Welcome to the Kurt J. Lesker Company.  

Sign In | Register

Current Region: International (Change) | Contact Us |   RSS   Twitter   LinkedIn   YouTube   Instagram

Close

Please select your country or region to be
directed to the appropriate Lesker site.

Representative Image

Shimadzu Mag-Lev—LM/LMC Series

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 1011 for N2; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

  • Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump
  • High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps
  • Low pump profile designs for easy mounting
  • High compression ratios for all gases
  • Interactive rotor balancing ensures maximum uptime
  • Self-tuning cables and frequency converters for ease of use
  • Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)
  • Chemical series available for corrosive applications (LMC models)

Applications:

  • Mass spectrometry
  • SIMS
  • Electron microscopy
  • Surface science and analysis
  • Special ultra-clean leak detection
  • Particle accelerators
  • Space simulation experiments
  • Oxygen plasma etching processes
  • Implant tools for semiconductor processes

Charts

Shimadzu 203LM
 
Shimadzu 203LM Shimadzu 303LM Shimadzu 403LM Shimadzu 803LM Shimadzu 1003LM Shimadzu 2003LM Shimadzu 3203LM

Product Downloads
For the full brochure on this product, please click here.
Vacuum Pump Repair
& Services
World class service center for scheduled maintenance, evaluation, and vacuum pump repair.
Request a Service Quote
Request a Pump RMA
Remanufactured Vacuum
Pumps
Click here to view a list of remanufactured vacuum pumps available from The KJLC's Remanufactured Vacuum Pump Division.
Pumps FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Specifications Table

Pump Model 403LM/LMC 803LM/LMC 203LM/LMC 1003LM/LMC 303LM/LMC 3203LM/LMC
Pumping Speeds
H2: 340 L/s
He: 360 L/s
N2: 420 L/s
H2: 700 L/s
He: 800 L/s
N2: 800 L/s
H2: 120 L/s
He: 140 L/s
N2: 190 L/s
H2: 790 L/s
He: 930 L/s
N2: 1080 L/s
H2: 320 L/s
He: 340 L/s
N2: 320 L/s
H2: 2400 L/s
He: 3000 L/s
N2: 3200 L/s
Ultimate Pressure
ConFlat Flange
1.33 x 10-10 hPA
1.33 x 10-10 mbar
1.33 x 10-8 Pa
1.00 x 10-10 Torr
ConFlat Flange
1.33 x 10-11 hPA
1.33 x 10-11 mbar
1.33 x 10-9 Pa
1.00 x 10-11 Torr
ConFlat Flange
1.33 x 10-10 hPA
1.33 x 10-10 mbar
1.33 x 10-8 Pa
1.00 x 10-10 Torr
ConFlat Flange
1.33 x 10-11 hPA
1.33 x 10-11 mbar
1.33 x 10-9 Pa
1.00 x 10-11 Torr
ConFlat Flange
1.33 x 10-10 hPA
1.33 x 10-10 mbar
1.33 x 10-8 Pa
1.00 x 10-10 Torr
ConFlat Flange
1.33 x 10-9 hPA
1.33 x 10-9 mbar
1.33 x 10-7 Pa
1.00 x 10-9 Torr
Max Foreline Pressure 5.30 x 100 hPA
5.30 x 100 mbar
5.33 x 102 Pa
4.00 x 100 Torr
4.00 x 100 hPA
4.00 x 100 mbar
4.00 x 102 Pa
3.00 x 100 Torr
5.30 x 100 hPA
5.30 x 100 mbar
5.33 x 102 Pa
4.00 x 100 Torr
6.60 x 100 hPA
6.60 x 100 mbar
6.67 x 102 Pa
5.00 x 100 Torr
5.30 x 100 hPA
5.30 x 100 mbar
5.33 x 102 Pa
4.00 x 100 Torr
2.60 x 100 hPA
2.60 x 100 mbar
2.67 x 102 Pa
2.00 x 100 Torr
Cooling Method(s) Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Method
Forced Air
Water
Foreline Flange KF25
KF40
KF25
KF40
KF25
KF40
Inlet Flange DN160CF (8.00" OD)
ISO160-K
DN160CF (8.00" OD)
ISO160-K
DN100CF (6.00" OD)
ISO100-K
DN200CF (10.00" OD)
ISO200-F
DN100CF (6.00" OD)
ISO100-K
ISO320-F
Compression Ratio(s) H2: 1.00 x 104
He: 8.00 x 104
N2: 1.00 x 109
H2: 4.00 x 103
He: 8.00 x 104
N2: 1.00 x 109
H2: 4.00 x 103
He: 6.00 x 104
N2: 1.00 x 109
H2: 4.00 x 103
He: 8.00 x 104
N2: 1.00 x 109
H2: 1.00 x 104
He: 8.00 x 104
N2: 1.00 x 109
H2: 1.00 x 104
He: 3.00 x 105
N2: 1.00 x 109
Weight Lbs (kg) 30.8 ( 14.0 ) 70.4 ( 32.0 ) 19.8 ( 9.00 ) 70.4 ( 32.0 ) 30.8 ( 14.0 ) 154 ( 70.0 )
Technology Dry
Dry
Dry
Dry
Dry
Dry


Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

(Click column headers to sort data)

Accessories Pump
Model
Inlet
Flange
Foreline
Flange
Manual Part
Number
Price Add To Cart
Accessories Pump
Model
Inlet
Flange
Foreline
Flange
Manual Part
Number
Price Add To Cart
TMP203LM
DN100CF (6.00" OD)
KF25
Download PDF
SM8144541
$12,333.00
TMP203LM
ISO100-K
KF25
Download PDF
SM8144543
P.O.R.
TMP203LMC
DN100CF (6.00" OD)
KF25
Download PDF
SM8144551
$15,166.00
TMP203LMC
ISO100-K
KF25
Download PDF
SM8144553
P.O.R.
TMP303LM
DN100CF (6.00" OD)
KF25
Download PDF
SM8143541
$14,500.00
TMP303LM
ISO100-K
KF25
Download PDF
SM8143543
$14,500.00
TMP303LMC
DN100CF (6.00" OD)
KF25
Download PDF
SM8143551
P.O.R.
TMP303LMC
ISO100-K
KF25
Download PDF
SM8143553
P.O.R.
TMP403LM
DN160CF (8.00" OD)
KF25
Download PDF
SM8145541
$15,500.00
TMP403LM
ISO160-K
KF25
Download PDF
SM8145543
$15,500.00
TMP403LMC
DN160CF (8.00" OD)
KF25
Download PDF
SM8145551
$18,166.00
TMP403LMC
ISO160-K
KF25
Download PDF
SM8145553
P.O.R.
TMP803LM
DN160CF (8.00" OD)
KF40
Download PDF
SM1828241
$17,166.00
TMP803LM
ISO160-K
KF40
Download PDF
SM1828245
$17,166.00
TMP803LMC
DN160CF (8.00" OD)
KF40
Download PDF
SM1828251
P.O.R.
TMP803LMC
ISO160-K
KF40
Download PDF
SM1828255
P.O.R.
TMP1003LM
DN200CF (10.00" OD)
KF40
Download PDF
SM8141041
$18,166.00
TMP1003LM
ISO200-F
KF40
Download PDF
SM8141045
$18,165.00
TMP1003LMC
DN200CF (10.00" OD)
KF40
Download PDF
SM8141051
$20,833.00
TMP1003LMC
ISO200-F
KF40
Download PDF
SM8141055
P.O.R.
TMP3203LM
ISO320-F
KF40
Download PDF
SM7843043
P.O.R.
TMP3203LMC
ISO320-F
KF40
Download PDF
SM7843053
$36,500.00

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart
LM/LMC 203
Baking Heater (115V/100W)
SM0014101
P.O.R.
LM/LMC 303-403
Baking Heater (115V/100W)
SM0014111
P.O.R.
LM/LMC 803-1003
Baking Heater (208V/200W)
SM7456918
P.O.R.
LM/LMC 2003-3203
Baking Heater (208V/600W)
SM7456915
P.O.R.
403LM/LMC, 803LM/LMC
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
1003LM/LMC
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
203LM/LMC, 303LM/LMC
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
1003LM/LMC
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
3203LM/LMC
Bolting Kit, For QF320 (ISO320-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF320F-HDKIT
P.O.R.
203LM/LMC, 303LM/LMC
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF100K-HDKIT
P.O.R.
403LM/LMC, 803LM/LMC
Clamping Kit, For QF160 (ISO160-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF160K-HDKIT
P.O.R.
203LM/LMC, 303LM/LMC, 403LM/LMC
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
1003LM/LMC, 3203LM/LMC, 803LM/LMC
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (10 m)
SM1620010
P.O.R.
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (15 m)
SM1620015
P.O.R.
All LM/LMC
803-3203 Series Pumps
Interconnect Cable for
Power Supply to Pump (20m)
SM1620020
P.O.R.
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (3 m)
SM1620003
$1,083.00
All LM/LMC Series Pumps
Interconnect Cable for
Power Supply to Pump (5 m)
SM1620005
$1,350.00
LM/LMC 803-3203
Motor Power Cable (10 m)
SM7640910
P.O.R.
LM/LMC 803-3203
Motor Power Cable (15 m)
SM7640915
P.O.R.
LM/LMC 803-3203
Motor Power Cable (20 m)
SM7640920
P.O.R.
LM/LMC 803-3203
Motor Power Cable (3 m)
SM7640903
$250.00
LM/LMC 803-3203
Motor Power Cable (5 m)
SM7640905
$300.00
TMP 803, 1003, 2003, 3203
Power Supply and Controller, EI-R04M
(200-240 VAC, 1-Øm 50/60 Hz)
SM7898202
$5,583.00
TMP 203, 303, 403
Power Supply and Controller, EI-S04M
(110-120 VAC, 1-Øm 50/60 Hz)
SM1804401
$5,583.00
TMP 203, 303, 403
Power Supply and Controller, EI-S04M
(200-240 VAC, 1-Øm 50/60 Hz)
SM1804402
P.O.R.