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CF Flanged Solid Shaft O-Ring Flanged Solid Shaft Thread Mount Solid Shaft Baseplate Mount Solid Shaft

Ferrotec, Solid Shaft Ferro-Magnetic Fluid Rotary Feedthroughs

CF Flanged Solid Shaft

Designed to provide rotary motion under high vacuum, these ferrofluid feedthroughs have ConFlat-compatible (CF) mounting flanges. Normal helium leak detectors capable of detecting 1 x 10-11 std cc/sec of Helium flow detect no leakage for CF mounts under static and dynamic testing. CF flanged rotary motion feedthroughs routinely operate in the 10-6 torr range and, when properly prepared & installed, may be used to mid 10-10 torr. ConFlat® Compatible (CF) Mounting Flanges

Baseplate Mount Solid Shaft

These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by screwing them into a corresponding threaded hole, or on some models by placing them in a suitable smooth-sided port in the chamber wall and using a capture nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring.

In vacuum practice, the o-ring is compressed against the vacuum chamber’s inner surface to limit virtual leaks. As shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. A few, however, are intended to have the o-ring sealing against the air surface. To reduce the virtual leaks associated with the thread, the feedthrough has a flat machined along the length of its threaded portion.

Please refer to the technical notes about loading, temperature, and other relevant information before specifying a feedthrough.

O-Ring Flanged Solid Shaft

These Ferrofluidic® rotary drives are designed for high vacuum applications where the chamber port has a flat, polished outer surface suitable for seating an o-ring surrounding a hole through the vacuum wall. Each feedthrough has a fluorocarbon o-ring installed in the flange. The flanges do not correspond to standard vacuum industry flange systems, however, the dimension table provides the information needed to mate to the chamber. Alternatively, we can supply an adapter spool piece to mate any feedthrough to a vacuum flange.

Thread Mount Solid Shaft

These ferrofluid rotary feedthroughs are sealed by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by screwing them into a corresponding threaded hole, or on some models by placing them in a suitable smooth-sided port in the chamber wall and using a capture nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring.

In vacuum practice, the o-ring is compressed against the vacuum chamber’s inner surface to limit virtual leaks. As shown in the dimensional drawings, most ferrofluid feedthroughs are designed to be installed this way. A few, however, are intended to have the o-ring sealing against the air surface.To reduce the virtual leaks associated with the thread, the feedthrough has a flat machined along the length of its threaded portion.

Please refer to the technical notes about loading, temperature, and other relevant information before specifying a feedthrough.

Features

  • Use a special magnetic fluid (ferrofluid) in place of an o-ring seal around dynamic parts
  • Fluid hermetically seals the shaft making a liquid o-ring while a permanent magnet keeps the fluid in place
  • Ferrofluid magnetically held in stages formed by grooves machined into either the shaft or pole pieces
  • Unlike regular o-rings, the ferrofluid o-ring remains intact for years of operation despite the shaft’s motion

Applications

  • Rotary stages
  • Barrels
  • Platens
  • Planetaries
  • Web coater rollers used in thin film deposition and etching processes

Ferrofluid Sealed Drive
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Ordering Table

