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2021C2 2063C2

Adixen™ (Pfeiffer®) Chemical Pascal C2 Series

NOTE: The 2033 and 2063 Models are no longer available. Please contact us at international@lesker.com or +1 412 387 9200 for available alternatives. Manuals still available, click here.

Pascal C2 Semiconductor Compatible Series:

These pumps share the chemical-resistant features of the C1 series but differ in ways that increase their resistance to chloro- and fluoro-containing gases found in semiconductor processing.

  • Vanes in both stages are made from a composite material that provides high chemical resistance
  • Inlet and exhaust hardware is made of stainless steel
  • Oil level sight tube is made from Lexan® to avoid HF etching
  • An inert gas bubbler system, in place of the air ballast, works both to cool and to degas the oil
  • A special epoxy paint coats the oil casing for additional protection to the pump

Motor Types:

  • Pascal pumps are available with either 1-∅ or 3-∅ motors
  • Both types are compatible with low and high voltage ranges given in the specification table
  • 1-∅ motor features additional advantages - voltage change is made by a simple rocker switch

Specifications Table

Pump Model 2010C2 2015C2 2021C2
Pumping Speeds
50 (Hz)
5.30 CFM
149 L/min
2.49 L/s
9.00 m3/hr
60 (Hz)
6.20 CFM
175 L/min
2.91 L/s
10.5 m3/hr
50 (Hz)
8.24 CFM
233 L/min
3.87 L/s
14.0 m3/hr
60 (Hz)
9.70 CFM
274 L/min
4.56 L/s
16.5 m3/hr
50 (Hz)
10.6 CFM
299 L/min
4.98 L/s
18.0 m3/hr
60 (Hz)
13.0 CFM
368 L/min
6.11 L/s
22.1 m3/hr
Ultimate Pressure
Partial With Gas Ballast
1.00 x 10-4 hPA
1.00 x 10-4 mbar
1.00 x 10-2 Pa
7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 hPA
5.00 x 10-4 mbar
5.00 x 10-2 Pa
3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 hPA
5.00 x 10-4 mbar
5.00 x 10-2 Pa
3.75 x 10-3 Torr
Partial With Gas Ballast
1.00 x 10-4 hPA
1.00 x 10-4 mbar
1.00 x 10-2 Pa
7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 hPA
5.00 x 10-4 mbar
5.00 x 10-2 Pa
3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 hPA
5.00 x 10-4 mbar
5.00 x 10-2 Pa
3.75 x 10-3 Torr
Partial With Gas Ballast
1.00 x 10-4 hPA
1.00 x 10-4 mbar
1.00 x 10-2 Pa
7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 hPA
5.00 x 10-4 mbar
5.00 x 10-2 Pa
3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 hPA
5.00 x 10-4 mbar
5.00 x 10-2 Pa
3.75 x 10-3 Torr
Cooling Method(s) Method
Convection
Method
Convection
Method
Convection
Motor Power HP (kW) 0.74 ( 0.55 ) 0.74 ( 0.55 ) 0.74 ( 0.55 )
Inlet Flange KF25
KF25
KF25
Exhaust Flange KF25
KF25
KF25
Oil Type(s)
Oil Capacity Quarts (Liters)
*Unless otherwise noted
1.00 ( 0.95 ) 1.00 ( 0.95 ) 1.03 ( 0.98 )
Noise db(A) 54.0 54.0 55.0
Compression Stages 2
2
2
Series Chemical
Chemical
Chemical
Weight Lbs (kg) 57.0 ( 26.0 ) 59.5 ( 27.0 ) 62.0 ( 28.0 )
Dimensions in. (mm.) 9.65 x 8.03 x 5.37
(245 x 204 x 136 )
10.6 x 8.86 x 6.20
(270 x 225 x 157 )
11.5 x 9.69 x 7.03
(291 x 246 x 178 )
Technology Wet
Wet
Wet


Dimensional Drawings

Adixen 2010C2
 
Adixen 2010C2 Adixen 2015C2 Adixen 2021C2 Adixen 2033C2 Adixen 2063C2

Charts

Pfeiffer Plasm
 
Pfeiffer Plasm Pfeiffer Plas

Vacuum Pump Repair
& Services
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Remanufactured Vacuum
Pumps
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Pumps FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.
Note:
  • Fomblin is not included and will need to be purchased separately.

