Representative Image
Leybold Scrollvac Series Scroll Vacuum Pumps
Features
- Oil free
- High effective pumping speed
- Low ultimate pressure
- Low vibration operation
- Atmospheric inlet pressure allowable
Applications
- Sputtering Equipment, vacuum deposition equipment, ion plating equipment
- Surface modification, electron beam process
- Accelerator, synchrotron radiation
- Vacuum furnace, heat treatment furnace
- Laboratory use
Dimensional Drawings
Charts
Accessories Table
| Description | For Pump Model(s) | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
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| Description | For Pump Model(s) | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
| Auto-Soft Flow Actuated Check Valve (KF40) | SC 30 D, SC 60 D |
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| Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring | SC 15 D, SC 5 D |
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| Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring | SC 30 D, SC 60 D |
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| Leybold Minor Service Kit for SC5D | SC 5 D |
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| Leybold Major Service Kit for SC5D Pumps | SC 5 D |
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| Tip Seal Kit | SC 5 D | — |
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| Leybold Pin Crank Kit for SC5D Pumps | SC 5 D |
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| Minor Service Kit | SC 15 D | — |
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| Major Service Kit | SC 15 D | — |
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| Leybold Tip Seal Replacement Kit for SC15D Pumps | SC 15 D |
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| Pin Crank Kit | SC 15 D | — |
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| Minor Service Kit | SC 30 D | — |
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| Major Service Kit | SC 30 D | — |
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| Tip Seal Kit | SC 30 D | — |
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| Pin Crank Kit | SC 30 D | — |
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| Leybold Minor Service Kit for SC60D | SC 60 D |
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| Leybold Major Service Kit for SC60D Pumps | SC 60 D |
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| Leybold Tip Seal Replacement Kit for SC60D Pumps | SC 60 D |
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| Leybold Pin Crank Kit for SC60D Pumps | SC 60 D |
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| Leybold Air Flush Kit for All ScrollVac Pumps | SC 5-60 D |
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