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Shimadzu Mag-Lev—LM/LMC Series

Shimadzu's unique line of turbo molecular pumps combines the advantages of the high pumping speed associated with the turbo pump and the high foreline pressure acceptance of the drag pump. This unique blending of technologies results in a pump with much higher compression ratios than conventional turbo pumps, up to 10¹¹ for N₂; and for some versions extends the fore-vacuum tolerance up to 30 Torr.

Their complete lack of hydrocarbon vapor, their reliability, their ability to accept particulate-laden gases, and their corrosion resistance are necessary requirements in the semiconductor process industry.

Features:

• Lubricant-free, magnetically levitated rotor bearings make them completely oil-free when backed by a dry pump
• High foreline pressure tolerance gives them the ability to work with lower cost dry mechanical pumps
• Low pump profile designs for easy mounting
• High compression ratios for all gases
• Interactive rotor balancing ensures maximum uptime
• Self-tuning cables and frequency converters for ease of use
• Use extensively in applications requiring oil-free, ultra-clean, and ultrahigh vacuums (corrosion-resistant version can also be used in corrosive gas production environments)
• Chemical series available for corrosive applications (LMC models)

Applications:

• Mass spectrometry
• SIMS
• Electron microscopy
• Surface science and analysis
• Special ultra-clean leak detection
• Particle accelerators
• Space simulation experiments
• Oxygen plasma etching processes
• Implant tools for semiconductor processes

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