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Gas (Per Semi Standard E52-0703) Listing


SEMI E52-0703 - Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers.

Code Name Symbol
Code Name Symbol
1
Helium
He
2
Neon
Ne
3
Radon
Rn
4
Argon
Ar
5
Krypton
Kr
6
Xenon
Xe
7
Hydrogen
H2
8
Air
Air
9
Carbon Monoxide
CO
10
Hydrogen Bromide
HBr
11
Hydrogen Chloride
HCl
12
Hydrogen Fluoride
HF
13
Nitrogen
N2
14
Deuterium
D2
15
Oxygen
O2
16
Nitric Oxide
NO
17
Hydrogen Iodide
HI
18
Fluorine
F2
19
Chlorine
Cl2
20
Water Vapor
H2O
21
Bromine
Br2
22
Hydrogen Sulfide
H2S
23
Hydrogen Selenide
H2Se
24
Hydrogen Cyanide
HCN
25
Carbon Dioxide
CO2
26
Nitrogen Dioxide
NO2
27
Nitrous Oxide
N2O
28
Methane
CH4
29
Ammonia
NH3
30
Ozone
O3
31
Phosphine
PH3
32
Sulfur Dioxide
SO2
33
Methyl Fluoride
CH3F
34
Carbonyl Sulfide
COS
35
Arsine
AsH3
36
Methyl Chloride
CH3Cl
37
Cyanogen Chloride
ClCN
38
Ethylene
C2H4
39
Silane
SiH4
40
Carbon Disulfide
CS2
41
Oxygen Difluoride
OF2
42
Acetylene
C2H2
43
Germane
GeH4
44
Methyl Bromide
CH3Br
45
Ethylene Oxide
C2H4O
46
Carbonyl Fluoride
CF2O
47
Methyl Mercaptan
CH4S
48
Boron Trifluoride
BF3
49
Fluoroform
CHF3
50
Hydrazine
N2H4
51
Vinyl Fluoride
C2H3F
52
Methylamine
CH5N
53
Nitrogen Trifluoride
NF3
54
Ethane
C2H6
55
Vinyl Chloride
C2H3Cl
56
Vinyl Bromide
C2H3Br
57
Chlorodifluoromethane
CHClF2
58
Diborane
B2H6
59
Cyanogen
C2N2
60
Phosgene
CCl2O
61
Cyclopropane
C3H6
62
Phosphorus Trifluoride
PF3
63
Carbon Tetrafluoride
CF4
64
Difluoroethylene
C2H2F2
65
Dichlorofluoromethane
CHCl2F
66
Allene
C3H4
67
Dichlorosilane
SiH2Cl2
68
Methyl Acetylene
C3H4
69
Propylene
C3H6
70
Boron Trichloride
BCl3
71
Chloroform
CHCl3
72
Perchloryl Fluoride
ClO3F
73
Dimethyl Ether
C2H6O
74
Chlorotrifluoromethane
CClF3
75
Ethyl Chloride
C2H5Cl
76
Bromine Trifluoride
BrF3
77
Chlorine Trifluoride
ClF3
78
Nitrogen Trioxide
N2O3
79
Boron Tribromide
BBr3
80
Bromotrifluoromethane
CBrF3
81
Methyl Vinyl Ether
C3H6O
82
Difluoroethane
C2H4F2
83
Tribromomethane
CHBr3
84
Dichlorodifluoromethane
CCl2F2
85
Dimethylamine
C2H7N
86
Sulfur Tetrafluoride
SF4
87
Sulfuryl Fluoride
SO2F2
88
Silicon Tetrafluoride
SiF4
89
Propane
C3H8
90
Intentionaly Left Blank
91
Trichlorofluoromethane
CCl3F
92
Intentionaly Left Blank
93
Ethyl Acetylene
C4H6
94
Tetrafluorethylene
C2F4
95
Nitrogen Tetroxide
N2O4
96
Arsenic Pentafluoride
AsF5
97
Disilane
Si2H6
98
Transbutene
