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Edwards STP Series Edwards STP Series 1 STPXA4503C STP301 STP603 STPL1003 STPXH2603C STPXH3203C Edwards, STPA1303C Edwards, STPA1303C Edwards, STPA803C Edwards, STPH301C Edwards, STPH451C

Edwards STP Series

  • Qualified by all major semiconductors OEMs
  • Used in all major semiconductors fabrication plants
  • Installed base of more than 80000 units, 85% in the semiconductor industry

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Features:

  • Optimized for semiconductor process pressure
  • Complete range from 300 to 4500ls-1
  • Application specific models
  • Installation in any orientation
  • Supported globally by Edwards

STP Range:

  • High throughput series
  • Holweck stage to provide advanced throughput performance
  • Highest levels of throughput required by the next generation of semiconductor etch and CVD processes

Corrosion Resistant:

To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nicke-coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.

Nitrogen Purging:

The corrosion-resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases, minimizing their damage to the pump’s motor and sensor coils.

TMS System:

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particular condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but will also increase its operational life.

Description:

  • iX : Integrated controller
  • C : Corrosive, semi-conductor rated
  • STPH : High throughput
  • STPA : Advanced high throughput
  • STP-X : High throughput and high flow for lighter gases
  • STP-L : Low vibration, for electron microscope and semicon

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Specifications Table

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Ordering Table

(Click column headers to sort data)

