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Agilent (Varian) Diffusion Pumps

Because of its simplicity, high performance and low initial cost, the diffusion pump is the primary industrial high vacuum pumping mechanism. Agilent diffusion pumps offer high pumping speeds, high throughput, high tolerance forepressure, excellent backstreaming characteristics, low ultimate pressure, and long-term reliability. The full fractionating design allows vaporized fluid to be fractionated in the boiler and jet assembly. Contamination and decomposition products are pumped away and only the purest vapor reaches the top jet, assuring highest speed and lowest backstreaming. The foreline ejector stage provides high tolerance for pressure and a large surface area for efficient degassing of compressed fluid, while the foreline baffle minimizes fluid loss, even under high throughput conditions.

HS2 Model : High speed, low ultimate pressure, high throughput, high tolerable forepressure, and low backstreaming combine with low cost to make HS2 an excellent choice for your diffusion pump needs. Equipped with full thermal protection and quick cool coils.

VHS Series : Fast and clean diffusion pumps for their size, these pumps have a sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid.

Dimensional Drawings

Charts

Pump Model	VHS-4	VHS-6	VHS-10
Pumping Speeds	N2: 750 L/s He: 940 L/s H2: 940 L/s	N2: 1550 L/s He: 1930 L/s H2: 1930 L/s	N2: 3650 L/s He: 4560 L/s H2: 4560 L/s
Ultimate Pressure	Ultimate 6.50 x 10^-9 hPA 6.50 x 10^-9 mbar 6.50 x 10^-7 Pa 4.88 x 10^-9 Torr	Ultimate 6.50 x 10^-9 hPA 6.50 x 10^-9 mbar 6.50 x 10^-7 Pa 4.88 x 10^-9 Torr	Ultimate 6.50 x 10^-9 hPA 6.50 x 10^-9 mbar 6.50 x 10^-7 Pa 5.00 x 10^-9 Torr
Max Foreline Pressure	7.30 x 10^-1 mbar 5.50 x 10^-1 Torr	7.30 x 10^-1 mbar 5.50 x 10^-1 Torr	7.30 x 10^-1 hPA 7.20 x 10^-1 - 7.30 x 10^-1 mbar 73.0 Pa 5.50 x 10^-1 Torr
Max Start Pressure	2.70 x 10^-3 mbar 2.03 x 10^-3 Torr	2.00 x 10^-3 mbar 1.50 x 10^-3 Torr	2.30 x 10^-3 - 2.30 x 10^-1 mbar 1.70 x 10^-3 - 1.73 x 10^-1 Torr
Cooling Method(s)	Method Water Water Flow Rate 0.15 gal/hr 30 L/hr	Method Water Water Flow Rate 0.25 gal/hr 50 L/hr	Method Water Water Flow Rate 0.4 gal/hr 80 L/hr
Foreline Flange	KF40	KF50	ISO63-K 2" ASA ISO63
Inlet Flange	4" ASA	6" ASA	10" ASA ISO320-K
Oil Capacity Quarts (Liters) *Unless otherwise noted	0.30 ( 0.30 )	0.53 ( 0.50 )	1.05 - 1000 ( 1.00 - 1.00 )
Weight Lbs (kg)	55.0 ( 25.0 )	74.8 ( 34.0 )	149 - 150 ( 68.0 - 68.0 )
Lubrication Type	Wet	Wet	Wet
Technology Type	Diffusion	Diffusion	Diffusion