C4H8
99
Germanium Tetrafluoride
GeF4
100
Butadiene
C4H6
101
Carbon Tetrachloride
CCl4
102
Phosphorous Oxychloride
POCl3
103
Difluorochloroethane
C2H3ClF2
104
Butene
C4H8
105
Bromotrifluoroethylene
C2BrF3
106
Isobutene
C4H8
107
Cisbutene
C4H8
108
Silicon Tetrachloride
SiCl4
109
Trimethylamine
C3H9N
110
Sulfur Hexafluoride
SF6
111
Isobutane
C4H10
112
Trichloroethane
C2H3Cl3
113
Germanium Tetrachloride
GeCl4
114
Titanium Tetrachloride
TiCl4
115
Iodine Pentafluoride
IF5
Code Name Symbol
Code Name Symbol
116
Bromine Pentafluoride
BrF5
117
Butane
C4H10
118
Hexafluoroethane
C2F6
119
Chloropentafluoroethane
C2ClF5
120
Methylbutene
C5H10
121
Tungsten Hexafluoride
WF6
122
Dimethylpropane
C5H12
123
Uranium Hexafluoride
UF6
124
Molybdenum Hexafluoride
MoF6
125
Dichlorotetrafluoroethane
C2Cl2F4
126
Trichlorotrifluoroethane
C2Cl3F3
127
Hexane
C6H14
128
Perfluoropropane
C3F8
129
Octafluorocyclobutane
C4F8
130
Dibromotetrafluorethane
C2Br2F4
131
Trimethoxyborine
C3H9BO3
132
Trimethylphosphorous
C3H9P
133
Trimethylphosphite
C3H9PO3
134
Difluorosilane
SiH2F2
135
Dimethylzinc
C2H6Zn
136
Ethanol
C2H6O
137
Halothane
C2HBrClF3
138
Hexafluoropropylene
C3F6
139
Hexamethyldisilane
C6H18Si2
140
Nickel Carbonyl
C4O4Ni
141
Nitrosyl Chloride
NOCl
142
Pentaborane
B5H9
143
Phosphorus Pentafluoride
PF5
144
Tetraethoxysilane
C8H20O4Si
145
Tin Tetrachloride
SnCl4
146
Tributylaluminum
C12H27Al
147
Trichlorosilane
SiHCl3
148
Triethylgallium
C6H15Ga
149
Trimethylaluminum
C3H9Al
150
Trimethylantimony
C3H9Sb
151
Trimethylarsenic
C3H9As
152
Trimethylgallium
C3H9Ga
153
Trimethylindium
C3H9In
154
Diethylsilane
C4H12Si
155
Pentafluoroethane
C2HF5
156
Tetrafluoroethane
C2H2F4
157
Tetrafluorohydrazine
N2F4
158
Tetramethylcyclotetra-siloxane
C4H16Si4O4
159
Tritium
T2
160
Difluoromethane
CH2F2
161
Tertiarybutylarsine
C4H11As
162
Tertiarybutylphosphine
C4H11P
163
Triethylborate
C6H15O3B
164
Dimethylaluminum-hydride
C2H7Al
165
Trimethylaminealane
C3H12AlN
166
Dimethylethylaminealane
C4H14NAl
167
Nitric Acid
HNO3
168
Tetrachloroethylene
C2Cl4
169
Ethyleneglycol
C2H6O2
170
Hexanediol-1,6
C6H14O2
171
Sulfuric Acid
H2SO4
172
Chlorobenzene
C6H5Cl
173
Acetonitrile
C2H3N
174
Ethylbenzene
C8H10
175
Intentionaly Left Blank
176
Methanol
CH4O
177
Methylcyclohexane
C7H14
178
4-Methyl, 1-Pentene
C6H12
179
o-Xylene
C8H10
180
Phenol
C6H6O
181
Toluene
C7H8
182
Tetrahydrofuran
