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KJLC® TruPlasma Pulsed DC Sputtering Power Supplies

Overview

The KJLC TruPlasma Pulsed DC power supply provides all of the advantages of a pulsed-DC solution for your reactive processes— in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology, the TruPlasma power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The TruPlasma product line consists of single-output 1kW and 2kW models, as well as 5kW and 10kW models for higher power applications.

Features

  • Compact package
  • Adjustable pause duration of 1-10µs (1µs resolution)
  • Adjustable pulse frequency of 2-100 kHz
  • Reverse voltage (15% of input voltage)
  • Master slave capability
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Ordering Table

Model Input Voltage Recommended
Sputter Source
Part No Price Add
Item
Model Input Voltage Recommended
Sputter Source
Part No Price Add
Item
1kW DC Pulsed Power Supply
208 VAC
TORUS® Sources (1", 2", & 3")
2018265-1A
P.O.R.
2kW DC Pulsed Power Supply
208 VAC
TORUS® Sources (1", 2", 3" & 4")
2018265-2A
P.O.R.
Pinnacle Plus 10kW DC Power Supply
115 VAC
TORUS® Production Sources (TORUS 7 & Linear)
EJPINN10KPLS
$26,635.00
Pinnacle Plus 5kW DC Power Supply
115 VAC
TORUS® Production Sources (TORUS 6 & TORUS 7)
EJPINN5KPLS
P.O.R.

Contact international@lesker.com or +1 412 387 9200 for more information, including pricing and options, and to discuss your specific process application requirements.

Accessories Table

Type Description Part No Price Add
Item
Type Description Part No Price Add
Item
Interconnect Cable
Type HN Plug To Type N Plug, RG213, 3ft LG
EJCBL3HN
P.O.R.
Interconnect Cable
Type N Plug To Type N Plug, RG213, 3ft LG
EJCBL3NN
P.O.R.
Interconnect Cable
Type N Plug To Pigtail (1/4"Ring Lug Center Connector And Flying Ground Wire), RG213, 3ft LG
EJCBL3NP
P.O.R.
Interconnect Cable
Type N Plug To UHF Plug, RG213, 3ft LG
EJCBL3NU
P.O.R.
Interconnect Cable
Type HN plug to Type N Plug, RG213, 6ft LG
EJCBL6HN
P.O.R.
Interconnect Cable
Type N plug to Type N Plug, 6ft LG
EJCBL6NN
P.O.R.
Interconnect Cable
Type N Plug to Pigtail (1/4" Ring Lug Center Connector And Flying Ground Wire), RG213, 6ft LG
EJCBL6NP
P.O.R.
Interconnect Cable
Type N Plug to UHF Plug, RG213, 6ft LG
EJCBL6NU
P.O.R.

NOTE: If you require a configuration not shown in this table, please contact international@lesker.com or call +1 412 387 9200.