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EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10

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EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 1

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 2

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 3

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 4

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 5

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 6

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10

Features

Small Air-Cooling Pump
No-Contact Design
High Pumping Speeds at Atmosphere
Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
UL, CE, and NRTL rated
Single and Three Phase Versions Available

Applications

Load Locks
Analytical Instruments (LCMS, ICPMS)
Electron Microscopes
PVD Systems
Oxygen Plasma Systems

Specifications Table

Pump Model	EV-A03	EV-A06	EV-A10
Pumping Speeds	50 (Hz) 8.83 CFM 250 L/min 4.17 L/s 15.0 m3/hr 60 (Hz) 9.00 CFM 254 L/min 4.23 - 15.3 L/s 15.3 m3/hr	50 (Hz) 21.2 CFM 600 L/min 10.0 L/s 36.0 m3/hr 60 (Hz) 21.0 CFM 594 L/min 9.87 L/s 35.7 m3/hr	50 (Hz) 35.3 CFM 1000 L/min 16.7 L/s 60.0 m3/hr 60 (Hz) 35.0 CFM 991 L/min 16.5 L/s 59.5 m3/hr
Max Water Vapor Pumping Rate (with gas ballast)	250 g/hr	350 g/hr	500 g/hr
Ultimate Pressure	Total With Gas Ballast 1.00 x 10^-1 hPA 1.00 x 10^-1 mbar 1.00 x 10¹ Pa 7.50 x 10^-2 Torr Total Without Gas Ballast 1.00 x 10^-2 hPA 1.00 x 10^-2 mbar 1.00 x 10⁰ Pa 7.50 x 10^-3 Torr	Total With Gas Ballast 1.00 x 10^-1 hPA 1.00 x 10^-1 mbar 1.00 x 10¹ Pa 7.50 x 10^-2 Torr Total Without Gas Ballast 1.00 x 10^-2 hPA 1.00 x 10^-2 mbar 1.00 x 10⁰ Pa 7.50 x 10^-3 Torr	Total With Gas Ballast 3.00 x 10^-2 hPA 3.00 x 10^-2 mbar 3.00 x 10⁰ Pa 2.25 x 10^-2 Torr Total Without Gas Ballast 1.00 x 10^-2 hPA 1.00 x 10^-2 mbar 1.00 x 10⁰ Pa 7.50 x 10^-3 Torr
Cooling Method(s)	Method Convection	Method Convection	Method Convection
Inlet Flange	KF25	KF40	KF40
Exhaust Flange	KF25	KF25	KF25
Series	Standard	Standard	Standard
Weight Lbs (kg)	51.0 ( 23.0 )	119 ( 54.0 )	165 ( 75.0 )
Dimensions in. (mm.)	15.2 x 8.27 x 9.84 (385 x 210 x 250 )	18.5 x 11.7 x 10.8 (470 x 298 x 275 )	21.4 x 12.5 x 23.7 (544 x 317 x 603 )
Lubrication Type	Dry	Dry	Dry
Technology Type	Multi-Stage Roots	Multi-Stage Roots	Multi-Stage Roots

X CLOSE

Note:

Power cable included with pumps.

Accessories Table

	For Pump Model(s)	Description	Accessory Type	Part Number	Price	In Stock	Add To Cart
	For Pump Model(s)	Description	Accessory Type	Part Number	Price	In Stock	Add To Cart
	EV-A06-1, EV-A10-3U, EV-A06-2, EV-A10-2U, EV-A06-3, EV-A10-3S-P, EV-A10-2S-P	Auto-Soft Flow Actuated Check Valve (KF40)	Hardware	225-0040	P.O.R.
	EV-A03	Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	KF Hardware Kit	QF25-HDKIT	P.O.R.
	EV-A06, EV-A10	Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	KF Hardware Kit	QF40-HDKIT	P.O.R.
	EV-A03, EV-A06 100-115V 50/60 Hz, 1- Ø	Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 1.8m length	Mains Cable	210685	P.O.R.
	EV-A10 200-240V 50/60 Hz, 1- Ø	Power cable assembly, 6 foot, AWG 14/3, NEMA 5-15 plug	—	914407	P.O.R.
	EV-A10 200-240V 50/60 Hz, 3- Ø	Mains Cable (14/4 Conductor) with Flying Leads for three Phase Pumps, 1.8m Length	Mains Cable	210516	P.O.R.