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Shimadzu Mag-Lev—LM/LMC Series

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

  • Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump
  • High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps
  • Low pump profile designs for easy mounting
  • High compression ratios for all gases
  • Interactive rotor balancing ensures maximum uptime
  • Self-tuning cables and frequency converters for ease of use
  • Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)
  • Chemical series available for corrosive applications (LMC models)

Applications:

  • Mass spectrometry
  • SIMS
  • Electron microscopy
  • Surface science and analysis
  • Special ultra-clean leak detection
  • Particle accelerators
  • Space simulation experiments
  • Oxygen plasma etching processes
  • Implant tools for semiconductor processes

Charts

 
Shimadzu 203LM Shimadzu 303LM Shimadzu 403LM Shimadzu 803LM Shimadzu 1003LM Shimadzu 2003LM Shimadzu 3203LM

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Specifications Table

Pump Model 203LM/LMC 303LM/LMC 403LM/LMC 803LM/LMC 1003LM/LMC 3203LM/LMC
Pumping Speeds
N2: 190 L/s
He: 140 L/s
H2: 120 L/s
N2: 320 L/s
He: 340 L/s
H2: 320 L/s
N2: 420 L/s
He: 360 L/s
H2: 340 L/s
N2: 800 L/s
He: 800 L/s
H2: 700 L/s
N2: 1080 L/s
He: 930 L/s
H2: 790 L/s
N2: 3200 L/s
He: 3000 L/s
H2: 2400 L/s
Ultimate Pressure
ConFlat Flange
1.33 x 10-10 mbar
1.00 x 10-10 Torr
ISO-K Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
ConFlat Flange
1.33 x 10-10 mbar
1.00 x 10-10 Torr
ISO-K Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
ConFlat Flange
1.33 x 10-10 mbar
1.00 x 10-10 Torr
ISO-K Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
ConFlat Flange
1.33 x 10-11 mbar
1.00 x 10-11 Torr
ISO-K Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
ConFlat Flange
1.33 x 10-11 mbar
1.00 x 10-11 Torr
ISO-F Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
ISO-F Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
Max Foreline Pressure 5.30 x 10-1 mbar
4.00 x 10-1 Torr
5.30 x 10-1 mbar
4.00 x 10-1 Torr
5.30 x 10-1 mbar
4.00 x 10-1 Torr
4.00 x 10-1 mbar
3.00 x 10-1 Torr
6.60 x 10-1 mbar
5.00 x 10-1 Torr
2.60 x 10-1 mbar
2.00 x 10-1 Torr
Cooling Method(s) Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Foreline Flange KF25
KF25
KF25
KF40
KF40
KF40
Inlet Flange DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
DN160CF (8.00" OD)
ISO160-K
DN160CF (8.00" OD)
ISO160-K
DN200CF (10.00" OD)
ISO200-F
ISO320-F
Weight Lbs (kg) 19.8 ( 9.00 ) 30.8 ( 14.0 ) 30.8 ( 14.0 ) 72.8 ( 33.0 ) 70.4 ( 32.0 ) 154 ( 70.0 )
Lubrication Type Dry
Dry
Dry
Dry
Dry
Dry
Technology Type Turbo - Magnetically Levitated
Turbo - Magnetically Levitated
Turbo - Magnetically Levitated
Turbo - Magnetically Levitated
Turbo - Magnetically Levitated
Turbo - Magnetically Levitated
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Ordering Table

