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STPXA4503C STP301 STP603 STPL1003 STPXH2603C STPXH3203C Edwards, STPA1303C Edwards, STPA1303C Edwards, STPA803C Edwards, STPH301C Edwards, STPH451C

Edwards STP Series

  • Qualified by all major semiconductors OEMs
  • Used in all major semiconductors fabrication plants
  • Installed base of more than 80000 units, 85% in the semiconductor industry

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Features:

  • Optimized for semiconductor process pressure
  • Complete range from 300 to 4500ls-1
  • Application specific models
  • Installation in any orientation
  • Supported globally by Edwards

STP Range:

  • High throughput series
  • Holweck stage to provide advanced throughput performance
  • Highest levels of throughput required by the next generation of semiconductor etch and CVD processes

Corrosion Resistant:

To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nicke-coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.

Nitrogen Purging:

The corrosion-resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases, minimizing their damage to the pump’s motor and sensor coils.

TMS System:

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particular condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but will also increase its operational life.

Description:

  • iX : Integrated controller
  • C : Corrosive, semi-conductor rated
  • STPH : High throughput
  • STPA : Advanced high throughput
  • STP-X : High throughput and high flow for lighter gases
  • STP-L : Low vibration, for electron microscope and semicon
Product Brochure
For the full brochure on this product, please click here.
Vacuum Pump Repair
& Services
Our factory-trained vacuum pump service technicians are equipped to handle the maintenance and repair of virtually any brand and type of vacuum pump. Click to view details or Request a Quote today.
Remanufactured Vacuum
Pumps
Click here to view a list of remanufactured vacuum pumps available from The KJLC's Remanufactured Vacuum Pump Division.
Pumps FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.
Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

(Click column headers to sort data)

