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Leybold Scrollvac Series Scroll Vacuum Pumps

Features

  • Oil free
  • High effective pumping speed
  • Low ultimate pressure
  • Low vibration operation
  • Atmospheric inlet pressure allowable

Applications

  • Sputtering Equipment, vacuum deposition equipment, ion plating equipment
  • Surface modification, electron beam process
  • Accelerator, synchrotron radiation
  • Vacuum furnace, heat treatment furnace
  • Laboratory use

Dimensional Drawings

 
SC 5 D SC 15 D SC 30 D SC 60 D

Charts


Product Datasheet
For a download of the product datasheet, click here.
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& Services
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Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart
For Pump Model(s) Description Part Number Price In Stock Add To Cart
SC 30 D, SC 60 D Auto-Soft Flow Actuated Check Valve (KF40)
225-0040
P.O.R.
Call for Availability
SC 15 D, SC 5 D Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Call for Availability
SC 30 D, SC 60 D Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Call for Availability
SC 5 D Minor Service Kit
EK870000496
P.O.R.
Call for Availability
SC 5 D Major Service Kit
EK870000499
P.O.R.
Call for Availability
SC 5 D Tip Seal Kit
E870000510
P.O.R.
Call for Availability
SC 5 D Pin Crank Kit
EK870000507
P.O.R.
Call for Availability
SC 15 D Minor Service Kit
EK870000497
P.O.R.
Call for Availability
SC 15 D Major Service Kit
EK870000500
P.O.R.
Call for Availability
SC 15 D Tip Seal Kit
E870000511
P.O.R.
Call for Availability
SC 15 D Pin Crank Kit
EK870000508
P.O.R.
Call for Availability
SC 30 D Minor Service Kit
EK870000498
P.O.R.
Call for Availability
SC 30 D Major Service Kit
EK870000501
P.O.R.
Call for Availability
SC 30 D Tip Seal Kit
E870000512
P.O.R.
Call for Availability
SC 30 D Pin Crank Kit
EK870000509
P.O.R.
Call for Availability
SC 60 D Minor Service Kit
EK870000519
P.O.R.
Call for Availability
SC 60 D Major Service Kit
EK870000520
P.O.R.
Call for Availability
SC 60 D Tip Seal Kit
E870000522
P.O.R.
Call for Availability
SC 60 D Pin Crank Kit
EK870000523
P.O.R.
Call for Availability
SC 5-60 D Air Flush Kit
EK870000515
P.O.R.
Call for Availability
How to Combine Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
Contact Us - Oerlikon Leybold Scrollvac Series Scroll Vacuum Pumps