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Substrate is oriented parallel to the mounting flange at a standard distance of 240mm from mounting flange to substrate face.
Substrate is mounted at right angles to the mounting flange at a standard distance of 240mm.
Vertical - Substrate facing up
Vertical - Substrate facing down
Other (Non-standard option, please specify below)
More Info GLAD stage provides an in-line solution (as with the ED-I series) but with the addition of substrate tilt. Being an in-line stage, a large range of axial (Z) motion can be provided. Glancing Angle Deposition required: Yes No
GLAD stage provides an in-line solution (as with the ED-I series) but with the addition of substrate tilt. Being an in-line stage, a large range of axial (Z) motion can be provided.
10" OD CF
12" OD CF
14" OD CF
16.5" OD CF
2"
100mm
150mm
200mm
Substrate will be:
Bare Wafer
In A Holder
Note: Standard EC-I configuration selected - click options to select an alternative.
100W DC and RF biasing of the substrate cradle available as option.
None
DC/RF biasing (option)
Stepper Motor
24V DC Motor (option)
Smart Motor (option)
No Motor (option)
20rpm (recommended)
Other - please specify
rpm
Supplied (option)
Cradle can be moved 25mm away from the heater to aid in sample transfer.
25mm pneumatic
Manual hand wheel (option)
None supplied
Fitted (option)
Manually at atmoshpere
Transfer arm under vacuum
50mm (option)
100mm (option)
150mm (option)
Actuation:
None Manual Motorized
Manual shutter (option)
Motorised shutter (option)
Pneumatic shutter (option)
Molybdenum shields
Inconel shields (option)
The deposition cans are cylindrical shields which surround the heater module and cradle assembly to minimise the amount of deposition that reaches them.
None required
Type K
Type C
Quantity required
None One Two
8" OD CF
3"
Note: Standard EC-R configuration selected - click options to select an alternative.
Manual
Stepper Motor (option)
Manual (option)
Specify below (option)
mm
Required (option)
SiCg heater lifetime prediction for different temp & partial pressures of O2.
Standard heating element. Not recommended for oxidising atmospheres as the heating element will degrade over time.
If you are not sure what future processes you may be running we would suggest choosing the sSic option.
Heating element option. Recommended for use in oxidising atmospheres.
To ensure that you receive the correct configuration of EpiCentre it is essential to provide as much information on the potential applications as possible.
Providing this information will help us to specify the correct configuration of EpiCentre to best match your requirements.
Tantalum
Copper
Molybdenum
Aluminium
Stainless Steel
Inconel
No
Yes
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