C4H8O
183
Methyltrichlorosilane
CH3Cl3Si
184
Acetone
C3H6O
185
Methylsilane
CH6Si
186
2,2 Dichloro1,1,1 Trifluoroethane
C2HCl2F3
187
Isopropal Alcohol
C3H8O
188
Diethoxy Dimethyl Silane
C6H16O2Si
189
Sulfur Monochloride
S2Cl2
190
Trimethyl Silane
C3H10Si
191
Dichloroethylene -trans
C2H2Cl2
192
Hexafluorobenzene
C6F6
193
Phosphorus Trichloride
PCL3
194
Titaniun Tetraisopropoxide
C12H28OTi
195
Arsenic Trifluoride
AsF3
196
Arsenic Triiodine
AsI3
197
Benzene
C6H6
198
Borazine
B3N3H6
199
Bromochlorodifluoromethane
CBrClF2
200
Carbon Tetrabromide
CBr4
201
Chlorine Dioxide
ClO2
202
Chlorine Pentafluoride
ClF5
203
Chlorodifluoroethane
C2H3ClF2
204
Chlorodifluoroethylene
C2HClF2
205
Chlorosilane
SiH3Cl
206
Chlorotrifluoroethylene
C2ClF3
207
Cyclobutane
C4H8
208
Diazomethane
CH2N2
209
Dibromodifluoromethane
CBr2F2
210
Dichloroethylene
C2H2Cl2
211
Dichloroethylene -cis
C2H2Cl2
212
Dichlorodimethylsilane
C2H6SiCl2
213
Diethylamine
C4H11N
214
Diethylzinc
C4H10Zn
216
Arsenic Trichloride
AsCl3
217
Digermane
Ge2H6
218
Dimethylcadmium
C2H6Cd
219
Dimethylsilane
C2H8Si
220
Dimethyltellurium
C2H6Te
221
Ethyl Fluoride
C2H5F
222
Ethylene Dichloride
C2H4Cl2
223
Fluoroacetylene
C2HF
224
Fluorotriethoxysilane
C6H15OSiF
225
Hexafluoroacetone
C3F6O
226
Aluminum Trifluoride
AlF3
227
Hexamethyldisilazane
C6H19Si2N
228
Hexamethyldisiloxane
C6H18Si2O
229
Hydrogen telluride
H2Te
230
Iron Carbonyl
C5O5Fe
231
Isopentane
C5H12
Code Name Symbol
Code Name Symbol
232
Difluoroamidogen
NF2
233
Monoethylamine
C2H7N
234
Monomethyl hydrazine
CH6N2
235
Nitromethane
CH3NO2
236
Octafluorobutane
C4F8
237
Octane
C8H18
238
Oxygen Dichloride
OCl2
239
Pentaborane(11)
B5H11
240
Pentane
C5H12
241
Perfluorobutane
C4F10
242
Arsenic Tribromide
AsBr3
243
Rhenium Hexafloride
ReF6
244
Deuteriumsilane
SiD4
245
Stibine
SbH3
246
Sulfur Trioxide
SO3
247
Tellurium Hexafluoride
TeF6
248
Tetrachlorodiborane
B2Cl4
249
Tetrafluorodiborane
B2F4
250
Tetramethylgermanium
C4H12Ge
251
Tetramethylsilane
C4H12Si
252
Tetramethyl Tin
C4H12Sn
253
Tetrasilane
Si4H10
254
Titanium Tetraiodide
TiI4
255
Tribromostibine
SbBr3
256
Trichlorostibine
SbCl3
257
Triethylaluminum
C6H15Al
258
Triethylantimony
C6H15Sb
259
Trifluoroacetic Acid
CF3CO2H
260
Trifluoroacetonitrile
C2F3N
261
Trifluorosilane
SiHF3
262
Triisobutylaluminum
C12H27Al
263
Xylene m-
C8H10
264
Xylene p-
C8H10
265
Dichloromethane