Mount
Type
Mount
Size
Bearings Shaft
O.D.
Water
Cooled
Face
O-ring
Part Number Price In Stock Add To
Cart
Mount
Type
Mount
Size
Bearings Shaft
O.D.
Water
Cooled
Face
O-ring
Part Number Price In Stock Add To
Cart
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) Radial/SS 0.375" (9.5mm) No - FE103154 $910.00 In Stock
O-Ring Flanged Solid Shaft DN100CF (6.00" OD) R8/SS 0.50" (12.7mm) Yes
(0.5", 1.74")
O-V234 FE103182 $1,510.00 Contact KJLC for Availability
Thread Mount Solid Shaft 1-14 UNF-2A Thread R8/SS 0.50" (12.7mm) No O-V128 FE103191 $940.00 Contact KJLC for Availability
Thread Mount Solid Shaft 1-14 UNF-2A Thread R12/SS 0.75" (19mm) No O-V128 FE103193 P.O.R. Contact KJLC for Availability
Thread Mount Solid Shaft 1-14 UNF-2A Thread R8/SS 0.50" (12.7mm) Yes
(0.89", 1.74")
O-V128 FE103204 $1,300.00 Contact KJLC for Availability
Thread Mount Solid Shaft 1-14 UNF-2A Thread R12/SS 0.75" (19mm) Yes
(0.89", 1.74")
O-V128 FE103206 $1,420.00 Contact KJLC for Availability
Baseplate Mount Solid Shaft 3/4" BP R4/SS 0.25" (6.35mm) - O-V026 FE103236 $710.00 Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP R4/SS 0.25" (6.35mm) - O-V026 FE103237 $710.00 Contact KJLC for Availability
O-Ring Flanged Solid Shaft DN100CF (6.00" OD) R8/SS 0.50" (12.7mm) No O-V234 FE103244 $1,320.00 Contact KJLC for Availability
O-Ring Flanged Solid Shaft DN100CF (6.00" OD) R12/SS 0.75" (19mm) No O-V234 FE103246 $2,265.00 Contact KJLC for Availability
O-Ring Flanged Solid Shaft 7.00" Flange OD Ang. Cont/BS 1.687" (42.85mm) Yes
(2.25", 1.5")
O-V351 FE103328 P.O.R. Contact KJLC for Availability
O-Ring Flanged Solid Shaft 7.00" Flange OD Ang. Cont/BS 0.50" (12.7mm) Yes
(2.25", 1.5")
O-V351 FE103329 P.O.R. Contact KJLC for Availability
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) R4/SS 0.25" (6.35mm) Yes
(1.14", 1.87")
- FE103501 P.O.R. In Stock
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) R4/SS 0.25" (6.35mm) No - FE103532 P.O.R. Contact KJLC for Availability
O-Ring Flanged Solid Shaft 5.00" Flange OD 7305/BS 0.75" (19mm) Yes
(1.58", 1.54")
O-V337 FE103904 $4,410.00 Contact KJLC for Availability
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) R8/SS 0.50" (12.7mm) No - FE103909 $1,095.00 Contact KJLC for Availability
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) R6/SS 0.375" (9.5mm) Yes
(1.07", 1.24")
- FE103912 $960.00 Contact KJLC for Availability
CF Flanged Solid Shaft DN16CF (1.33" OD) R4/SS 0.25" (6.35mm) No - FE103915 $830.00 In Stock
Thread Mount Solid Shaft 5/16-24 UNF-2A Thread R166/SS 0.1875" (4.76mm) No O-V012 FE103971 $625.00 Contact KJLC for Availability
Thread Mount Solid Shaft 7/16-20 UNF-2A Thread R4/SS 0.25" (6.35mm) No O-V015 FE103978 $710.00 Contact KJLC for Availability
Baseplate Mount Solid Shaft 1.5" BP Radial/SS 0.25" (6.35mm) - O-V132 FE103979 P.O.R. Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP R4/SS 0.25" (6.35mm) - O-V215 FE103982 $710.00 Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP R6/SS 0.375" (9.5mm) - O-V026 FE103990 $830.00 Contact KJLC for Availability
Baseplate Mount Solid Shaft 1.5" BP R6/SS 0.375" (9.5mm) - O-V132 FE103991 $830.00 Contact KJLC for Availability
O-Ring Flanged Solid Shaft DN100CF (6.00" OD) Ang. Cont/BS 1.00" (25.4mm) Yes
(1.72", 1.54")
O-V340 FE104259 P.O.R. Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP Radial/SS 0.25" (6.35mm) - O-V026 FE104445 P.O.R. Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP R4/SS 0.25" (6.35mm) - O-V026 FE107519 $560.00 Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP R6/SS, R620/SS 0.375" (9.5mm) - O-V026 FE108664 P.O.R. Contact KJLC for Availability
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) 6800/SS 0.375" (9.5mm) No - FE121060 $1,600.00 Contact KJLC for Availability
CF Flanged Solid Shaft DN35CF-DN40CF (2.75" OD) 6800/SS 0.375" (9.5mm) Yes
(0.75")
- FE121099 P.O.R. Contact KJLC for Availability
Baseplate Mount Solid Shaft 1" BP 6800/SS 0.375" (9.5mm) - O-V026 FE121132 P.O.R. Contact KJLC for Availability
Contact Us - Ferrotec, Solid Shaft Ferro-Magnetic Fluid Rotary Feedthroughs