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Ordering Table

(Click column headers to sort data)

Pump
Model
Inlet
Flange
Voltage &
Phases
Manual Note Part
Number
Price In Stock Add To Cart
Pump
Model
Inlet
Flange
Voltage &
Phases
Manual Note Part
Number
Price In Stock Add To Cart
2010C2
KF25
180-254 VAC, 50/60 Hz, 1-Ø
Download PDF
210C2MHEN
P.O.R.
Call for Availability
2010C2
KF25
90–132 VAC, 50/60 Hz, 1-Ø
Download PDF
210C2MLAN
$4,730.00
In Stock
2010C2
KF25
342-520 VAC, 50/60 Hz, 3-Ø
Download PDF
1 210C2THEN
P.O.R.
Call for Availability
2010C2
KF25
170–300 VAC, 50/60 Hz, 3-Ø
Download PDF
1 210C2TLAN
P.O.R.
Call for Availability
2015C2
KF25
180-254 VAC, 50/60 Hz, 1-Ø
Download PDF
215C2MHEN
P.O.R.
Call for Availability
2015C2
KF25
90–132 VAC, 50/60 Hz, 1-Ø
Download PDF
215C2MLAN
$5,270.00
In Stock
2015C2
KF25
342-520 VAC, 50/60 Hz, 3-Ø
Download PDF
1 215C2THEN
P.O.R.
Call for Availability
2015C2
KF25
170–300 VAC, 50/60 Hz, 3-Ø
Download PDF
1 215C2TLAN
P.O.R.
Call for Availability
2021C2
KF25
180-254 VAC, 50/60 Hz, 1-Ø
Download PDF
221C2MHEN
P.O.R.
Call for Availability
2021C2
KF25
90–132 VAC, 50/60 Hz, 1-Ø
Download PDF
221C2MLAN
$5,810.00
In Stock
2021C2
KF25
342-520 VAC, 50/60 Hz, 3-Ø
Download PDF
1 221C2THEN
P.O.R.
Call for Availability
2021C2
KF25
170–300 VAC, 50/60 Hz, 3-Ø
Download PDF
1 221C2TLAN
$5,805.00
Call for Availability

 Notes: 
1.
Power cord is not included and will need to be purchased separately based on regional plug type.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add
To Cart
For Pump Model(s) Description Part Number Price In Stock Add
To Cart
All Pascal Series Pumps
Clamp for KF25 Flange
QF25-100-C
P.O.R.
In Stock
All Pascal Series Pumps
Clamp for KF40 Flange
QF40-150-C
P.O.R.
In Stock
2010C2, 2015C2, 2021C2
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Call for Availability
2033C2, 2063C2
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Call for Availability
All Pascal Series Pumps
Fluorocarbon Centering Ring for KF25 Flange
QF25-100-SRV
$8.55
In Stock
All Pascal Series Pumps
Fluorocarbon Centering Ring for KF40 Flange
QF40-150-SRV
$13.10
In Stock
2010CP
Major Repair Kit
104614
P.O.R.
In Stock
2010CP, 2015CP, 2021CP
Major Repair Kit
104975
P.O.R.
Call for Availability
2015CP
Major Repair Kit
104615
P.O.R.
In Stock
2021CP
Major Repair Kit
104616
$343.00
Call for Availability
2033CP
Major Repair Kit
065124
P.O.R.
In Stock
2063CP
Major Repair Kit
065553
$507.00
In Stock
2033CP
Minor Repair Kit
065123
P.O.R.
Call for Availability
2063CP
Minor Repair Kit
065552
P.O.R.
Call for Availability
2010CP, 2015CP, 2021CP
Oil Mist Eliminator
066849
P.O.R.
Call for Availability
2033CP, 2063CP
Oil Mist Eliminator
068942
P.O.R.
Call for Availability
All Pascal Series Pumps
Power Cord 220V
14575
P.O.R.
Call for Availability
All Pascal Series Pumps
Power Cord Europe
103566
P.O.R.
Call for Availability
All Pascal Series Pumps
Power Cord Japan
104559
P.O.R.
Call for Availability
All Pascal Series Pumps
Power Cord Swiss
A459212
P.O.R.
Call for Availability
All Pascal Series Pumps
Power Cord UK
104411
P.O.R.
Call for Availability