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Edwards STP Series

Overview:

Qualified by all major semiconductors OEMs
Used in all major semiconductors fabrication plants
Installed base of more than 80000 units, 85% in the semiconductor industry

Heating/Cooling:

The MT model features a temperature management system that controls an integrated heater band. The heater band and water cooling maintain the pump internal surface at a constant temperature (up to 75°C) in order to minimize the condensation of by-products inside the pump.

Features:

Optimized for semiconductor process pressure
Complete range from 300 to 4500ls^-1
Application specific models
Installation in any orientation
Supported globally by Edwards

STP Range:

High throughput series
Holweck stage to provide advanced throughput performance
Highest levels of throughput required by the next generation of semiconductor etch and CVD processes

Corrosion Resistant:

To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nicke-coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.

Nitrogen Purging:

The corrosion-resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases, minimizing their damage to the pump's motor and sensor coils.

TMS System:

The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particular condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but will also increase its operational life.

Description:

iX : Integrated controller
C : Corrosive, semi-conductor rated
STPH : High throughput
STPA : Advanced high throughput
STP-X : High throughput and high flow for lighter gases
STP-L : Low vibration, for electron microscope and semicon

Specifications Table

Pump Model	STP-L301 / STP-L301C	STP301 / STP301C	STP603 / STP603C	STPA803C	STPH301C	STPH451C
Pumping Speeds	N2: 260 L/s H2: 290 L/s	N2: 300 L/s H2: 300 L/s	N2: 650 L/s H2: 550 L/s	N2: 800 L/s H2: 520 L/s	N2: 300 L/s H2: 200 L/s	N2: 450 L/s H2: 300 L/s
Ultimate Pressure	ISO-K Flange 1.33 x 10^-8 mbar 1.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-10 mbar 1.00 x 10^-10 Torr ISO-K Flange 1.33 x 10^-8 mbar 1.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-10 mbar 1.00 x 10^-10 Torr ISO-F Flange 6.65 x 10^-8 mbar 5.00 x 10^-8 Torr	ConFlat Flange 1.00 x 10^-9 mbar 7.50 x 10^-10 Torr ISO-F Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-9 mbar 7.50 x 10^-10 Torr ISO-F Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr ISO-F Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr
Max Foreline Pressure	1.33 x 10^-1 mbar 1.00 x 10^-1 Torr	1.33 x 10^-1 mbar 1.00 x 10^-1 Torr	1.33 x 10^-1 mbar 1.00 x 10^-1 Torr	2.67 x 10^-1 mbar 2.00 x 10^-1 Torr	6.67 x 10^-1 mbar 5.00 x 10^-1 Torr	6.67 x 10^-1 mbar 5.00 x 10^-1 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	KF25	KF25	KF40	KF40	KF40	KF40
Inlet Flange	ISO100-K DN100CF (6.00" OD)	ISO100-K DN100CF (6.00" OD)	DN160CF (8.00" OD) ISO160-F	ISO160-F DN160CF (8.00" OD)	ISO100-F DN100CF (6.00" OD)	ISO160-F DN160CF (8.00" OD)
Weight Lbs (kg)	30.8 ( 14.0 )	28.6 - 30.9 ( 13.0 - 14.0 )	68.2 ( 31.0 )	85.8 ( 39.0 )	28.6 - 33.0 ( 13.0 - 15.0 )	30.9 - 33.0 ( 14.0 - 15.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Specifications Table

