Features
- Small Air-Cooling Pump
- No-Contact Design
- High Pumping Speeds at Atmosphere
- Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
- UL, CE, and NRTL rated
- Single and Three Phase Versions Available
Applications
- Load Locks
- Analytical Instruments (LCMS, ICPMS)
- Electron Microscopes
- PVD Systems
- Oxygen Plasma Systems
Specifications Table
Pump Model | EV-A03 | EV-A06 | EV-A10 |
---|---|---|---|
Pumping Speeds |
50 (Hz)
8.83 CFM 250 L/min 4.17 L/s 15.0 m3/hr
60 (Hz)
9.00 CFM 254 L/min 4.23 - 15.3 L/s 15.3 m3/hr |
50 (Hz)
21.2 CFM 600 L/min 10.0 L/s 36.0 m3/hr
60 (Hz)
21.0 CFM 594 L/min 9.87 L/s 35.7 m3/hr |
50 (Hz)
35.3 CFM 1000 L/min 16.7 L/s 60.0 m3/hr
60 (Hz)
35.0 CFM 991 L/min 16.5 L/s 59.5 m3/hr |
Max Water Vapor Pumping Rate (with gas ballast) |
250 g/hr | 350 g/hr | 500 g/hr |
Ultimate Pressure |
Total With Gas Ballast
1.00 x 10-1 hPA 1.00 x 10-1 mbar 1.00 x 101 Pa 7.50 x 10-2 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 x 100 Pa 7.50 x 10-3 Torr |
Total With Gas Ballast
1.00 x 10-1 hPA 1.00 x 10-1 mbar 1.00 x 101 Pa 7.50 x 10-2 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 x 100 Pa 7.50 x 10-3 Torr |
Total With Gas Ballast
3.00 x 10-2 hPA 3.00 x 10-2 mbar 3.00 x 100 Pa 2.25 x 10-2 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 x 100 Pa 7.50 x 10-3 Torr |
Cooling Method(s) |
Method Convection |
Method Convection |
Method Convection |
Inlet Flange | KF25 |
KF40 |
KF40 |
Exhaust Flange | KF25 |
KF25 |
KF25 |
Series | Standard |
Standard |
Standard |
Weight Lbs (kg) | 51.0 ( 23.0 ) | 119 ( 54.0 ) | 165 ( 75.0 ) |
Dimensions in. (mm.) | 15.2 x 8.27 x 9.84 (385 x 210 x 250 ) | 18.5 x 11.7 x 10.8 (470 x 298 x 275 ) | 21.4 x 12.5 x 23.7 (544 x 317 x 603 ) |
Lubrication Type | Dry |
Dry |
Dry |
Technology Type | Mult-Stage Roots |
Mult-Stage Roots |
Mult-Stage Roots |
X CLOSE