The COBRA dry screw vacuum pumps offer state-of-the-art harsh duty process and high capacity load lock solutions for the most demanding solar, flat panel, semiconductor or coating applications. These vacuum pumps have best-in-class pumping speed combined with superior hydrogen throughput and excellent powder handling capabilities resulting from their unique screw pump design.
COBRA BA 0100 C series pumps use a high performing, air cooling method eliminating the need for cooling water. The unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.
The COBRA BC 0100 F series pumps include PLC controls and are provided with a special coating for handling of corrosive gases and vapors. These vacuum pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket. The BC series also utilizes the unique "flying bearing" screw suspension design eliminates inlet bearing issues and allows for a reduced footprint.
Features:
- Cost-effective, long uptime, energy-efficient
- Long service intervals
- Operationally reliable
- Application-oriented
- Quiet operation ≤ 58 dB (A)
Applications:
- Atomic layer deposition (ALD)
- High-density plasma CVD (HDP CVD)
- Sub-atmospheric CVD (SACVD)
- Metal-organic CVD (MOCVD)
- Plasma-enhanced CVD (PECVD)
- Low-pressure CVD (LPCVD)
- Rapid thermal processing (RTP)
- Load-lock application
Specifications Table
| Pump Model | BA 0100 C |
|---|---|
| Pumping Speeds |
50.0 - 61.8 CFM 1416 - 1749 L/min 23.6 - 29.2 L/s 85.0 - 105 m3/hr
50 (Hz)
50.0 CFM 1416 L/min 23.6 L/s 85.0 m3/hr
60 (Hz)
61.8 CFM 1749 L/min 29.2 L/s 105 m3/hr |
|
Max Water Vapor Pumping Rate (with gas ballast) |
1000 g/hr |
| Ultimate Pressure |
Total Without Gas Ballast
1.00 x 10-2 hPA 1.00 x 10-2 mbar 1.00 Pa 7.50 x 10-3 Torr |
| Cooling Method(s) |
Method Convection |
| Motor Power HP (kW) | 2.40 ( 1.80 ) |
| Inlet Flange | KF50 |
| Exhaust Flange | KF40 |
| Noise db(A) | 58.0 |
| Weight Lbs (kg) | 264 ( 120 ) |
| Dimensions in. (mm.) | 25.0 x 12.0 x 13.4 (635 x 304 x 339 ) |
| Lubrication Type | Dry |
| Technology Type | Screw |
Ordering Table
(Click column headers to sort data)
| Pump Model | Inlet Flange | Voltage & Phases | Manual | Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
|---|---|---|---|---|---|---|---|---|---|---|
| Pump Model | Inlet Flange | Voltage & Phases | Manual | Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
| BA 0100 C | KF50 |
208-240/380-480V 50/60Hz,3-Ø |
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PUMP, |
1332570714 | P.O.R. |
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| BA 0100 C | KF50 |
200-230V 60Hz, 3-Ø |
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PUMP, |
1332570761 | P.O.R. |
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Accessories Table
| Description | For Pump Model(s) | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
|---|---|---|---|---|---|---|---|
| Description | For Pump Model(s) | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
| Auto-Soft Flow Actuated Check Valve (KF50) | BA 0100 C, BC 0100 F |
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| Clamping Kit, For QF50 Flange, Including Aluminum Clamp and FKM Centering Ring | BA 0100 C, BC 0100 F |
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| KJLC Controller, Power Supply and Display | BA 0100 C, BC 0100 F |
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| KJLC Pirani, Nickel Filament, KF16 | BA 0100 C, BC 0100 F |
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| Fomblin Y25/6 1kg | BC 0100 F |
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