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Edwards STP Series

Qualified by all major semiconductors OEMs
Used in all major semiconductors fabrication plants
Installed base of more than 80000 units, 85% in the semiconductor industry

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Features:

Optimized for semiconductor process pressure
Complete range from 300 to 4500ls^-1
Application specific models
Installation in any orientation
Supported globally by Edwards

STP Range:

High throughput series
Holweck stage to provide advanced throughput performance
Highest levels of throughput required by the next generation of semiconductor etch and CVD processes

Corrosion Resistant:

To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nicke-coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.

Nitrogen Purging:

The corrosion-resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases, minimizing their damage to the pump's motor and sensor coils.

TMS System:

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particular condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but will also increase its operational life.

Description:

iX : Integrated controller
C : Corrosive, semi-conductor rated
STPH : High throughput
STPA : Advanced high throughput
STP-X : High throughput and high flow for lighter gases
STP-L : Low vibration, for electron microscope and semicon

Pump Model	STP-iX455	STP-L301 / STP-L301C	STP301 / STP301C	STP603 / STP603C	STPA803C	STPH301C	STPH451C
Pumping Speeds		N2: 260 L/s H2: 290 L/s	N2: 300 L/s H2: 300 L/s	N2: 650 L/s H2: 550 L/s	N2: 800 L/s H2: 520 L/s	N2: 300 L/s H2: 200 L/s	N2: 450 L/s H2: 300 L/s
Ultimate Pressure	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr	ISO-K Flange 1.33 x 10^-8 hPA 1.33 x 10^-8 mbar 1.33 x 10^-6 Pa 1.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr ISO-K Flange 1.33 x 10^-8 hPA 1.33 x 10^-8 mbar 1.33 x 10^-6 Pa 1.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr ISO-K Flange 6.65 x 10^-8 hPA 6.65 x 10^-8 mbar 6.67 x 10^-6 Pa 5.00 x 10^-8 Torr	ISO-K Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr	ISO-K Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr ISO-K Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr
Max Foreline Pressure	6.70 x 10^-1 hPA 6.70 x 10^-1 mbar 66.7 Pa 5.00 x 10^-1 Torr	1.33 x 10^-1 hPA 1.33 x 10^-1 mbar 13.3 Pa 1.00 x 10^-1 Torr	1.33 x 10^-1 hPA 1.33 x 10^-1 mbar 13.3 Pa 1.00 x 10^-1 Torr	1.33 x 10^-1 hPA 1.33 x 10^-1 mbar 13.3 Pa 1.00 x 10^-1 Torr	2.67 hPA 2.67 mbar 266 Pa 2.00 Torr	6.67 hPA 6.67 mbar 666 Pa 5.00 Torr	6.67 hPA 6.67 mbar 666 Pa 5.00 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	KF40	KF25	KF25	KF40	KF40	KF40	KF40
Inlet Flange	DN100CF (6.00" OD) DN160CF (8.00" OD)	ISO100-K DN100CF (6.00" OD)	ISO100-K DN100CF (6.00" OD)	ISO160-F DN160CF (8.00" OD)	ISO160-F DN160CF (8.00" OD)	ISO100-F DN100CF (6.00" OD)	ISO160-F DN160CF (8.00" OD)
Weight Lbs (kg)		30.8 ( 14.0 )	28.6 - 30.9 ( 13.0 - 14.0 )	68.2 ( 31.0 )	85.8 ( 39.0 )	28.6 - 33.0 ( 13.0 - 15.0 )	30.9 - 33.0 ( 14.0 - 15.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Pump Model	STP-XA2703C	STP-XZ3203C	STP1003 / STP1003C	STPA1303C	STPA1603C	STPA2203C
Pumping Speeds	N2: 2650 L/s H2: 2050 L/s	N2: 3200 L/s H2: 2300 L/s	N2: 1000 L/s H2: 800 L/s	N2: 1300 L/s H2: 800 L/s	N2: 1600 L/s H2: 1200 L/s	N2: 1700 L/s H2: 2200 L/s