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Pump Model	HS-2	HS-16	HS-20	HS-32
Pumping Speeds	N2: 160 L/s He: 200 L/s H2: 200 L/s	N2: 6000 L/s He: 7500 L/s H2: 7500 L/s	N2: 10000 L/s He: 12500 L/s H2: 12500 L/s 10000 - 12500 L/s	N2: 17300 L/s He: 21625 L/s H2: 21625 L/s
Ultimate Pressure	Ultimate 6.50 x 10^-8 hPA 6.50 x 10^-8 mbar 6.50 x 10^-6 Pa 4.88 x 10^-8 Torr	Ultimate 5.00 x 10^-8 hPA 5.00 x 10^-8 mbar 5.00 x 10^-6 Pa 3.75 x 10^-8 Torr	Ultimate 5.00 x 10^-8 hPA 5.00 x 10^-8 mbar 5.00 x 10^-6 Pa 3.75 x 10^-8 Torr	Ultimate 5.00 x 10^-8 hPA 5.00 x 10^-8 mbar 5.00 x 10^-6 Pa 3.75 x 10^-8 Torr
Max Foreline Pressure	5.20 x 10^-1 mbar 4.00 x 10^-1 Torr	7.20 x 10^-1 mbar 5.50 x 10^-1 Torr	7.20 x 10^-1 mbar 5.50 x 10^-1 Torr	4.50 x 10^-1 mbar 3.50 x 10^-1 Torr
Max Start Pressure	4.90 x 10^-3 mbar 3.68 x 10^-3 Torr	2.00 x 10^-3 mbar 1.50 x 10^-3 Torr		1.70 x 10^-3 mbar 1.28 x 10^-3 Torr
Cooling Method(s)	Method Water Water Flow Rate 0.1 gal/hr 20 L/hr	Method Water Water Flow Rate 1.5 gal/hr 300 L/hr	Method Water Water Flow Rate 90 gal/hr 300 L/hr	Method Water Water Flow Rate 4 gal/hr 800 L/hr
Foreline Flange	0.84" Diam Tube	ISO63-K	ISO63-K	ISO63-K
Inlet Flange	2" ASA	16" ASA	20" ASA	32" ASA
Oil Capacity Quarts (Liters) *Unless otherwise noted	0.11 ( 0.10 )	2.95 ( 2.80 )	4.97 ( 4.70 )	11.9 ( 11.3 )
Weight Lbs (kg)	19.8 ( 9.00 )	480 ( 218 )	580 ( 264 )	1350 ( 612 )
Lubrication Type	Wet	Wet	Wet	Wet
Technology Type	Diffusion	Diffusion	Diffusion	Diffusion

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Voltage & Phases	Oil Prep	Manual	Reman KJLC Remanufactured	Description	Part Number	Price	In Stock	Add To Cart
Pump Model	Inlet Flange	Foreline Flange	Voltage & Phases	Oil Prep	Manual	Reman KJLC Remanufactured	Description	Part Number	Price	In Stock	Add To Cart
HS-20	20" ASA	ISO63-K	—	—	—	KJLC Remanufactured	EUDF PUMP, REMANUFACTURED, DIFFUSION, HS-20, W/ASA FLANGES, w/BAFFLE, 480V, 3PH SN#	84341319-R	P.O.R.
HS-20	20" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF - PUMP, DIFFUSION AGILENT HS-20, 20" ASA INLET FLANGE, 10000 L/S, 480V THREE PHASE	DPD10000SGA	P.O.R.
VHS-6	6" ASA	KF50	120 VAC, Single Phase	—		—	PUMP, DIFFUSION AGILENT VHS-6, 6" ASA INLET FLANGE, 1550 L/S, 120V SINGLE PHASE	DPD1550SAA	P.O.R.
VHS-6	6" ASA	KF50	240 VAC, Single Phase	—		—	PUMP, DIFFUSION AGILENT VHS-6, 6" ASA INLET FLANGE, 1550 L/S, 240V SINGLE PHASE	DPD1550SCA	P.O.R.
HS-2	2" ASA	0.84" Diam Tube	120 VAC, Single Phase	—		—	PUMP, DIFFUSION AGILENT HS-2, 2"ASA INLET FLANGE, 160 L/S, 120V SINGLE PHASE	DPD160SAA	P.O.R.
HS-2	2" ASA	0.84" Diam Tube	240 VAC, Single Phase	—		—	PUMP, DIFFUSION AGILENT HS-2, 2"ASA INLET FLANGE, 160 L/S, 240V SINGLE PHASE	DPD160SCA	P.O.R.
HS-32	32" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF - PUMP, DIFFUSION AGILENT HS-32, 32" ASA INLET FLANGE, 17300 L/S, 480V THREE PHASE	DPD17300SGA	P.O.R.
VHS-10	10" ASA	ISO63-K	480 VAC, Three Phase	—		—	PUMP, DIFFUSION AGILENT VHS-10, 10" ASA INLET FLANGE, 3650 L/S, 480V THREE PHASE	DPD3650SGA	P.O.R.
HS-16	16" ASA	ISO63-K	480 VAC, Three Phase	—		—	EUDF, PUMP, DIFFUSION AGILENT HS-16, 16" ASA INLET FLANGE, 6000 L/S, 480V THREE PHASE	DPD6000SGA	P.O.R.
VHS-4	4" ASA	KF40	120 VAC, Single Phase	—		—	PUMP, DIFFUSION AGILENT VHS-4, 4" ASA INLET FLANGE, 750 L/S, 120V SINGLE PHASE	DPD750SAA	P.O.R.
VHS-4	4" ASA	KF40	240 VAC, Single Phase	—		—	PUMP, DIFFUSION AGILENT VHS-4, 4" ASA INLET FLANGE, 750 L/S, 240V SINGLE PHASE	DPD750SCA	P.O.R.
VHS-10	ISO320-K	2" ASA,ISO63	208/240/380/480 VAC 50/60 Hz, 3-Ø	DC704		KJLC Remanufactured	PUMP,DIFFUSION, REMANUFACTURED, VHS-10, W/COLD CAP,ISO320K, 480V,4400W VERIFY VOLTAGE REQUIRED SN#	L5920309-R	P.O.R.