CH2Cl2
266
Octafluorocyclopentene
C5F8
267
Hexafluoro Propane
C3H2F6
268
Methylene Bromide
CH2Br2
269
Hydrazoic Acid
HN3
270
Hexafluoro-2-Butyne
C4F6
271
Butanol-1
C4H10O
272
Hexafluoro Acetylacetone
C5H2F6O2
273
Tungsten Hexacarbonyl
C6O6W
274
TEAsat
C6H15O4As
275
Hafnium Tetranitrate
HfN4O12
276
Acrylonitrile
C3H3N
277
Trimethylborane
C3H9B
278
Silicon tetrabromide
Br4Si
279
Tantalum (V) ethoxide
C10H25O5Ta
280
Diphenylmethylenediamine
C13H14N2
281
Diphenylmethan-4,4'-diisocyanat
C15H10N2O
282
Tetrakis( diethylamino )titanium
C16H40N4Ti
283
Acetic acid
C2H4O2
284
Dimethyl selenide
C2H6Se
285
Ethoxy silane
C2H8OSi
286
Hexafluoropropylene oxide
C3F6O
287
Trimethoxy silane
C3H10O3Si
288
Pentafluoropropanol
C3H3F5O
289
Acrylic acid
C3H4O2
290
Trifluoropropane
C3H5F3
291
Ethyl Formate
C3H6O2
292
Methyl acetate
C3H6O2
293
Propenamine
C3H7N
294
Trimethyl ester phosphoric acid
C3H9O4P
295
Heptafluoropropane
C3HF7
296
Hexafluorocyclobutene
C4F6
297
Hexafluoro butadiene-1,3
C4F6
298
Diethyl sulfide
C4H10S
299
Tetramethoxygermanium
C4H12GeO4
300
Dimethoxydimethyl silane
C4H12O2Si
301
Tetramethoxy silane
C4H12O4Si
302
Tetramethyl lead
C4H12Pb
303
Trimethylvinylsilane
C5H12Si
304
Pyridine
C5H5N
305
Methyl methacrylate polymer
C5H8O2
306
Triethyl arsine
C6H15As
307
Trietoxy arsine
C6H15AsO3
308
Triethoxyborane
C6H15BO3
309
Triethylindium
C6H15In
310
Triethylamine
C6H15N
311
Triethoxyphosphine
C6H15O3P
312
Triethoxy silane
C6H16O3Si
313
Triethyl silane
C6H16Si
314
Trimethylisoxazole
C6H9NO
315
Tetraethylgermane
C8H20Ge
316
Tetraethyl lead
C8H20Pb
317
Tetraethyl silane
C8H20Si
318
Tetrakis( dimethylamino )titanium
C8H24N4Ti
319
Styrene
C8H8
320
Triallylamine
C9H15N
321
Trifluoromethylhypofluorite
CF4O
322
Formaldehyde
CH2O
323
Iodomethane
CH3I
324
Xenon difluoride
XeF2
325
Selenium hexafluoride
SeF6
326
Disilane hexafluoride
SiF6
327
Fluoro silane
SiH3F
328
Trisilane
Si3H8
329
Mercury
Hg
330
Zinc
Zn
331
Acetaldehyde methoxy
C3H6O2
332
Acetone,hydroxy
C3H6O2
333
Glycol methylene ether
C3H6O2
334
Propanoic acid
C3H6O2
335
Glycidol
C3H6O2
336
Butanol-2
C4H10O
337
Tertiary Butyl Alcohol
C4H10O
338
Diethyl ether
C4H10O
339
Methyl propyl ether
C4H10O
340
Methyl isopropyl ether
C4H10O
341
Isobutyl Alcohol
C4H10O
342
3-one-2,5-dimethyl hexadiene
C8H10
343
1,7-Octadiyne
C8H10
344
2,6-Octadiyne
C8H10
345
1,3,5,7-Octatetraene
C8H10