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Pump Model Inlet Flange Foreline Flange Manual Description Part Number Price In Stock Add To Cart
Pump Model Inlet Flange Foreline Flange Manual Description Part Number Price In Stock Add To Cart
803LM/LMC DN160CF (8.00" OD) KF40 Download PDF Shimadzu 803LM/LMC Turbo Pump, MagLev, DN160CF (8.00" OD) inlet flange, 800 L/s, Forced Air Cooling SM1828241View SM1828241 Specific Information P.O.R. Contact KJLC for Availability
803LM/LMC ISO160-K KF40 Download PDF Shimadzu 803LM/LMC Turbo Pump, MagLev, ISO160-K inlet flange, 800 L/s, Forced Air Cooling SM1828245View SM1828245 Specific Information P.O.R. Contact KJLC for Availability
803LM/LMC DN160CF (8.00" OD) KF40 Download PDF Shimadzu 803LM/LMC Turbo Pump, MagLev, DN160CF (8.00" OD) inlet flange, 800 L/s, Forced Air Cooling SM1828251View SM1828251 Specific Information P.O.R. Contact KJLC for Availability
803LM/LMC ISO160-K KF40 Download PDF Shimadzu 803LM/LMC Turbo Pump, MagLev, ISO160-K inlet flange, 800 L/s, Forced Air Cooling SM1828255View SM1828255 Specific Information P.O.R. Contact KJLC for Availability
3203LM/LMC ISO320-F KF40 Download PDF Shimadzu 3203LM/LMC Turbo Pump, MagLev, ISO320-F inlet flange, 3200 L/s, Forced Air Cooling SM7843043View SM7843043 Specific Information P.O.R. Contact KJLC for Availability
3203LM/LMC ISO320-F KF40 Download PDF Shimadzu 3203LM/LMC Turbo Pump, MagLev, ISO320-F inlet flange, 3200 L/s, Forced Air Cooling SM7843053View SM7843053 Specific Information P.O.R. Contact KJLC for Availability
1003LM/LMC DN200CF (10.00" OD) KF40 Download PDF Shimadzu 1003LM/LMC Turbo Pump, MagLev, DN200CF (10.00" OD) inlet flange, 1080 L/s, Forced Air Cooling SM8141041View SM8141041 Specific Information P.O.R. Contact KJLC for Availability
1003LM/LMC ISO200-F KF40 Download PDF Shimadzu 1003LM/LMC Turbo Pump, MagLev, ISO200-F inlet flange, 1080 L/s, Forced Air Cooling SM8141045View SM8141045 Specific Information P.O.R. Contact KJLC for Availability
1003LM/LMC DN200CF (10.00" OD) KF40 Download PDF Shimadzu 1003LM/LMC Turbo Pump, MagLev, DN200CF (10.00" OD) inlet flange, 1080 L/s, Forced Air Cooling SM8141051View SM8141051 Specific Information P.O.R. Contact KJLC for Availability
1003LM/LMC ISO200-F KF40 Download PDF Shimadzu 1003LM/LMC Turbo Pump, MagLev, ISO200-F inlet flange, 1080 L/s, Forced Air Cooling SM8141055View SM8141055 Specific Information P.O.R. Contact KJLC for Availability
303LM/LMC DN100CF (6.00" OD) KF25 Download PDF Shimadzu 303LM/LMC Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 320 L/s, Forced Air Cooling SM8143541View SM8143541 Specific Information P.O.R. Contact KJLC for Availability
303LM/LMC ISO100-K KF25 Download PDF Shimadzu 303LM/LMC Turbo Pump, MagLev, ISO100-K inlet flange, 320 L/s, Forced Air Cooling SM8143543View SM8143543 Specific Information P.O.R. Contact KJLC for Availability
303LM/LMC DN100CF (6.00" OD) KF25 Download PDF Shimadzu 303LM/LMC Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 320 L/s, Forced Air Cooling SM8143551View SM8143551 Specific Information P.O.R. Contact KJLC for Availability
303LM/LMC ISO100-K KF25 Download PDF Shimadzu 303LM/LMC Turbo Pump, MagLev, ISO100-K inlet flange, 320 L/s, Forced Air Cooling SM8143553View SM8143553 Specific Information P.O.R. Contact KJLC for Availability
203LM/LMC DN100CF (6.00" OD) KF25 Download PDF Shimadzu 203LM/LMC Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 190 L/s, Forced Air Cooling SM8144541View SM8144541 Specific Information P.O.R. Contact KJLC for Availability
203LM/LMC ISO100-K KF25 Download PDF Shimadzu 203LM/LMC Turbo Pump, MagLev, ISO100-K inlet flange, 190 L/s, Forced Air Cooling SM8144543View SM8144543 Specific Information P.O.R. Contact KJLC for Availability
203LM/LMC DN100CF (6.00" OD) KF25 Download PDF Shimadzu 203LM/LMC Turbo Pump, MagLev, DN100CF (6.00" OD) inlet flange, 190 L/s, Forced Air Cooling SM8144551View SM8144551 Specific Information P.O.R. Contact KJLC for Availability
203LM/LMC ISO100-K KF25 Download PDF Shimadzu 203LM/LMC Turbo Pump, MagLev, ISO100-K inlet flange, 190 L/s, Forced Air Cooling SM8144553View SM8144553 Specific Information P.O.R. Contact KJLC for Availability
403LM/LMC DN160CF (8.00" OD) KF25 Download PDF Shimadzu 403LM/LMC Turbo Pump, MagLev, DN160CF (8.00" OD) inlet flange, 420 L/s, Forced Air Cooling SM8145541View SM8145541 Specific Information P.O.R. Contact KJLC for Availability
403LM/LMC ISO160-K KF25 Download PDF Shimadzu 403LM/LMC Turbo Pump, MagLev, ISO160-K inlet flange, 420 L/s, Forced Air Cooling SM8145543View SM8145543 Specific Information P.O.R. Contact KJLC for Availability
403LM/LMC DN160CF (8.00" OD) KF25 Download PDF Shimadzu 403LM/LMC Turbo Pump, MagLev, DN160CF (8.00" OD) inlet flange, 420 L/s, Forced Air Cooling SM8145551View SM8145551 Specific Information P.O.R. Contact KJLC for Availability
403LM/LMC ISO160-K KF25 Download PDF Shimadzu 403LM/LMC Turbo Pump, MagLev, ISO160-K inlet flange, 420 L/s, Forced Air Cooling SM8145553View SM8145553 Specific Information P.O.R. Contact KJLC for Availability
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