Pump Model	STP-XA2703C	STP-XZ3203C	STP1003 / STP1003C	STPA1303C	STPA1603C	STPA2203C
Pumping Speeds	N2: 2650 L/s H2: 2050 L/s	N2: 3200 L/s H2: 2300 L/s	N2: 1000 L/s H2: 800 L/s	N2: 1300 L/s H2: 800 L/s	N2: 1600 L/s H2: 1200 L/s	N2: 1700 L/s H2: 2200 L/s
Ultimate Pressure	ConFlat Flange 1.33 x 10^-10 mbar 1.00 x 10^-10 Torr ISO-F Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-10 mbar 1.00 x 10^-10 Torr ISO-F Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-10 mbar 1.00 x 10^-10 Torr ISO-F Flange 6.65 x 10^-8 mbar 5.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr ISO-F Flange 6.65 x 10^-8 mbar 5.00 x 10^-8 Torr ISO-K Flange 6.65 x 10^-8 mbar 5.00 x 10^-8 Torr	ConFlat Flange 1.33 x 10^-10 mbar 1.00 x 10^-10 Torr ISO-F Flange 1.33 x 10^-9 mbar 1.00 x 10^-9 Torr	ConFlat Flange 1.33 x 10^-8 mbar 1.00 x 10^-8 Torr ISO-F Flange 1.33 x 10^-8 mbar 1.00 x 10^-8 Torr
Max Foreline Pressure	2.67 x 10^-1 mbar 2.00 x 10^-1 Torr	2.67 x 10^-1 mbar 2.00 x 10^-1 Torr	1.33 x 10^-1 mbar 1.00 x 10^-1 Torr	2.67 x 10^-1 mbar 2.00 x 10^-1 Torr	2.67 x 10^-1 mbar 2.00 x 10^-1 Torr	4.00 x 10^-1 mbar 3.00 x 10^-1 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	KF40	KF40	KF40	KF40	KF40	KF40
Inlet Flange	ISO250-F DN250CF (12.00" OD)	ISO250-F DN250CF (12.00" OD)	DN200CF (10.00" OD) ISO200-F	ISO200-F DN200CF (10.00" OD)	ISO200-F DN200CF (10.00" OD)	ISO250-F DN250CF (12.00" OD)
Weight Lbs (kg)			68.2 ( 31.0 )	85.8 ( 39.0 )	77.0 ( 35.0 )	134 ( 61.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart
Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart
STPA1303C	ISO200-F	KF40		—	B71802020	P.O.R.
STPH451C	ISO160-F	KF40		—	B71901001	P.O.R.
STPH301C	ISO100-F	KF40		—	B71901010	P.O.R.
STP301 / STP301C	ISO100-K	KF25		—	B74830020	P.O.R.
STP301 / STP301C	DN100CF (6.00" OD)	KF25		Edwards Vacuum STP301 / STP301C Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 300 L/s, Forced Air Cooling	B74831010	P.O.R.
STP301 / STP301C	ISO100-K	KF25		Edwards Vacuum STP301 / STP301C Turbo Pump, MagLev, ISO100-K inlet flange, 300 L/s, Forced Air Cooling	B74871010	P.O.R.
STPA1603C	ISO200-F	KF40		—	B75100010	P.O.R.
STPA1603C	DN200CF (10.00" OD)	KF40		—	B75100100	P.O.R.
STP-L301 / STP-L301C	ISO100-K	KF25		—	B75800010	P.O.R.
STP-L301 / STP-L301C	ISO100-K	KF25		—	B75800090	P.O.R.
STPH451C	DN160CF (8.00" OD)	KF40		—	PT340Z005	P.O.R.
STP1003 / STP1003C	DN200CF (10.00" OD)	KF40	—	Edwards Vacuum STP1003 / STP1003C Turbo Pump, MagLev, DN200CF (10.00" OD) inlet flange, 1000 L/s, Forced Air Cooling	PT39AZ003	P.O.R.
STP-L301 / STP-L301C	DN100CF (6.00" OD)	KF25		—	PT470Z000	P.O.R.
STP-L301 / STP-L301C	DN100CF (6.00" OD)	KF25		—	PT47AZ030	P.O.R.
STP-XA2703C	ISO250-F	KF40		—	PT660Z140	P.O.R.
STP301 / STP301C	DN100CF (6.00" OD)	KF25		Edwards Vacuum STP301 / STP301C Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 300 L/s, Forced Air Cooling	YT21B0630	$16,441.00
STPH301C	DN100CF (6.00" OD)	KF40		—	YT340Z004	P.O.R.
STPH301C	ISO100-F	KF40		—	YT3416001	P.O.R.
STPH301C	DN100CF (6.00" OD)	KF40		—	YT3416005	P.O.R.
STPH451C	DN160CF (8.00" OD)	KF40		—	YT3416006	P.O.R.
STPH451C	ISO160-F	KF40		—	YT3416007	P.O.R.
STPA803C	ISO160-F	KF40		—	YT3626000	P.O.R.
STPA803C	DN160CF (8.00" OD)	KF40		—	YT3626003	P.O.R.
STPA1303C	DN200CF (10.00" OD)	KF40		—	YT3626004	P.O.R.
STPA1303C	ISO200-F	KF40		—	YT3626005	P.O.R.
STPA803C	DN160CF (8.00" OD)	KF40		—	YT36B0010	P.O.R.
STPA803C	ISO160-F	KF40		—	YT36B0040	P.O.R.
STP1003 / STP1003C	ISO200-F	KF40		—	YT390Z001	P.O.R.
STP603 / STP603C	DN160CF (8.00" OD)	KF40		—	YT39AZ002	P.O.R.
STP1003 / STP1003C	DN200CF (10.00" OD)	KF40		Edwards Vacuum STP1003 / STP1003C Turbo Pump, MagLev, DN200CF (10.00" OD) inlet flange, 1000 L/s, Forced Air Cooling	YT39B0010	P.O.R.
STP603 / STP603C	ISO160-F	KF40		—	YT39B0030	P.O.R.
STP603 / STP603C	ISO160-F	KF40		—	YT39B0110	P.O.R.
STPA1603C	ISO200-F	KF40		—	YT4616004	P.O.R.
STPA1603C	DN200CF (10.00" OD)	KF40		—	YT4616005	P.O.R.
STPA2203C	ISO250-F	KF40		Edwards Vacuum STPA2203C Turbo Pump, MagLev, ISO250-F inlet flange, 1700 L/s, Forced Air Cooling	YT4V0Z002	P.O.R.
STPA2203C	ISO250-F	KF40		—	YT4V66001	P.O.R.
STPA2203C	DN250CF (12.00" OD)	KF40		—	YT4V66002	P.O.R.
STP-XZ3203C	ISO250-F	KF40		Edwards Vacuum STP-XZ3203C Turbo Pump, MagLev, ISO250-F inlet flange, 3200 L/s, Forced Air Cooling	YT660Z050	P.O.R.
STP-XZ3203C	DN250CF (12.00" OD)	KF40		—	YT660Z080	P.O.R.
STP-XA2703C	DN250CF (12.00" OD)	KF40		—	YT6610010	P.O.R.

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