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Shimadzu Mag-Lev—LM/LMC Series

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

  • Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump
  • High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps
  • Low pump profile designs for easy mounting
  • High compression ratios for all gases
  • Interactive rotor balancing ensures maximum uptime
  • Self-tuning cables and frequency converters for ease of use
  • Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)
  • Chemical series available for corrosive applications (LMC models)

Applications:

  • Mass spectrometry
  • SIMS
  • Electron microscopy
  • Surface science and analysis
  • Special ultra-clean leak detection
  • Particle accelerators
  • Space simulation experiments
  • Oxygen plasma etching processes
  • Implant tools for semiconductor processes

Charts

 
Shimadzu 203LM Shimadzu 303LM Shimadzu 403LM Shimadzu 803LM Shimadzu 1003LM Shimadzu 2003LM Shimadzu 3203LM

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Specifications Table

Pump Model 203LM/LMC 303LM/LMC 403LM/LMC 803LM/LMC 1003LM/LMC 3203LM/LMC
Pumping Speeds
N2: 190 L/s
He: 140 L/s
H2: 120 L/s
N2: 320 L/s
He: 340 L/s
H2: 320 L/s
N2: 420 L/s
He: 360 L/s
H2: 340 L/s
N2: 800 L/s
He: 800 L/s
H2: 700 L/s
N2: 1080 L/s
He: 930 L/s
H2: 790 L/s
N2: 3200 L/s
He: 3000 L/s
H2: 2400 L/s
Ultimate Pressure
ConFlat Flange
1.33 x 10-10 hPA
1.33 x 10-10 mbar
1.33 x 10-8 Pa
1.00 x 10-10 Torr
ConFlat Flange
1.33 x 10-10 hPA
1.33 x 10-10 mbar
1.33 x 10-8 Pa
1.00 x 10-10 Torr
ConFlat Flange
1.33 x 10-10 hPA
1.33 x 10-10 mbar
1.33 x 10-8 Pa
1.00 x 10-10 Torr
ConFlat Flange
1.33 x 10-11 hPA
1.33 x 10-11 mbar
1.33 x 10-9 Pa
1.00 x 10-11 Torr
ConFlat Flange
1.33 x 10-11 hPA
1.33 x 10-11 mbar
1.33 x 10-9 Pa
1.00 x 10-11 Torr
ConFlat Flange
1.33 x 10-9 hPA
1.33 x 10-9 mbar
1.33 x 10-7 Pa
1.00 x 10-9 Torr
Max Foreline Pressure 5.30 x 100 hPA
5.30 x 100 mbar
5.33 x 102 Pa
4.00 x 100 Torr
5.30 x 100 hPA
5.30 x 100 mbar
5.33 x 102 Pa
4.00 x 100 Torr
5.30 x 100 hPA
5.30 x 100 mbar
5.33 x 102 Pa
4.00 x 100 Torr
4.00 x 100 hPA
4.00 x 100 mbar
4.00 x 102 Pa
3.00 x 100 Torr
6.60 x 100 hPA
6.60 x 100 mbar
6.67 x 102 Pa
5.00 x 100 Torr
2.60 x 100 hPA
2.60 x 100 mbar
2.67 x 102 Pa
2.00 x 100 Torr
Cooling Method(s) Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Foreline Flange KF25
KF25
KF25
KF40
KF40
KF40
Inlet Flange DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
DN160CF (8.00" OD)
ISO160-K
DN160CF (8.00" OD)
ISO160-K
DN200CF (10.00" OD)
ISO200-F
ISO320-F
Compression Ratio(s) N2: 1.00 x 109
He: 6.00 x 104
H2: 4.00 x 103
N2: 1.00 x 109
He: 8.00 x 104
H2: 1.00 x 104
N2: 1.00 x 109
He: 8.00 x 104
H2: 1.00 x 104
N2: 1.00 x 109
He: 8.00 x 104
H2: 4.00 x 103
N2: 1.00 x 109
He: 8.00 x 104
H2: 4.00 x 103
N2: 1.00 x 109
He: 3.00 x 105
H2: 1.00 x 104
Weight Lbs (kg) 19.8 ( 9.00 ) 30.8 ( 14.0 ) 30.8 ( 14.0 ) 72.8 ( 33.0 ) 70.4 ( 32.0 ) 154 ( 70.0 )
Lubrication Type Dry
Dry
Dry
Dry
Dry
Dry
Technology Type Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
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Ordering Table

