The 3-axis RTTA provides 360° rotation, 760mm linear extension and 50mm Z motion to provide arm lift and lower to aid sample transfer. Typically <1mm deflection at full arm extension with 10N load. Linear reproducibility of <0.2mm and rotational reproducibility of <0.2mm. Motorization options available.
- 760mm extension
- Typically <1mm deflection at full extension under 10N load
- Rotational reproducibility <0.2mm
- Linear reproducibility <0.2mm
- Clean, UHV performance
- Competitively priced compared to conventional designs
The 3-axis RTTA provides a cost-effective radial distribution sample transfer solution for applications that require arm rotation, arm extension and arm lift and lower for sample transfer.
A high torque magnetically-coupled MagiDrive provides arm rotation to align with the desired chamber port. A second MagiDrive is used to drive the innovative telescopic mechanism to provide an arm extension of 760mm to transport the sample in and out of the desired satellite chamber. A linear shift mechanism is used to provide 50mm lift/lower of the sample arm for gravity based sample hand off, typically used on our MBE, sputtering and CVD sample manipulators and heating stages.
The 3-axis RTTA can be fully motorized using stepper or SMART motors. Alternatively the RTTA can be configured to accept any standard NEMA23 frame motor.
|Mounting Flange||CF100 152mm (6") OD CF|
|Min radial port flange size for arm||CF100 152mm (6") OD CF (Arm lift dependent on radial port ID)|
|Min radial port size and clear bore required for assembly installation||CF150 203mm (8") OD CF and 150mm bore|
|Rotation motion||Unlimited manual and +/-180° motorized|
|Minimum chamber ID||630mm|
|Minimum chamber free height||152mm|
|Arm lift motion stroke||50mm (48mm if motorized)|
|Arm extension from port of 630mm ID chamber||688mm*|
|Arm stiffness at full extension||Typically <1mm deflection for 10N load|
|Rotational reproducibility||0.2mm at full extension|
|Bakeout temperature||250°C (with motors removed)|
* Contact us for detailed drawings, STEP files and installation guidance.