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Accessories Table

For Pump Model(s)	Description	Accessory Type	Part Number	Price	In Stock	Add To Cart
For Pump Model(s)	Description	Accessory Type	Part Number	Price	In Stock	Add To Cart
All Agilent Diffusion Pumps	704 Silicone Oil (1 gallon)	Silicone Oil	704CA	P.O.R.
All Agilent Diffusion Pumps	704 Silicone Oil (500 cc)	Silicone Oil	704BB	$98.00
All Agilent Diffusion Pumps	705 Silicone Oil (1 gallon)	Silicone Oil	705CA	$845.00
All Agilent Diffusion Pumps	705 Silicone Oil (500 cc)	Silicone Oil	705BB	$158.00
VHS4	Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	CF Hardware Kit	DN160CF-HDKIT	P.O.R.
VHS6	Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	CF Hardware Kit	DN200CF-HDKIT	P.O.R.
VHS4	Clamping Kit, For QF160 (ISO160-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	ISO-K Hardware Kit	QF160K-HDKIT	P.O.R.
VHS6	Clamping Kit, For QF200 (ISO200-K) Flange, Including (12) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	ISO-K Hardware Kit	QF200K-HDKIT	P.O.R.
VHS10	Clamping Kit, For QF320 (ISO320-K) Flange, Including (12) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	ISO-K Hardware Kit	QF320K-HDKIT	P.O.R.
VHS4	Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	KF Hardware Kit	QF40-HDKIT	P.O.R.
M4	Heater (1,190 W; 120 VAC)	Diffusion Heater	H1212-4/9D	$285.00
M4	Heater (1,190 W; 240 VAC)	Diffusion Heater	H1224-4/9D	P.O.R.
VHS4	Heater (1,450 W; 120 VAC)	Diffusion Heater	H1512-4/9D	$196.00
VHS4	Heater (1,450 W; 240 VAC)	Diffusion Heater	H1524-4/9D	P.O.R.
VHS6	Heater (2.2 kW; 120 VAC)	Diffusion Heater	H2212-6D	P.O.R.
VHS6	Heater (2.2 kW; 240 VAC)	Diffusion Heater	H2224-6D	$225.00
HS2	Heater (450 W; 120 VAC)	Diffusion Heater	HW5C033-0118	P.O.R.
HS2	Heater (450 W; 240 VAC)	Diffusion Heater	HW5C033-0116	P.O.R.
VHS10	Heater (5.0 kW; 240 VAC)	Diffusion Heater	H5024-12D	P.O.R.