[View XTC/3S]
IC/6
Controller
Cygnus
Controller
Measurement
Frequency
Range
1.0 to 6.5 MHz 1.0 to 6.5 MHz 5.0 to 6.0 MHz 4.5 to 6.0 MHz 4.5 to 6.0 MHz
Measurement
Resolution
0.37 Å(S); 0.037 Å(H) ± 0.015 Å ±0.034 Å ±0.00433 Å ±0.0042 Å
Reference
Frequency
Stability
±2 ppm total (0 to 50°C) ±2 ppm total (0 to 50°C) ±2 ppm total (0 to 50°C) ±2 ppm total (0 to 50°C) ±2 ppm total (0 to 50°C)
Rate Display
Resolution
- 0.01 Å/sec 0.1 A/s for 0.0 to 99.9 A/s
1 A/s for 100 to 999 A/s
0.001 for 0 to 9.999 Å/s
0.01 for 0 to 99.99 Å/s
0.1 for 100 to 999.9 Å/s
0.001 for 0 to 9.999 Å/s
0.01 for 0 to 99.99 Å/s
0.1 for 100 to 999.9 Å/s
Frequency Rate
Resolution
±0.30 Hz(S); ± 0.03 Hz(H) ±0.012 Hz ±0.028 Hz @ 6 MHz ±0.0035 Hz @ 6 MHz ±0.0035 Hz @ 6 MHz
Measurement
Interval
0.10 to 2.0 s (adjustable) 0.10 to 1.0 s (adjustable) 0.25 s 0.10 s 0.10 s
Thickness
Accuracy
- 0.50% 0.50% 0.50% 0.50%
Multiple
Sensor
Yes
(Up to 6 sources)
Yes
(Up to 4 sources)
Yes
(Up to 2 sources)
Yes
(Up to 8 sources)
Yes
(Up to 6 sources)
Measurement Conventional Oscillation Conventional Oscillation ModeLock ModeLock ModeLock w/ Auto Z
Auto Z No No No Yes Yes
Auto
Tune
No No No Yes No
Co-Deposition No Yes
(Up to 4 sources)
FTM-2800C only
No Yes
(Up to 6 sources)
Yes
(Up to 6 sources)
Film
Programs
99 50 9 (XTC/3S); 32 (XTC/3M) 32 -
Processes No 100 1 (XTC/3S); 99 (XTC/3M) 50 -
Process
Layers
No 1000 1 (XTC/3S); 999 (XTC/3M) 200 -
Data
Logging
Yes Yes Yes Yes Yes
On-Board
Disk Drive
No No No Yes Yes
(Optional)
Single
Sensors
2 Standard
6 Optional
2 Standard
4 Optional
2 Standard 2 Standard
8 Optional
Up to 6
Dual
Sensors
1 Standard 1 Standard
2 Optional
2 Standard
(with XTL2 Optional)
1 Standard
4 Optional
6
(with on XTL2 per sensor input)
Crystal12™
Sensors
No Yes Yes Up to 8 Up to 6
Number of
Sources
No 2 Standard
4 Optional
2 Standard Up to 6 Up to 6
Inputs 4 Standard 8 Standard, 16 Optional 8 TTL 14 Standard (Up to 28) 14 Standard (Up to 28)
Outputs 4 Standard 8 Standard
16 Optional
12 relays + 8 TTL 8 Standard (Up to 24)
programmable SPST relays.
(14 Optional TTL available)
8 Standard (Up to 24)
programmable SPST relays.
(14 Optional TTL available)
Communications
Interface
RS-232 Standard
(TCP/IP or USB Optional)
RS-232 and USB Standard
(RS-232 and TCP/IP Optional)
RS-232 Standard
(TCP/IP and Ethernet Optional)
RS-232 Standard
Ethernet Optional
RS-232 Standard
(IEEE488 Optional)
Dimensions
(H x W x D)
3.5" x 8.5" x 7.75"
8.9 cm x 21.3 cm x 19.7 cm
(half rack)
5.23" x 8.4" x 10.0"
13.3 cm x 21.4 cm x 25.4 cm
(half rack)
3.5" x 8.0" x 12.0"
8.9 cm x 20.3 cm x 30.5 cm
(half rack)
5.25" x 19" x 13"
13.3 cm x 48.3 cm x 33.0 cm
(full rack)
5.25" x 19" x 13"
13.3 cm x 48.3 cm x 33 cm
(full rack)

Contact us by clicking here | +1 412 387 9200 for more information, including pricing and options, and to discuss your specific process application requirements.

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