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Anest Iwata ISP Series Scroll Pumps

Features

Oil Free, clean vacuum environment
Air-cooled system that eliminates installation restrictions
Low power consumption from atmosphere to max pressure
Low noise and low vibration operation

Applications

Sputtering equipment, vacuum deposition equipment, & ion plating equipment
Surface modification, electron beam process
Accelerator, synchrotron radiation
Vacuum furnace, heat treatment furnace
Laboratory use

Dimensional Drawings

Charts

Anest Iwata ISP Series Scroll Pumpschart

Specifications Table

Pump Model	ISP-50	ISP-90	ISP-250C	ISP-500C	ISP-1000
Pumping Speeds	50 (Hz) 1.77 CFM 50.0 L/min 0.83 L/s 3.00 m³/hr 60 (Hz) 2.10 CFM 59.5 L/min 0.99 L/s 3.57 m³/hr	50 (Hz) 2.83 CFM 80.0 L/min 1.33 L/s 4.80 m³/hr 60 (Hz) 3.50 CFM 99.1 L/min 1.64 L/s 5.95 m³/hr	50 (Hz) 7.65 CFM 216 L/min 3.61 L/s 13.0 m³/hr 60 (Hz) 9.10 CFM 257 L/min 4.28 L/s 15.5 m³/hr	50 (Hz) 15.3 CFM 433 L/min 7.22 L/s 26.0 m³/hr 60 (Hz) 18.3 CFM 518 L/min 8.60 L/s 31.1 m³/hr	50 (Hz) 30.6 CFM 866 L/min 14.4 L/s 52.0 m³/hr 60 (Hz) 36.5 CFM 1033 L/min 17.2 L/s 62.0 m³/hr
Ultimate Pressure	Total Without Gas Ballast 1.50 x 10^-1 hPA 1.50 x 10^-1 mbar 14.7 Pa 1.10 x 10^-1 Torr	Total Without Gas Ballast 5.00 x 10^-2 hPA 5.00 x 10^-2 mbar 5.07 Pa 3.80 x 10^-2 Torr	Total Without Gas Ballast 1.60 x 10^-2 hPA 1.60 x 10^-2 mbar 1.60 Pa 1.20 x 10^-2 Torr	Total Without Gas Ballast 1.00 x 10^-2 hPA 1.00 x 10^-2 mbar 1.00 Pa 7.50 x 10^-3 Torr	Total Without Gas Ballast 1.00 x 10^-2 hPA 1.00 x 10^-2 mbar 1.00 Pa 7.50 x 10^-3 Torr
Cooling Method(s)	Method Convection	Method Convection	Method Convection	Method Convection	Method Convection

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Ordering Table

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Pump Model	Inlet Flange	Voltage & Phases	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Voltage & Phases	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
ISP-1000	KF40	3-ph 200V,380-400-415 V,50 Hz, 3-ph 200-220-230 V,460V,60 Hz		Anesta Iwata ISP-1000 Scroll Pump, KF40 Inlet Flange, 52 m^3/hr at 50Hz / 36.5 CFM at 60Hz, Convection Cooling, 200V,380-400-415 V,50 Hz, 3-ph 200-220-230 V,460V,60 Hz, 3- Ø, Mains Cable Not Included	ISP-1000-TH	$17,330.00
ISP-250C	KF25	3-ph motor: 200 V, 380-415 V, 50 Hz/ 200-230 V, 460 V, 60 Hz		Anesta Iwata ISP-250C Scroll Pump, KF25 Inlet Flange, 13 m^3/hr at 50Hz / 9.11 CFM at 60Hz, Convection Cooling, 200 V, 380-415 V, 50 Hz/ 200-230 V, 460 V, 60 Hz, 3- Ø, Mains Cable Not Included	ISP-250C-TV	$7,200.00
ISP-50	KF25	1-ph 100V/50Hz,100-115V/60Hz,200/230V,50/60Hz		Anesta Iwata ISP-50 Scroll Pump, KF25 Inlet Flange, 3 m^3/hr at 50Hz / 2.1 CFM at 60Hz, Convection Cooling, 100V/50Hz,100-115V/60Hz,200/230V,50/60Hz, 1-Ø, Mains Cable Not Included	ISP-50	$4,830.00
ISP-500C	KF40	1-ph 100V/50Hz,100-115V/60Hz,200/230V,50/60Hz		Anesta Iwata ISP-500C Scroll Pump, KF40 Inlet Flange, 26 m^3/hr at 50Hz / 18.3 CFM at 60Hz, Convection Cooling, 100V/50Hz,100-115V/60Hz,200/230V,50/60Hz, 1-Ø, Mains Cable Not Included	ISP-500C-SV	$11,240.00
ISP-500C	KF40	3 phase 200 V, 380-415 V, 50 Hz /200-230 V, 460 V, 60Hz		Anesta Iwata ISP-500C Scroll Pump, KF40 Inlet Flange, 26 m^3/hr at 50Hz / 18.3 CFM at 60Hz, Convection Cooling, 200 V, 380-415 V, 50 Hz /200-230 V, 460 V, 60Hz, 3-Ø , Mains Cable Not Included	ISP-500C-TH	$11,240.00
ISP-90	KF25	1-ph 100V/50Hz,100-115V/60Hz,200/230V,50/60Hz		Anesta Iwata ISP-90 Scroll Pump, KF25 Inlet Flange, 4.81 m^3/hr at 50Hz / 3.5 CFM at 60Hz, Convection Cooling, 100V/50Hz,100-115V/60Hz,200/230V,50/60Hz, 1-Ø, Mains Cable Not Included	ISP-90	$5,090.00

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Accessories Table

Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Auto-Soft Flow Actuated Check Valve (KF40)	ISP-500C	Hardware	225-0040	$246.00
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	ISP-250C, ISP-50, ISP-90	KF Hardware Kit	QF25-HDKIT	$19.60
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	ISP-1000, ISP-500C	KF Hardware Kit	QF40-HDKIT	$26.05
KJLC 300 Convection Enhanced Pirani, KF16	All ISP Pumps	Gauge	KJL300806	$795.00
Power Supply, KJLC 275i or 300, US Plug End	All ISP Pumps	Gauge Power Cable	KJLPS401A	$96.00
Anest Iwata Minor Repair Kit for ISP-90 Pumps	ISP-90	Repair Kit	98881590	$645.00
Anest Iwata Major Repair Kit for ISP-90 Pumps	ISP-90	Repair Kit	98882590	$1,324.00
Anest Iwata Tip Seal Replacement Kit for ISP-90 Pumps	ISP-90	Repair Kit	98885570	$451.00
Anest Iwata Minor Repair Kit for ISP-250 Pumps	ISP-250	Repair Kit	98884251	$783.00
Anest Iwata Major Repair Kit for ISP-250 Pumps	ISP-250	Repair Kit	98883251	P.O.R.
Anest Iwata Tip Seal Replacement Kit for ISP-250 Pumps	ISP-250	Repair Kit	98882270	$503.00
Anest Iwata Minor Repair Kit for ISP-500 Pumps	ISP-500	Repair Kit	98881250	P.O.R.
Anest Iwata Major Repair Kit for ISP-500 Pumps	ISP-500	Repair Kit	98882251	P.O.R.
Anest Iwata Tip Seal Replacement Kit for ISP-500 Pumps	ISP-500	Repair Kit	98883240	$492.00

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