Features
- Combine high performance, low vibration, and low noise
- Gas ballasting for solvent vapor removal
- Forced oil supply offers optimum lubrication during pumpdown
- Anti-suckback device protects the chamber during power failure
Applications
- Chemical, analyzer and laser systems
- Vacuum pumping system
- Backing pump for SEM
- Semiconductor, sputtering, and vacuum evaporation equipment
- Vacuum and freeze drying
Specifications Table
Pump Model | GLD-040 | GLD-137 | GLD-202 | GLD-280 |
---|---|---|---|---|
Pumping Speeds |
50 (Hz)
1.41 CFM 40.0 L/min 0.66 L/s 2.40 m3/hr
60 (Hz)
1.70 CFM 48.1 L/min 0.80 L/s 2.89 m3/hr |
50 (Hz)
4.77 CFM 134 L/min 2.24 L/s 8.10 m3/hr
60 (Hz)
5.70 CFM 161 L/min 2.68 L/s 9.68 m3/hr |
50 (Hz)
7.06 CFM 199 L/min 3.32 L/s 12.0 m3/hr
60 (Hz)
8.50 CFM 240 L/min 3.99 L/s 14.4 m3/hr |
50 (Hz)
9.89 CFM 279 L/min 4.65 L/s 16.8 m3/hr
60 (Hz)
11.9 CFM 335 L/min 5.58 L/s 20.2 m3/hr |
Ultimate Pressure |
Total With Gas Ballast
6.66 x 10-2 hPA 6.66 x 10-2 mbar 6.66 Pa 5.00 x 10-2 Torr
Total Without Gas Ballast
6.66 x 10-3 hPA 6.66 x 10-3 mbar 6.66 x 10-1 Pa 5.00 x 10-3 Torr |
Total With Gas Ballast
6.66 x 10-2 hPA 6.66 x 10-2 mbar 6.66 Pa 5.00 x 10-2 Torr
Total Without Gas Ballast
6.66 x 10-3 hPA 6.66 x 10-3 mbar 6.66 x 10-1 Pa 5.00 x 10-3 Torr |
Total With Gas Ballast
6.66 x 10-2 hPA 6.66 x 10-2 mbar 6.66 Pa 5.00 x 10-2 Torr
Total Without Gas Ballast
6.66 x 10-3 hPA 6.66 x 10-3 mbar 6.66 x 10-1 Pa 5.00 x 10-3 Torr |
Total With Gas Ballast
6.66 x 10-2 hPA 6.66 x 10-2 mbar 6.66 Pa 5.00 x 10-2 Torr
Total Without Gas Ballast
6.66 x 10-4 hPA 6.66 x 10-4 mbar 6.66 x 10-2 Pa 5.00 x 10-4 Torr |
Cooling Method(s) |
Method Convection |
Method Convection |
Method Convection |
Method Convection |
Inlet Flange | KF25 |
KF25 |
KF25 |
KF25 |
Exhaust Flange | KF25 |
KF25 |
KF25 |
KF25 |
Oil Type(s) |
Hydrocarbon Oil Part: KJLSS19G1 |
Hydrocarbon Oil Part: KJLSS19G1 |
Hydrocarbon Oil Part: KJLSS19G1 |
Hydrocarbon Oil Part: KJLSS19G1 |
Oil Capacity Quarts (Liters) *Unless otherwise noted |
0.71 ( 0.68 ) | 1.05 ( 1.00 ) | 1.05 ( 1.00 ) | 1.05 ( 1.00 ) |
Noise db(A) | 55.0 | |||
Compression Stages | 2 |
2 |
2 |
2 |
Series | Standard |
Standard |
Standard |
|
Weight Lbs (kg) | 35.2 ( 16.0 ) | 57.2 ( 26.0 ) | 63.8 ( 29.0 ) | 75.9 ( 34.5 ) |
Dimensions in. (mm.) | 16.8 x 5.91 x 9.02 (427 x 150 x 229 ) | 17.9 x 6.69 x 9.45 (455 x 170 x 240 ) | 20.2 x 6.69 x 9.45 (513 x 170 x 240 ) | 23.1 x 7.17 x 10.7 (586 x 182 x 271 ) |
Lubrication Type | Wet |
Wet |
Wet |
Wet |
Technology Type | Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
Rotary Vane - Direct Drive |
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