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Adixen™ (Pfeiffer®) ATH-M Series

The ATH-M series are hybrid magnetically levitated turbo pumps.

The ATH-M are maintenance-free on clean processes. Because the magnetic bearing of the ATH-M series is maintenance-free, the pumps can run for years without any interruption on a clean process. This gives the ATH-M series a significant cost of ownership advantage over ball bearing turbo pumps.

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Venting Valve:

The emergency venting valve opens in case of violent shocks or large air-inrushes. The valve brakes the rotor quickly and safely.

High throughput at high pressure:

The ATH-M are designed for high pressure and high throughput, but also provide a low ultimate pressure.

ACT 600 M, ACT 1300 M, and ACT 2300 M:

• Compact and highly effective electronic monitoring- Includes an intermediate pumping port intended for continuous high vacuum applications, such as mass spectrometers (this extra port is situated between the inlet port and foreline flange)
• Landing- The pump's emergency backup bearings can withstand up to five hard landings at full speed in the rare event of an accidental cable disconnection or massive inrush of air. The controller also monitors the status of the backup bearing life.

Charts

Specifications Table