Pascal C2 Semiconductor Compatible Series:
These pumps share the chemical-resistant features of the C1 series but differ in ways that increase their resistance to chloro- and fluoro-containing gases found in semiconductor processing.
- Vanes in both stages are made from a composite material that provides high chemical resistance
- Inlet and exhaust hardware is made of stainless steel
- Oil level sight tube is made from Lexan® to avoid HF etching
- An inert gas bubbler system, in place of the air ballast, works both to cool and to degas the oil
- A special epoxy paint coats the oil casing for additional protection to the pump
Motor Types:
- Pascal pumps are available with either 1-∅ or 3-∅ motors
- Both types are compatible with low and high voltage ranges given in the specification table
- 1-∅ motor features additional advantages - voltage change is made by a simple rocker switch
Specifications Table
Pump Model | 2010C2 | 2015C2 | 2021C2 | 2063C2 (Discontinued) |
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Pumping Speeds |
50 (Hz)
5.30 CFM 149 L/min 2.49 L/s 9.00 m3/hr
60 (Hz)
6.20 CFM 175 L/min 2.91 L/s 10.5 m3/hr |
50 (Hz)
8.24 CFM 233 L/min 3.87 L/s 14.0 m3/hr
60 (Hz)
9.70 CFM 274 L/min 4.56 L/s 16.5 m3/hr |
50 (Hz)
10.6 CFM 299 L/min 4.98 L/s 18.0 m3/hr
60 (Hz)
13.0 CFM 368 L/min 6.11 L/s 22.1 m3/hr |
50 (Hz)
35.3 CFM 1000 L/min 16.7 L/s 60.0 m3/hr
60 (Hz)
42.4 CFM 1201 L/min 20.0 L/s 72.1 m3/hr |
Max Water Vapor Pumping Rate (with gas ballast) |
1200 g/hr | |||
Ultimate Pressure |
Partial With Gas Ballast
1.00 x 10-4 hPA 1.00 x 10-4 mbar 1.00 x 10-2 Pa 7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 hPA 5.00 x 10-4 mbar 5.00 x 10-2 Pa 3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 Pa 7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 hPA 5.00 x 10-4 mbar 5.00 x 10-2 Pa 3.75 x 10-3 Torr |
Partial With Gas Ballast
1.00 x 10-4 hPA 1.00 x 10-4 mbar 1.00 x 10-2 Pa 7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 hPA 5.00 x 10-4 mbar 5.00 x 10-2 Pa 3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 Pa 7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 hPA 5.00 x 10-4 mbar 5.00 x 10-2 Pa 3.75 x 10-3 Torr |
Partial With Gas Ballast
1.00 x 10-4 hPA 1.00 x 10-4 mbar 1.00 x 10-2 Pa 7.50 x 10-4 Torr
Partial Without Gas Ballast
5.00 x 10-4 hPA 5.00 x 10-4 mbar 5.00 x 10-2 Pa 3.75 x 10-3 Torr
Total With Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 Pa 7.50 x 10-3 Torr
Total Without Gas Ballast
5.00 x 10-4 hPA 5.00 x 10-4 mbar 5.00 x 10-2 Pa 3.75 x 10-3 Torr |
Total Without Gas Ballast
3.00 x 10-3 hPA 3.00 x 10-3 mbar 3.00 x 10-1 Pa 2.25 x 10-3 Torr |
Cooling Method(s) |
Method Convection |
Method Convection |
Method Convection |
Method Convection |
Motor Power HP (kW) | 0.74 ( 0.55 ) | 0.74 ( 0.55 ) | 0.74 ( 0.55 ) | |
Inlet Flange | KF25 |
KF25 |
KF25 |
KF40 |
Exhaust Flange | KF25 |
KF25 |
KF25 |
KF40 |
Oil Type(s) | ||||
Oil Capacity Quarts (Liters) *Unless otherwise noted |
1.00 ( 0.95 ) | 1.00 ( 0.95 ) | 1.03 ( 0.98 ) | |
Noise db(A) | 54.0 | 54.0 | 55.0 | |
Compression Stages | 2 |
2 |
2 |
2 |
Series | Chemical |
Chemical |
Chemical |
|
Weight Lbs (kg) | 57.0 ( 26.0 ) | 59.5 ( 27.0 ) | 62.0 ( 28.0 ) | 205 ( 93.0 ) |
Dimensions in. (mm.) | 9.65 x 8.03 x 5.37 (245 x 204 x 136 ) | 10.6 x 8.86 x 6.20 (270 x 225 x 157 ) | 11.5 x 9.69 x 7.03 (291 x 246 x 178 ) | |
Lubrication Type | Wet |
Wet |
Wet |
Wet |
Technology Type | Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
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Ordering Table
(Click column headers to sort data)
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Pump Model | Inlet Flange | Voltage & Phases | Oil Prep | Manual | Note |
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Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
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Pump Model | Inlet Flange | Voltage & Phases | Oil Prep | Manual | Note |
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Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
2010C2 | KF25 | 180-254 VAC, 50/60 Hz, 1-Ø | — |
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— | — |
PUMP, |
210C2MHEN | P.O.R. |
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— | ||
2010C2 | KF25 | 90–132 VAC, 50/60 Hz, 1-Ø | — |
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— | — |
PUMP, |
210C2MLAN | $5,470.00 |
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— | ||
2010C2 | KF25 | 342-520 VAC, 50/60 Hz, 3-Ø | — |
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1 | — |
PUMP, |
210C2THEN | P.O.R. |
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— | ||
