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Busch Cobra Series Screw Vacuum Pump

The COBRA dry screw vacuum pumps offer state-of-the-art harsh duty process and high capacity load lock solutions for the most demanding solar, flat panel, semiconductor or coating applications. These vacuum pumps have best-in-class pumping speed combined with superior hydrogen throughput and excellent powder handling capabilities resulting from their unique screw pump design.

COBRA BA 0100 C series pumps use a high performing, air cooling method eliminating the need for cooling water. The unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.

The COBRA BC 0100 F series pumps include PLC controls and are provided with a special coating for handling of corrosive gases and vapors. These vacuum pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket. The BC series also utilizes the unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.

Features:

  • Cost-effective, long uptime, energy-efficient
  • Long service intervals
  • Operationally reliable
  • Application-oriented
  • Quiet operation ≤ 58 dB (A)

Applications:

  • Atomic layer deposition (ALD)
  • High-density plasma CVD (HDP CVD)
  • Sub-atmospheric CVD (SACVD)
  • Metal-organic CVD (MOCVD)
  • Plasma-enhanced CVD (PECVD)
  • Low-pressure CVD (LPCVD)
  • Rapid thermal processing (RTP)
  • Load-lock application

Specifications Table

Pump Model BA 0100 C BC 0100 F
Pumping Speeds
50 (Hz)
50.0 CFM
1416 L/min
23.6 L/s
85.0 m3/hr
60 (Hz)
61.8 CFM
1749 L/min
29.2 L/s
105 m3/hr
50 (Hz)
58.9 CFM
1666 L/min
27.8 L/s
100 m3/hr
60 (Hz)
59.0 CFM
1672 L/min
27.9 L/s
100 m3/hr
Max Water Vapor
Pumping Rate
(with gas ballast)
1000 g/hr
Ultimate Pressure
Total Without Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Total Without Gas Ballast
1.00 x 10-2 hPA
1.00 x 10-2 mbar
1.00 x 100 Pa
7.50 x 10-3 Torr
Cooling Method(s) Method
Convection
Method
Water
Motor Power HP (kW) 2.40 ( 1.80 ) 2.40 ( 1.80 )
Inlet Flange KF50
KF50
Exhaust Flange KF40
KF40
Noise db(A) 58.0 58.0
Weight Lbs (kg) 264 ( 120 ) 265 ( 120 )
Dimensions in. (mm.) 25.0 x 12.0 x 13.4
(635 x 304 x 339 )
33.0 x 12.0 x 14.3
(838 x 304 x 362 )
Technology Dry
Dry


Dimensional Drawings

BA0100
 
BA0100 BC0100F


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Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.
Note:
  • A charge of Fomblin is included with the BA 0100C. However, Fomblin is not included with BC 0100 F and will need to be ordered separately.

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Ordering Table

(Click column headers to sort data)

Pump
Model
Inlet
Flange
Voltage &
Phases
Manual Part
Number
Price In Stock Add To Cart
Pump
Model
Inlet
Flange
Voltage &
Phases
Manual Part
Number
Price In Stock Add To Cart
BA 0100 C
KF50
208-240/380-480V
50/60Hz,3-Ø
Download PDF
1361570714
P.O.R.
Call for Availability
BA 0100 C
KF50
200-230V
60Hz, 3-Ø
Download PDF
1361570761
P.O.R.
Call for Availability
BC 0100 F
KF50
200/400/460V
50/60Hz, 3-Ø
Download PDF
1361700216
P.O.R.
Call for Availability

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add
To Cart
For Pump Model(s) Description Part Number Price In Stock Add
To Cart
BA 0100 C, BC 0100 F
Auto-Soft Flow Actuated Check Valve (KF50)
225-0050
P.O.R.
In Stock
BA 0100 C, BC 0100 F
Clamping Kit, For QF50 Flange, Including Aluminum Clamp and FKM Centering Ring
QF50-HDKIT
P.O.R.
Call for Availability