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Pump Model Inlet Flange Foreline Flange Manual Description Part Number Price In Stock Add To Cart Accessories
Pump Model Inlet Flange Foreline Flange Manual Description Part Number Price In Stock Add To Cart Accessories
803LM/LMC DN160CF (8.00" OD) KF40 Download PDF TURBO PUMP,MODLE 803LM,800L/S, WATER COOLED,8"UHV,NEW STYLE SM1828241 $17,166.00 Contact KJLC for Availability
803LM/LMC ISO160-K KF40 Download PDF TURBO PUMP,MODEL 803LM,800L/S, WATER COOLED,ISO160B (BOLT STYLE),NEW STYLE SM1828245 $17,166.00 Contact KJLC for Availability
803LM/LMC DN160CF (8.00" OD) KF40 Download PDF TURBO PUMP,MODEL 803LMC,800L/S WATER COOLER,CORROSIVE,8"UHV, NEW STYLE SM1828251 P.O.R. Contact KJLC for Availability
803LM/LMC ISO160-K KF40 Download PDF TURBO PUMP,MODEL803LMC,800L/S WATER COOLED,CORROSIVE,ISO160F NEW STYLE SM1828255 P.O.R. Contact KJLC for Availability
3203LM/LMC ISO320-F KF40 Download PDF TURBO PUMP,MODEL 3203LM, 3000L/S,WATER COOL,ISO 320-F, NEW STYLE SM7843043 P.O.R. Contact KJLC for Availability
3203LM/LMC ISO320-F KF40 Download PDF TURBO PUMP,MODEL 3203LMC, 3000L/S,WATER COOL,ISO 320-F SM7843053 $36,500.00 Contact KJLC for Availability
1003LM/LMC DN200CF (10.00" OD) KF40 Download PDF TURBO PUMP,MODEL1003LM,1000L/S WATER COOLED 10"UHV,NEW STYLE SM8141041 $18,166.00 Contact KJLC for Availability
1003LM/LMC ISO200-F KF40 Download PDF TURBO PUMP,MODL1003LM,1000L/S, WATER COOLED,ISO200F,NEW STYLE SM8141045 $18,165.00 Contact KJLC for Availability
1003LM/LMC DN200CF (10.00" OD) KF40 Download PDF TURBO PUMP,MODEL1003LMC, 1000L/S.WATER COOLED,CORROSIVE 10"UHV, NEW STYLE SM8141051 $20,833.00 Contact KJLC for Availability
1003LM/LMC ISO200-F KF40 Download PDF TURBO PUMP,MODL1003LMC,1000L/S WATER COOLED CORROSIVE,ISO200F NEW STYLE SM8141055 P.O.R. Contact KJLC for Availability
303LM/LMC DN100CF (6.00" OD) KF25 Download PDF TURBO PUMP,MODEL 303LM,300L/S, WATER COOLED,6'UHV,NEW STYLE SM8143541 $14,500.00 Contact KJLC for Availability
303LM/LMC ISO100-K KF25 Download PDF TURBO PUMP,MODEL 303LM,300L/S, WATER COOLED,ISO100K NEW STYLE SM8143543 $14,500.00 Contact KJLC for Availability
303LM/LMC DN100CF (6.00" OD) KF25 Download PDF TURBO PUMP,MODEL303LMC,300L/S WATER COOLED,CORROSIVE,6"UHV, NEW STYLE SM8143551 P.O.R. Contact KJLC for Availability
303LM/LMC ISO100-K KF25 Download PDF TURBO PUMP,MODEL303LMC,300L/S WATER COOLED,CORROSIVE,ISO100K NEW STYLE SM8143553 P.O.R. Contact KJLC for Availability
203LM/LMC DN100CF (6.00" OD) KF25 Download PDF TURBO PUMP,MODEL203LM,200L/S, WATER COOLED,6"OD UHV NEW STYL SM8144541 $12,333.00 Contact KJLC for Availability
203LM/LMC ISO100-K KF25 Download PDF TURBO PUMP,MODEL 203LM,200L/S, WATER COOLED,ISO100K,NEW STYLE SM8144543 P.O.R. Contact KJLC for Availability
203LM/LMC DN100CF (6.00" OD) KF25 Download PDF TURBO PUMP,MODEL203LMC,200L/S WATER COOLED,CORROSIVE,6"UHV, NEW STYLE SM8144551 $15,166.00 Contact KJLC for Availability
203LM/LMC ISO100-K KF25 Download PDF TURBO PUMP,MODEL203LMC,200L/S, WATER COOLED,CORROSIVE,ISO100K NEW STYLE SM8144553 P.O.R. Contact KJLC for Availability
403LM/LMC DN160CF (8.00" OD) KF25 Download PDF TURBO PUMP,MODEL403LM,400L/S WATER COOLED,8"UHV,NEW STYLE SM8145541 $15,500.00 Contact KJLC for Availability
403LM/LMC ISO160-K KF25 Download PDF TURBO PUMP,MODEL403LM,400L/S WATER COOLED CORROSIVE,ISO160K NEW STYLE SM8145543 $15,500.00 Contact KJLC for Availability
