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EBT240 EBT350 EBT450 EBT70 EBT1100

Ebara Model EBT Turbomolecular Pumps

Features

  • Rugged bearing design ideal for mobile applications
  • High pumping speeds
  • High compression ratios for light gases
  • Fast starts and stops
  • Quick venting (no vent pulsing)
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)

Applications

  • Surface treatment
  • Analytical instrument lamps
  • Electron/ X-ray tubes
  • Ion/ EB-source
  • Water bonding
  • Sputter
  • Glass/ film coating
  • Exhaust carts

Product Brochure
For a download of the product brochure, click here.
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Contact Us
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Specifications Table

Pump Model EBT70 EBT220 EBT240 EBT350 EBT450 EBT800 EBT1100 EBT1400 EBT2400
Pumping Speeds
N2: 75.0 L/s
H2: 45.0 L/s
N2: 220 L/s
H2: 100 L/s
N2: 240 L/s
H2: 160 L/s
N2: 330 L/s
H2: 210 L/s
N2: 450 L/s
H2: 240 L/s
N2: 820 L/s
H2: 650 L/s
N2: 1100 L/s
H2: 720 L/s
N2: 1400 L/s
H2: 750 L/s
Max Gas Throughput Ar: 5.00 mbar*L/s
N2: 10.0 mbar*L/s
Ar: 400 mbar*L/s
N2: 400 mbar*L/s
Ar: 50.0 mbar*L/s
N2: 70.0 mbar*L/s
Ar: 250 mbar*L/s
N2: 500 mbar*L/s
Ar: 250 mbar*L/s
N2: 500 mbar*L/s
Ar: 300 mbar*L/s
N2: 330 mbar*L/s
Ar: 300 mbar*L/s
N2: 330 mbar*L/s
Ar: 250 mbar*L/s
N2: 450 mbar*L/s
Ultimate Pressure
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ISO-K Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ISO-K Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
Foreline Flange KF16
KF25
KF25
KF25
KF25
KF40
KF40
KF40
KF40
Inlet Flange DN63CF (4.50" OD)
ISO63-K
DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
ISO160-F
DN160CF (8.00" OD)
ISO160-F
DN160CF (8.00" OD)
ISO200-F
DN200CF (10.00" OD)
ISO200-F
DN200CF (10.00" OD)
ISO250-F
Weight Lbs (kg) 11.0 ( 5.00 ) 12.1 ( 5.50 ) 23.1 ( 10.5 ) 19.8 ( 9.00 ) 22.0 ( 10.0 ) 59.4 ( 27.0 ) 61.6 ( 28.0 ) 66.0 ( 30.0 )
Lubrication Type Dry
Dry
Dry
Dry
Dry
Dry
Dry
Dry
Dry
Technology Type Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
Turbomolecular
X CLOSE

Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart
For Pump Model(s) Description Part Number Price In Stock Add To Cart
EBT450, EBT800 Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
Contact KJLC for Availability
EBT1100 , EBT1400 Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
Contact KJLC for Availability
EBT70 Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN63CF-HDKIT
P.O.R.
Contact KJLC for Availability
EBT220, EBT240, EBT350 Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
Contact KJLC for Availability
EBT450, EBT800 Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
EBT450, EBT800 Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
EBT1100 , EBT1400 Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
Contact KJLC for Availability
EBT2400 Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF250F-HDKIT
P.O.R.
Contact KJLC for Availability
All EBT Models Cable, C13 Connector to Flying Leads, 3 meters, 10 Amps
70010020305
P.O.R.
Contact KJLC for Availability
All EBT Models Cable, C13 Connector to NEMA 5-15 Plug, 3 meters, 10 Amps
86221580
P.O.R.
Contact KJLC for Availability
All EBT Models Cable, C13 Connector to NEMA 6-15 Plug, 3 meters, 10 Amps
86610100
P.O.R.
Contact KJLC for Availability
EBT220, EBT240, EBT350 Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF100K-HDKIT
P.O.R.
Contact KJLC for Availability
EBT70 Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring
QF16-HDKIT
P.O.R.
Contact KJLC for Availability
EBT220, EBT240, EBT350, EBT450 Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
EBT1100 , EBT1400, EBT2400, EBT800 Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
EBT70 Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring
QF63K-HDKIT
P.O.R.
Contact KJLC for Availability
Contact Us - Ebara Model EBT Turbomolecular Pumps