2015C2 | KF25 | 180-254 VAC, 50/60 Hz, 1-Ø | — |
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— | — |
PUMP, |
215C2MHEN | P.O.R. |
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— | ||
2015C2 | KF25 | 90–132 VAC, 50/60 Hz, 1-Ø | — |
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— | — |
PUMP, |
215C2MLAN | $6,090.00 |
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— | ||
2015C2 | KF25 | 342-520 VAC, 50/60 Hz, 3-Ø | — |
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1 | — |
PUMP, |
215C2THEN | P.O.R. |
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— | ||
2015C2 | KF25 | 170–300 VAC, 50/60 Hz, 3-Ø | — |
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1 | — |
PUMP, |
215C2TLAN | P.O.R. |
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— | ||
2021C2 | KF25 | 180-254 VAC, 50/60 Hz, 1-Ø | — |
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— | — |
PUMP, |
221C2MHEN | P.O.R. |
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— | ||
2021C2 | KF25 | 90–132 VAC, 50/60 Hz, 1-Ø | — |
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— | — |
PUMP, |
221C2MLAN | $6,720.00 |
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— | ||
2021C2 | KF25 | 342-520 VAC, 50/60 Hz, 3-Ø | — |
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1 | — |
PUMP, |
221C2THEN | P.O.R. |
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— | ||
2021C2 | KF25 | 170–300 VAC, 50/60 Hz, 3-Ø | — |
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1 | — |
PUMP, |
221C2TLAN | $6,720.00 |
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— | ||
2063C2 | KF40 | 230/460V | Fomblin |
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— |
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PUMP, |
263C2T2LWNNX-R | P.O.R. |
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Accessories Table
Description | For Pump Model(s) | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
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Description | For Pump Model(s) | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
Adixen 2010C2 Major Repair Kit | 2010CP |
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Adixen 2033CP Minor Repair Kit | 2033CP |
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Adixen 2063CP Major Repair Kit | 2063CP |
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Adixen OME-25C Oil Mist Eliminator | 2010CP, 2015CP, 2021CP |
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Adixen Pascal C1/C2 Series Minor Repair Kit | 2010CP, 2015CP, 2021CP |
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Centering Ring, SS, QF40, FKM | All Pascal Series Pumps |
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Clamp for KF25 | All Pascal Series Pumps |
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Clamp, Aluminum, QF40, Cast 1-1/2" | All Pascal Series Pumps |
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Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring | 2010C2, 2015C2, 2021C2 |
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Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring | 2033C2, 2063C2 |
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Fluorocarbon Centering Ring for KF25 | All Pascal Series Pumps |
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KJLC Controller, Power Supply and Display | All Pascal Series Pumps |
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KJLC Pirani, Nickel Filament, KF16 | All Pascal Series Pumps |
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Mains Cable with CEE 7/7 Plug (Northern Europe) for single phase pumps, 2m length | All Pascal Series Pumps |
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Mains Cable with Type G (UK) Plug for single phase pumps, 2.5m length | All Pascal Series Pumps |
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Mains Cable with Type J (Switzerland) Plug for single phase pumps | All Pascal Series Pumps |
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Mains Cable with flying leads for single phase pumps, 2m length | All Pascal Series Pumps |
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Major Repair Kit | 2015CP | — |
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Major Repair Kit | 2021CP | — |
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Major Repair Kit | 2033CP | — |
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Minor Repair Kit | 2063CP | — |
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Oil Mist Eliminator | 2033CP, 2063CP | — |
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Power Cord 220V | All Pascal Series Pumps |
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