403LM/LMC DN160CF (8.00" OD) KF25 Download PDF TURBO PUMP,MODEL403LMC,400L/S WATER COOLED,CORROSIVE,8"UHV NEW STYLE SM8145551 $18,166.00 Contact KJLC for Availability
403LM/LMC ISO160-K KF25 Download PDF TURBO PUMP,MODEL403LMC,400L/S WATER COOLED,CORROSIVE,ISO160K NEW STYLE SM8145553 P.O.R. Contact KJLC for Availability
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Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart
For Pump Model(s) Description Part Number Price In Stock Add To Cart
LM/LMC 203 Baking Heater (115V/100W)
SM0014101
P.O.R.
Contact KJLC for Availability
LM/LMC 303-403 Baking Heater (115V/100W)
SM0014111
P.O.R.
Contact KJLC for Availability
LM/LMC 803-1003 Baking Heater (208V/200W)
SM7456918
P.O.R.
Contact KJLC for Availability
LM/LMC 2003-3203 Baking Heater (208V/600W)
SM7456915
P.O.R.
Contact KJLC for Availability
403LM/LMC, 803LM/LMC Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
Contact KJLC for Availability
1003LM/LMC Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
Contact KJLC for Availability
203LM/LMC, 303LM/LMC Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
Contact KJLC for Availability
1003LM/LMC Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
Contact KJLC for Availability
3203LM/LMC Bolting Kit, For QF320 (ISO320-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF320F-HDKIT
P.O.R.
Contact KJLC for Availability
203LM/LMC, 303LM/LMC Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF100K-HDKIT
P.O.R.
Contact KJLC for Availability
403LM/LMC, 803LM/LMC Clamping Kit, For QF160 (ISO160-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF160K-HDKIT
P.O.R.
Contact KJLC for Availability
203LM/LMC, 303LM/LMC, 403LM/LMC Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
1003LM/LMC, 3203LM/LMC, 803LM/LMC Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
All LM/LMC Series Pumps Interconnect Cable for
Power Supply to Pump (10 m)
SM1620010
P.O.R.
Contact KJLC for Availability
All LM/LMC Series Pumps Interconnect Cable for
Power Supply to Pump (15 m)
SM1620015
P.O.R.
Contact KJLC for Availability
All LM/LMC
803-3203 Series Pumps
Interconnect Cable for
Power Supply to Pump (20m)
SM1620020
P.O.R.
Contact KJLC for Availability
All LM/LMC Series Pumps Interconnect Cable for
Power Supply to Pump (3 m)
SM1620003
$1,083.00
Contact KJLC for Availability
All LM/LMC Series Pumps Interconnect Cable for
Power Supply to Pump (5 m)
SM1620005
$1,350.00
Contact KJLC for Availability
LM/LMC 803-3203 Motor Power Cable (10 m)
SM7640910
P.O.R.
Contact KJLC for Availability
LM/LMC 803-3203 Motor Power Cable (15 m)
SM7640915
P.O.R.
Contact KJLC for Availability
LM/LMC 803-3203 Motor Power Cable (20 m)
SM7640920
P.O.R.
Contact KJLC for Availability
LM/LMC 803-3203 Motor Power Cable (3 m)
SM7640903
$250.00
Contact KJLC for Availability
LM/LMC 803-3203 Motor Power Cable (5 m)
SM7640905
$300.00
Contact KJLC for Availability
TMP 803, 1003, 2003, 3203 Power Supply and Controller, EI-R04M
(200-240 VAC, 1-Øm 50/60 Hz)
SM7898202
$5,583.00
Contact KJLC for Availability
TMP 203, 303, 403 Power Supply and Controller, EI-S04M
(110-120 VAC, 1-Øm 50/60 Hz)
SM1804401
$5,583.00
Contact KJLC for Availability
TMP 203, 303, 403 Power Supply and Controller, EI-S04M
(200-240 VAC, 1-Øm 50/60 Hz)
SM1804402
P.O.R.
Contact KJLC for Availability
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