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EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 1 EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 2 EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 3 EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 4 EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 5 EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10 6

EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10


Features

  • Small Air-Cooling Pump
  • No-Contact Design
  • High Pumping Speeds at Atmosphere
  • Highest Water Vapor Pumping of Any Air-Cooled Dry Pump
  • UL, CE, and NRTL rated
  • Single and Three Phase Versions Available

Applications

  • Load Locks
  • Analytical Instruments (LCMS, ICPMS)
  • Electron Microscopes
  • PVD Systems
  • Oxygen Plasma Systems

Specifications Table

Pump Model EV-A03 EV-A06 EV-A10
Pumping Speeds
50 (Hz)
8.83 CFM
250 L/min
4.17 L/s
15.0 m3/hr
60 (Hz)
9.00 CFM
254 L/min
4.23 L/s
15.3 m3/hr
50 (Hz)
21.2 CFM
600 L/min
10.0 L/s
36.0 m3/hr
60 (Hz)
21.0 CFM
594 L/min
9.87 L/s
35.7 m3/hr
50 (Hz)
35.3 CFM
1000 L/min
16.7 L/s
60.0 m3/hr
60 (Hz)
35.0 CFM
991 L/min
16.5 L/s
59.5 m3/hr
Max Water Vapor
Pumping Rate
(with gas ballast)
250 g/hr 350 g/hr 500 g/hr
Ultimate Pressure
Total With Gas Ballast
1.00 x 10-1 hPA
1.00 x 10-1 mbar
1.00 x 101 Pa
7.50 x 10-2 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-1 hPA
1.00 x 10-1 mbar
1.00 x 101 Pa
7.50 x 10-2 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Total With Gas Ballast
3.00 x 10-2 hPA
3.00 x 10-2 mbar
3.00 x 100 Pa
2.25 x 10-2 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Cooling Method(s) Method
Convection
Method
Convection
Method
Convection
Inlet Flange KF25
KF40
KF40
Exhaust Flange KF25
KF25
KF25
Series Standard
Standard
Standard
Weight Lbs (kg) 51.0 ( 23.0 ) 119 ( 54.0 ) 165 ( 75.0 )
Dimensions in. (mm.) 15.2 x 8.27 x 9.84
(385 x 210 x 250 )
18.5 x 11.7 x 10.8
(470 x 298 x 275 )
21.4 x 12.5 x 23.7
(544 x 317 x 603 )
Lubrication Type Dry
Dry
Dry
Technology Type Mult-Stage Roots
Mult-Stage Roots
Mult-Stage Roots
X CLOSE
Product Brochure
For the full brochure on this product, please click here.
Vacuum Pump Repair
& Services
World class service center for scheduled maintenance, evaluation, and vacuum pump repair.
Request a Service Quote
Request a Pump RMA
Remanufactured Vacuum
Pumps
Click here to view a list of remanufactured vacuum pumps available from The KJLC's Remanufactured Vacuum Pump Division.
Pumps FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Note:
  • Power cable included with pumps.

Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart
For Pump Model(s) Description Part Number Price In Stock Add To Cart
EV-A06-1, EV-A10-3U, EV-A06-2, EV-A10-2U, EV-A06-3, EV-A10-3S-P, EV-A10-2S-P Auto-Soft Flow Actuated Check Valve (KF40)
225-0040
P.O.R.
Contact KJLC for Availability
EV-A03 Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
EV-A06, EV-A10 Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
EV-A03, EV-A06
100-115V 50/60 Hz, 1- Ø
Power cable assembly, 6 foot, AWG 14/3, NEMA 5-15 plug
210685
P.O.R.
Contact KJLC for Availability
EV-A10
200-240V 50/60 Hz, 1- Ø
Power cable assembly, 6 foot, AWG 14/3, NEMA 5-15 plug
914407
P.O.R.
Contact KJLC for Availability
EV-A10
200-240V 50/60 Hz, 3- Ø
Power cable assembly, 6 foot, 14/4 conductor, Open ended
210516
P.O.R.
Contact KJLC for Availability
Contact Us - EBARA EV-A Dry Vacuum Pumps, EV-A03, EV-A06, & EV-A10