Accessories Pump
Model
Inlet
Flange
Foreline
Flange
Manual Part
Number
Price Add To Cart
Accessories Pump
Model
Inlet
Flange
Foreline
Flange
Manual Part
Number
Price Add To Cart
STP-L301
ISO100-K
KF25
Download PDF
ED-B75800090
P.O.R.
STP-L301
DN100CF (6.00" OD)
KF25
Download PDF
ED-PT470Z000
P.O.R.
STP-L301C
ISO100-K
KF25
Download PDF
ED-B75800010
P.O.R.
STP-L301C
DN100CF (6.00" OD)
KF25
Download PDF
ED-PT47AZ030
P.O.R.
STP-XA2703C
ISO250-F
KF40
Download PDF
ED-PT660Z140
P.O.R.
STP-XA2703C
DN250CF (12.00" OD)
KF40
Download PDF
ED-PT6610010
P.O.R.
STP-XA3203C
DN250CF (12.00" OD)
KF40
Download PDF
ED-PT660Z080
P.O.R.
STP-XA3203C
ISO250-F
KF40
Download PDF
YT660Z050
P.O.R.
STP-iX455
DN100CF (6.00" OD)
KF40
Download PDF
ED-PT640Z050
P.O.R.
STP-iX455
DN160CF (8.00" OD)
KF40
Download PDF
ED-PT640Z060
P.O.R.
STP1003
DN200CF (10.00" OD)
KF40
Download PDF
ED-B72101040
P.O.R.
STP1003
ISO200-F
KF40
Download PDF
ED-PT390Z001
P.O.R.
STP1003C
DN200CF (10.00" OD)
KF40
Download PDF
PT39AZ003
P.O.R.
STP301
DN100CF (6.00" OD)
KF25
Download PDF
B74831010
P.O.R.
STP301
ISO100-K
KF25
Download PDF
ED-B74830020
P.O.R.
STP301C
ISO100-K
KF25
Download PDF
B74871010
P.O.R.
STP301C
DN100CF (6.00" OD)
KF25
Download PDF
B74881010
P.O.R.
STP603
ISO160-F
KF40
Download PDF
ED-B72102010
P.O.R.
STP603
DN160CF (8.00" OD)
KF40
Download PDF
ED-PT390Z005
P.O.R.
STP603C
ISO160-F
KF40
Download PDF
ED-B72102020
P.O.R.
STP603C
DN160CF (8.00" OD)
KF40
Download PDF
ED-PT39AZ002
P.O.R.
STPA1303C
ISO200-F
KF40
Download PDF
ED-B71802020
P.O.R.
STPA1303CV (TMS)
DN200CF (10.00" OD)
KF40
Download PDF
ED-PT3626004
P.O.R.
STPA1303CV (TMS)
ISO200-F
KF40
Download PDF
ED-PT3626005
P.O.R.
STPA1603C
ISO200-F
KF40
Download PDF
ED-B75100010
P.O.R.
STPA1603C
DN200CF (10.00" OD)
KF40
Download PDF
ED-B75100100
P.O.R.
STPA1603CV (TMS)
ISO200-F
KF40
Download PDF
ED-PT4616004
P.O.R.
STPA1603CV (TMS)
DN200CF (10.00" OD)
KF40
Download PDF
ED-PT4616005
P.O.R.
STPA2203C
ISO250-F
KF40
Download PDF
YT4V0Z002
$32,419.00
STPA2203CV (TMS)
ISO250-F
KF40
Download PDF
ED-PT4V66001
P.O.R.
STPA2203CV (TMS)
DN250CF (12.00" OD)
KF40
Download PDF
ED-PT4V66002
P.O.R.
STPA803C
ISO160-F
KF40
Download PDF
ED-B71801000
P.O.R.
STPA803C
DN160CF (8.00" OD)
KF40
Download PDF
ED-B71805010
P.O.R.
STPA803CV (TMS)
ISO160-F
KF40
Download PDF
ED-PT3626000
P.O.R.
STPA803CV (TMS)
DN160CF (8.00" OD)
KF40
Download PDF
ED-PT3626003
P.O.R.
STPH301C
ISO100-F
KF40
Download PDF
ED-B71901010
P.O.R.
STPH301C
DN100CF (6.00" OD)
KF40
Download PDF
ED-PT340Z004
P.O.R.
STPH301CV (TMS)
ISO100-F
KF40
Download PDF
ED-PT3416001
P.O.R.
STPH301CV (TMS)
DN100CF (6.00" OD)
KF40
Download PDF
ED-PT3416005
P.O.R.
STPH451C
ISO160-F
KF40
Download PDF
ED-B71901001
P.O.R.
STPH451C
DN160CF (8.00" OD)
KF40
Download PDF
ED-PT340Z005
P.O.R.
STPH451CV (TMS)
DN160CF (8.00" OD)
KF40
Download PDF
ED-PT3416006
P.O.R.
STPH451CV (TMS)
ISO160-F
KF40
Download PDF
ED-PT3416007
P.O.R.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart
STP-iX455, STP603 /
STP603C, STPA803C, STPH451C
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
STP1003 /
STP1003C, STPA1303C, STPA1603C
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
STP-XA2703C, STP-XZ3203C, STPA2203C
Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN250CF-HDKIT
P.O.R.
STP-iX455, STP-L301 /
STP-L301C, STP301 /
STP301C, STPH301C
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
STP603 /
STP603C, STPA803C, STPH451C
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
STP1003 /
STP1003C, STPA1303C, STPA1603C
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
STP-XA2703C, STP-XZ3203C, STPA2203C
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF250F-HDKIT
P.O.R.
STP-L301 /
STP-L301C, STP301 /
STP301C
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF100K-HDKIT
P.O.R.
STP-L301 /
STP-L301C, STP301 /
STP301C
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
STP-iX455, STP-XA2703C, STP-XZ3203C, STP1003 /
STP1003C, STP603 /
STP603C, STPA1303C, STPA1603C, STPA2203C, STPA803C, STPH301C, STPH451C
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
SCU-1600 Communication Cable, 5m
B75030010
P.O.R.
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
SCU-1600 Controller
YT76Z0Z00
P.O.R.
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
SCU-1600 Power Cable, 10m
YT76Y0A02
P.O.R.
STP301/451, STPL301/451
SCU-350
YT21Z0Z01
P.O.R.
STP301/451, STPL301/451
SCU-350 Communication Cable, 3m
B70700010
P.O.R.
STP301/451, STPL301/451
SCU-350 Power Cable, 3m
B70700090
P.O.R.
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
SCU-800 Communication Cable, 5m
PT49Y0A01
P.O.R.
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
SCU-800 Controller
YT49Z2Z00
P.O.R.
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
SCU-800 Power Cable, 5m
B75130020
P.O.R.