Ultimate Pressure	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr ISO-K Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr ISO-K Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr ISO-K Flange 6.65 x 10^-8 hPA 6.65 x 10^-8 mbar 6.67 x 10^-6 Pa 5.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr ISO-K Flange 6.65 x 10^-8 hPA 6.65 x 10^-8 mbar 6.67 x 10^-6 Pa 5.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-10 hPA 1.33 x 10^-10 mbar 1.33 x 10^-8 Pa 1.00 x 10^-10 Torr ISO-K Flange 1.33 x 10^-9 hPA 1.33 x 10^-9 mbar 1.33 x 10^-7 Pa 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-8 hPA 1.33 x 10^-8 mbar 1.33 x 10^-6 Pa 1.00 x 10^-8 Torr ISO-K Flange 1.33 x 10^-8 hPA 1.33 x 10^-8 mbar 1.33 x 10^-6 Pa 1.00 x 10^-8 Torr
Max Foreline Pressure	2.67 hPA 2.67 mbar 266 Pa 2.00 Torr	2.67 hPA 2.67 mbar 266 Pa 2.00 Torr	1.33 x 10^-1 hPA 1.33 x 10^-1 mbar 13.3 Pa 1.00 x 10^-1 Torr	2.67 hPA 2.67 mbar 266 Pa 2.00 Torr	2.67 hPA 2.67 mbar 266 Pa 2.00 Torr	4.00 hPA 4.00 mbar 399 Pa 3.00 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	KF40	KF40	KF40	KF40	KF40	KF40
Inlet Flange	ISO250-F DN250CF (12.00" OD)	DN250CF (12.00" OD) ISO250-F	DN200CF (10.00" OD) ISO200-F	ISO200-F DN200CF (10.00" OD)	ISO200-F DN200CF (10.00" OD)	ISO250-F DN250CF (12.00" OD)
Weight Lbs (kg)			68.2 ( 31.0 )	85.8 ( 39.0 )	77.0 ( 35.0 )	134 ( 61.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
STPA803C	ISO160-F	KF40		—	B71801000	P.O.R.
STPA1303C	ISO200-F	KF40		—	B71802020	P.O.R.
STPA803C	DN160CF (8.00" OD)	KF40		—	B71805010	P.O.R.
STPH451C	ISO160-F	KF40		—	B71901001	P.O.R.
STPH301C	ISO100-F	KF40		—	B71901010	P.O.R.
STP1003 / STP1003C	DN200CF (10.00" OD)	KF40		—	B72101040	P.O.R.
STP603 / STP603C	ISO160-F	KF40		—	B72102010	P.O.R.
STP603 / STP603C	ISO160-F	KF40		—	B72102020	P.O.R.
STP301 / STP301C	ISO100-K	KF25		—	B74830020	P.O.R.
STP301 / STP301C	DN100CF (6.00" OD)	KF25		PUMP, TURBO, STANDARD, STP301 MAGLEV, 300 L/S (N2), 6"UHV	B74831010	P.O.R.
STP301 / STP301C	ISO100-K	KF25		PUMP, TURBO, CHEMICAL, STP301C MAGLEV, 300 L/S (N2), ISO100	B74871010	P.O.R.
STP301 / STP301C	DN100CF (6.00" OD)	KF25		PUMP, TURBO, CHEMICAL, STP301C MAGLEV, 300 L/S (N2), 6"UHV	B74881010	P.O.R.
STPA1603C	ISO200-F	KF40		—	B75100010	P.O.R.
STPA1603C	DN200CF (10.00" OD)	KF40		—	B75100100	P.O.R.
STP-L301 / STP-L301C	ISO100-K	KF25		—	B75800010	P.O.R.
STP-L301 / STP-L301C	ISO100-K	KF25		—	B75800090	P.O.R.
STPH301C	DN100CF (6.00" OD)	KF40		—	PT340Z004	P.O.R.
STPH451C	DN160CF (8.00" OD)	KF40		—	PT340Z005	P.O.R.
STPH301C	ISO100-F	KF40		—	PT3416001	P.O.R.
STPH301C	DN100CF (6.00" OD)	KF40		—	PT3416005	P.O.R.
STPH451C	DN160CF (8.00" OD)	KF40		—	PT3416006	P.O.R.
STPH451C	ISO160-F	KF40		—	PT3416007	P.O.R.
STPA803C	ISO160-F	KF40		—	PT3626000	P.O.R.
STPA803C	DN160CF (8.00" OD)	KF40		—	PT3626003	P.O.R.
STPA1303C	DN200CF (10.00" OD)	KF40		—	PT3626004	P.O.R.
STPA1303C	ISO200-F	KF40		—	PT3626005	P.O.R.
STP1003 / STP1003C	ISO200-F	KF40		—	PT390Z001	P.O.R.
STP603 / STP603C	DN160CF (8.00" OD)	KF40		—	PT390Z005	P.O.R.
STP603 / STP603C	DN160CF (8.00" OD)	KF40		—	PT39AZ002	P.O.R.
STP1003 / STP1003C	DN200CF (10.00" OD)	KF40	—	PUMP, TURBO, CHEMICAL, MAGLEV, STP1003C, 1000 L/S, 10"UHV	PT39AZ003	P.O.R.			—
STPA1603C	ISO200-F	KF40		—	PT4616004	P.O.R.
STPA1603C	DN200CF (10.00" OD)	KF40		—	PT4616005	P.O.R.
STP-L301 / STP-L301C	DN100CF (6.00" OD)	KF25		—	PT470Z000	P.O.R.
STP-L301 / STP-L301C	DN100CF (6.00" OD)	KF25		—	PT47AZ030	P.O.R.
STPA2203C	ISO250-F	KF40		—	PT4V66001	P.O.R.
STPA2203C	DN250CF (12.00" OD)	KF40		—	PT4V66002	P.O.R.
STP-iX455	DN100CF (6.00" OD)	KF40		—	PT640Z050	P.O.R.
STP-iX455	DN160CF (8.00" OD)	KF40		—	PT640Z060	P.O.R.
STP-XZ3203C	DN250CF (12.00" OD)	KF40		—	PT660Z080	P.O.R.
STP-XA2703C	ISO250-F	KF40		—	PT660Z140	P.O.R.
STP-XA2703C	DN250CF (12.00" OD)	KF40		—	PT6610010	P.O.R.
STPA2203C	ISO250-F	KF40		PUMP, TURBO, CHEM, MAGLEV, STPA2203C, 2200 L/S(N2), ISO250F INLET, KF40 OUTLET, KF10 PURGE PORT	YT4V0Z002	P.O.R.
STP-XZ3203C	ISO250-F	KF40		PUMP, TURBO, CHEMICAL, MAGLEV, STP3203C, 3200 L/S(N2),ISO320	YT660Z050	P.O.R.

