KJLC Standard, Solid Shaft Ferro-Magnetic Fluid Rotary Feedthroughs

CF Flanged Solid Shaft

Designed to provide rotary motion under high vacuum, these Ferro-Magnetic Fluid Sealed feedthroughs have ConFlat^® compatible (CF) mounting flanges. Normal helium leak detectors capable of detecting 1 x 10^-11 std cc/sec of Helium flow detect no leakage for CF mounts under static and dynamic testing. Our CF flanged rotary motion feedthroughs routinely operate in the 10^-7 Torr range and, when properly prepared and installed, may be used to mid 10^-9 Torr using ConFlat compatible (CF) Mounting Flanges.

Baseplate Mount Solid Shaft

These Ferro-Magnetic Fluid sealed rotary feedthroughs are sealed to the baseplate by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by placing them in a suitable smooth-sided port in the chamber wall and using a capture nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring.

Please refer to the technical notes about loading, temperature, and other relevant information before specifying a feedthrough.

O-Ring Flanged Solid Shaft

These Ferro-Magnetic Fluid sealed rotary drives are designed for high vacuum applications where the chamber port has a flat, polished outer surface suitable for seating an o-ring surrounding a hole through the vacuum wall. Each feedthrough has a fluorocarbon o-ring installed in the flange. These flanges do not correspond to standard vacuum industry flange systems; however, the dimension table provides the information needed to mate to the chamber. Alternatively, we can supply an adapter spool piece to mate any feedthrough to a vacuum flange.

Thread Mount Solid Shaft

These Ferro-Magnetic Fluids sealed rotary feedthroughs are sealed to a flat surface by a fluorocarbon o-ring. The operator mounts these drives to the vacuum chamber by screwing them into a corresponding threaded hole, or on some models by placing them in a suitable smooth-sided port in the chamber wall and using a capture nut. Some models are threaded only part way. They will accommodate various wall thicknesses when used with a sleeve or spacer over the unthreaded portion so that the nut compresses the o-ring.

Please refer to the technical notes about loading, temperature, and other relevant information before specifying a feedthrough.

Features

• A unique magnetic fluid (ferrofluid) is used in place of an o-ring seal around dynamic parts
• Fluid hermetically seals the shaft, making a liquid o-ring while a permanent magnet keeps the fluid in place
• Ferrofluid magnetically held in stages formed by grooves machined into either the shaft or pole pieces
• Very long life as compared to dynamic o-ring seals
• Low particulate generation for sensitive environments

Applications

• Rotary stages
• Barrels
• Platens
• Planetaries
• Web coater rollers used in thin film deposition and etching processes