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Pump Model Inlet Flange Foreline Flange Manual Description Part Number Price In Stock Add To Cart Accessories
Pump Model Inlet Flange Foreline Flange Manual Description Part Number Price In Stock Add To Cart Accessories
STP301 /
STP301C
DN100CF (6.00" OD) KF25 Download PDF PUMP, TURBO, STANDARD, STP301 MAGLEV, 300 L/S (N2), 6"UHV B74831010 P.O.R. Call for Availability
STP301 /
STP301C
ISO100-K KF25 Download PDF PUMP, TURBO, CHEMICAL, STP301C MAGLEV, 300 L/S (N2), ISO100 B74871010 P.O.R. Call for Availability
STP301 /
STP301C
DN100CF (6.00" OD) KF25 Download PDF PUMP, TURBO, CHEMICAL, STP301C MAGLEV, 300 L/S (N2), 6"UHV B74881010 P.O.R. Call for Availability
STPA803C ISO160-F KF40 Download PDF ED-B71801000 P.O.R. Call for Availability
STPA1303C ISO200-F KF40 Download PDF ED-B71802020 P.O.R. Call for Availability
STPA803C DN160CF (8.00" OD) KF40 Download PDF ED-B71805010 P.O.R. Call for Availability
STPH451C ISO160-F KF40 Download PDF ED-B71901001 P.O.R. Call for Availability
STPH301C ISO100-F KF40 Download PDF ED-B71901010 P.O.R. Call for Availability
STP1003 /
STP1003C
DN200CF (10.00" OD) KF40 Download PDF ED-B72101040 P.O.R. Call for Availability
STP603 /
STP603C
ISO160-F KF40 Download PDF ED-B72102010 P.O.R. Call for Availability
STP603 /
STP603C
ISO160-F KF40 Download PDF ED-B72102020 P.O.R. Call for Availability
STP301 /
STP301C
ISO100-K KF25 Download PDF TURBO PUMP, STP-301, ISO100 ED-B74830020 P.O.R. Call for Availability
STPA1603C ISO200-F KF40 Download PDF TURBO PUMP,MAGLEV,1600L/S, ON ISO200F FLANGE ED-B75100010 P.O.R. Call for Availability
STPA1603C DN200CF (10.00" OD) KF40 Download PDF ED-B75100100 P.O.R. Call for Availability
STP-L301 /
STP-L301C
ISO100-K KF25 Download PDF ED-B75800010 P.O.R. Call for Availability
STP-L301 /
STP-L301C
ISO100-K KF25 Download PDF ED-B75800090 P.O.R. Call for Availability
STPH301C DN100CF (6.00" OD) KF40 Download PDF ED-PT340Z004 P.O.R. Call for Availability
STPH451C DN160CF (8.00" OD) KF40 Download PDF ED-PT340Z005 P.O.R. Call for Availability
STPH301C ISO100-F KF40 Download PDF ED-PT3416001 P.O.R. Call for Availability
STPH301C DN100CF (6.00" OD) KF40 Download PDF ED-PT3416005 P.O.R. Call for Availability
STPH451C DN160CF (8.00" OD) KF40 Download PDF ED-PT3416006 P.O.R. Call for Availability
STPH451C ISO160-F KF40 Download PDF ED-PT3416007 P.O.R. Call for Availability
STPA803C ISO160-F KF40 Download PDF ED-PT3626000 P.O.R. Call for Availability
STPA803C DN160CF (8.00" OD) KF40 Download PDF ED-PT3626003 P.O.R. Call for Availability
STPA1303C DN200CF (10.00" OD) KF40 Download PDF ED-PT3626004 P.O.R. Call for Availability
STPA1303C ISO200-F KF40 Download PDF ED-PT3626005 P.O.R. Call for Availability
STP1003 /
STP1003C
ISO200-F KF40 Download PDF ED-PT390Z001 P.O.R. Call for Availability
STP603 /
STP603C
DN160CF (8.00" OD) KF40 Download PDF ED-PT390Z005 P.O.R. Call for Availability
STP603 /
STP603C
DN160CF (8.00" OD) KF40 Download PDF ED-PT39AZ002 P.O.R. Call for Availability
STPA1603C ISO200-F KF40 Download PDF ED-PT4616004 P.O.R. Call for Availability
STPA1603C DN200CF (10.00" OD) KF40 Download PDF ED-PT4616005 P.O.R. Call for Availability
STP-L301 /
STP-L301C
DN100CF (6.00" OD) KF25 Download PDF ED-PT470Z000 P.O.R. Call for Availability
STP-L301 /
STP-L301C
DN100CF (6.00" OD) KF25 Download PDF ED-PT47AZ030 P.O.R. Call for Availability
STPA2203C ISO250-F KF40 Download PDF ED-PT4V66001 P.O.R. Call for Availability
STPA2203C DN250CF (12.00" OD) KF40 Download PDF ED-PT4V66002 P.O.R. Call for Availability
STP-iX455 DN100CF (6.00" OD) KF40 Download PDF ED-PT640Z050 P.O.R. Call for Availability
STP-iX455 DN160CF (8.00" OD) KF40 Download PDF PUMP, TURBO, STP-iX455, 5 AXIS MAGNETIC BEARING, DN160CF INLET FLANGE, KF25 OUTLET PORT ED-PT640Z060 P.O.R. Call for Availability
STP-XZ3203C DN250CF (12.00" OD) KF40 Download PDF ED-PT660Z080 P.O.R. Call for Availability
STP-XA2703C ISO250-F KF40 Download PDF ED-PT660Z140 P.O.R. Call for Availability
STP-XA2703C DN250CF (12.00" OD) KF40 Download PDF ED-PT6610010 P.O.R. Call for Availability
STP1003 /
STP1003C
DN200CF (10.00" OD) KF40 Download PDF PUMP, TURBO, CHEMICAL, MAGLEV, STP1003C, 1000 L/S, 10"UHV PT39AZ003 P.O.R. Call for Availability
STPA2203C ISO250-F KF40 Download PDF PUMP, TURBO, CHEM, MAGLEV, STPA2203C, 2200 L/S(N2), ISO250F INLET, KF40 OUTLET, KF10 PURGE PORT YT4V0Z002 $32,419.00 Call for Availability
STP-XZ3203C ISO250-F KF40 Download PDF PUMP, TURBO, CHEMICAL, MAGLEV, STP3203C, 3200 L/S(N2),ISO320 YT660Z050 P.O.R. Call for Availability
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Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart
For Pump Model(s) Description Part Number Price In Stock Add To Cart
STP-iX455, STP603 /
STP603C, STPA803C, STPH451C
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
Call for Availability
STP1003 /
STP1003C, STPA1303C, STPA1603C
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
Call for Availability
STP-XA2703C, STP-XZ3203C, STPA2203C Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN250CF-HDKIT
P.O.R.
Call for Availability
STP-iX455, STP-L301 /
STP-L301C, STP301 /
STP301C, STPH301C
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
Call for Availability
STP603 /
STP603C, STPA803C, STPH451C
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
Call for Availability
STP1003 /
STP1003C, STPA1303C, STPA1603C
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
Call for Availability
STP-XA2703C, STP-XZ3203C, STPA2203C Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF250F-HDKIT
P.O.R.
Call for Availability
STP-L301 /
STP-L301C, STP301 /
STP301C
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF100K-HDKIT
P.O.R.
Call for Availability
STP-L301 /
STP-L301C, STP301 /
STP301C
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Call for Availability
STP-iX455, STP-XA2703C, STP-XZ3203C, STP1003 /
STP1003C, STP603 /
STP603C, STPA1303C, STPA1603C, STPA2203C, STPA803C, STPH301C, STPH451C
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Call for Availability
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
SCU-1600 Communication Cable, 5m
B75030010
P.O.R.
In Stock
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
SCU-1600 Controller
YT76Z0Z00
P.O.R.
Call for Availability
STP-A2203/2503/2803/3003/3503
STP-F2203, STP-XA2703/3203, STP-XH2603/3203
SCU-1600 Power Cable, 10m
YT76Y0A02
P.O.R.
Call for Availability
STP301/451, STPL301/451 SCU-350
YT21Z0Z01
P.O.R.
Call for Availability
STP301/451, STPL301/451 SCU-350 Communication Cable, 3m
B70700010
P.O.R.
Call for Availability
STP301/451, STPL301/451 SCU-350 Power Cable, 3m
B70700090
P.O.R.
Call for Availability
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
SCU-800 Communication Cable, 5m
PT49Y0A01
P.O.R.
Call for Availability
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
SCU-800 Controller
YT49Z2Z00
P.O.R.
Call for Availability
STP603/1003 Series
STPH301/H451 Series
STPH803/H1303 Series
STPA803C/A1303 Series
STPA1603 Series
SCU-800 Power Cable, 5m
B75130020
P.O.R.
Call for Availability
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