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Accessories Table

Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	STP-iX455, STP603 / STP603C, STPA803C, STPH451C	CF Hardware Kit	DN160CF-HDKIT	P.O.R.
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	STP1003 / STP1003C, STPA1303C, STPA1603C	CF Hardware Kit	DN200CF-HDKIT	P.O.R.
Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	STP-XA2703C, STP-XZ3203C, STPA2203C	CF Hardware Kit	DN250CF-HDKIT	P.O.R.
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	STP-iX455, STP-L301 / STP-L301C, STP301 / STP301C, STPH301C	CF Hardware Kit	DN100CF-HDKIT	P.O.R.
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	STP603 / STP603C, STPA803C, STPH451C	ISO-F Hardware Kit	QF160F-HDKIT	P.O.R.
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	STP1003 / STP1003C, STPA1303C, STPA1603C	ISO-F Hardware Kit	QF200F-HDKIT	P.O.R.
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	STP-XA2703C, STP-XZ3203C, STPA2203C	ISO-F Hardware Kit	QF250F-HDKIT	P.O.R.
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	STP-L301 / STP-L301C, STP301 / STP301C	ISO-K Hardware Kit	QF100K-HDKIT	P.O.R.
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	STP-L301 / STP-L301C, STP301 / STP301C	KF Hardware Kit	QF25-HDKIT	P.O.R.
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	STP-iX455, STP-XA2703C, STP-XZ3203C, STP1003 / STP1003C, STP603 / STP603C, STPA1303C, STPA1603C, STPA2203C, STPA803C, STPH301C, STPH451C	KF Hardware Kit	QF40-HDKIT	P.O.R.
Edwards SCU-1600 Control Unit for STP-A2203/2503/2803/3003/3503, STP-F2203, STP-XA2703/3203/4503, and STP-XH2603/3203	STP-A2203/2503/2803/3003/3503 STP-F2203, STP-XA2703/3203, STP-XH2603/3203	Pump Controller	YT76Z0Z00	P.O.R.
Edwards SCU-350 Control Unit for STP301/451 and STPL301/L451 Series	STP301/451, STPL301/451	Pump Controller	YT21Z0Z01	P.O.R.
Edwards SCU-800 Control Unit for STP603/1003, STPH301/H451, STPH803/H1303, STPA803C/A1303, and STPA1603 Series	STP603/1003 Series STPH301/H451 Series STPH803/H1303 Series STPA803C/A1303 Series STPA1603 Series	Pump Controller	YT49Z2Z00	P.O.R.
Edwards STP Straight Connection Cable, 5m Length	STP-A2203/2503/2803/3003/3503 STP-F2203, STP-XA2703/3203, STP-XH2603/3203	Interconnect Cable	B75030010	P.O.R.
Edwards STP Straight Connection Cable, 5m Length	STP603/1003 Series STPH301/H451 Series STPH803/H1303 Series STPA803C/A1303 Series STPA1603 Series	Interconnect Cable	B75130020	P.O.R.
Edwards Straight STP Connection Cable, 3m Length	STP301/451, STPL301/451	Interconnect Cable	B70700010	P.O.R.
Edwards Type B P/Cab Power Cable with Ring Terminals, 3m Length	STP301/451, STPL301/451	Mains Cable	B70700090	P.O.R.
KJLC 392 Package with DN35CF-DN40CF Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	STP603/1003 Series STPH301/H451 Series STPH803/H1303 Series STPA803C/A1303 Series STPA1603 Series	Gauge Package	KJLC392-CF-US	P.O.R.
KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	STP603/1003 Series STPH301/H451 Series STPH803/H1303 Series STPA803C/A1303 Series STPA1603 Series	Gauge Package	KJLC392-KF-US	P.O.R.

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