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EBT240
 
Representative Image
EBT240 EBT350 EBT450 EBT70 EBT1100

Ebara Model EBT Turbomolecular Pumps

Features

  • Rugged bearing design ideal for mobile applications
  • High pumping speeds
  • High compression ratios for light gases
  • Fast starts and stops
  • Quick venting (no vent pulsing)
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)

Applications

  • Surface treatment
  • Analytical instrument lamps
  • Electron/ X-ray tubes
  • Ion/ EB-source
  • Water bonding
  • Sputter
  • Glass/ film coating
  • Exhaust carts
Product Brochure
For a download of the product brochure, click here.
Vacuum Pump Repair
& Services
World class service center for scheduled maintenance, evaluation, and vacuum pump repair.
Request a Service Quote
Request a Pump RMA
Remanufactured Vacuum
Pumps
Click here to view a list of remanufactured vacuum pumps available from The KJLC's Remanufactured Vacuum Pump Division.
Pumps FAQ
Click here for answers to some of the most common questions we get asked.
Contact Us
To speak with someone directly, please call +1 412 387 9200 or email international@lesker.com.

Specifications Table

Pump Model EBT70 EBT220 EBT240 EBT350 EBT450 EBT800 EBT1100 EBT1400 EBT2400
Pumping Speeds
H2: 45.0 L/s
N2: 75.0 L/s
H2: 100 L/s
N2: 220 L/s
H2: 160 L/s
N2: 240 L/s
H2: 210 L/s
N2: 330 L/s
H2: 240 L/s
N2: 450 L/s
H2: 650 L/s
N2: 820 L/s
H2: 720 L/s
N2: 1100 L/s
H2: 750 L/s
N2: 1400 L/s
Max Gas Throughput Ar: 5.00 mbar*L/s
N2: 10.0 mbar*L/s
Ar: 400 mbar*L/s
N2: 400 mbar*L/s
Ar: 50.0 mbar*L/s
N2: 70.0 mbar*L/s
Ar: 250 mbar*L/s
N2: 500 mbar*L/s
Ar: 250 mbar*L/s
N2: 500 mbar*L/s
Ar: 300 mbar*L/s
N2: 330 mbar*L/s
Ar: 300 mbar*L/s
N2: 330 mbar*L/s
Ar: 250 mbar*L/s
N2: 450 mbar*L/s
Ultimate Pressure
ConFlat Flange
9.31 x 10-10 hPA
9.31 x 10-10 mbar
9.33 x 10-8 Pa
7.00 x 10-10 Torr
ConFlat Flange
9.98 x 10-9 hPA
9.98 x 10-9 mbar
10.00 x 10-7 Pa
7.50 x 10-9 Torr
ConFlat Flange
5.05 x 10-9 hPA
5.05 x 10-9 mbar
5.07 x 10-7 Pa
3.80 x 10-9 Torr
ConFlat Flange
9.98 x 10-9 hPA
9.98 x 10-9 mbar
10.00 x 10-7 Pa
7.50 x 10-9 Torr
ConFlat Flange
9.98 x 10-9 hPA
9.98 x 10-9 mbar
10.00 x 10-7 Pa
7.50 x 10-9 Torr
ConFlat Flange
9.98 x 10-9 hPA
9.98 x 10-9 mbar
10.00 x 10-7 Pa
7.50 x 10-9 Torr
ConFlat Flange
9.98 x 10-9 hPA
9.98 x 10-9 mbar
10.00 x 10-7 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-10 Pa
7.50 x 10-9 Torr
ISO-K Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
Foreline Flange KF16
KF25
KF25
KF25
KF25
KF40
KF40
KF40
KF40
Inlet Flange DN63CF (4.50" OD)
ISO63-K
DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
ISO160-F
DN160CF (8.00" OD)
ISO160-F
DN160CF (8.00" OD)
ISO200-F
DN200CF (10.00" OD)
ISO200-F
DN200CF (10.00" OD)
ISO250-F
Weight Lbs (kg) 11.0 ( 5.00 ) 12.1 ( 5.50 ) 23.1 ( 10.5 ) 19.8 ( 9.00 ) 22.0 ( 10.0 ) 59.4 ( 27.0 ) 61.6 ( 28.0 ) 66.0 ( 30.0 )
Technology Dry
Dry
Dry
Dry
Dry
Dry
Dry
Dry
Dry


Got VacuCADSM?
VacuCAD is a free library containing thousands of 2D CAD drawings (in DXF format) and 3D Models (in STP format) for many of our standard vacuum components and chambers. Please Log in

Ordering Table

(Click column headers to sort data)

Accessories Pump
Model
Description
Inlet
Flange
Foreline
Flange
Manual Part
Number
Price Add To Cart
Accessories Pump
Model
Description
Inlet
Flange
Foreline
Flange
Manual Part
Number
Price Add To Cart
EBT70F
Incl: Pump, Integrated Controller, 3 m Cable, and Inlet Screen
ISO63-K
KF16
--
EBT70FRNB-PKG
P.O.R.
EBT70F
Incl: Pump, Integrated Controller, Fan, 3 m Cable, and Inlet Screen
ISO63-K
KF16
--
EBT70FRAB-PKG
P.O.R.
EBT70F
Incl: Pump, Integrated Controller, 3 m Cable, and Inlet Screen
DN63CF (4.50" OD)
KF16
--
EBT70FCNB-PKG
P.O.R.
EBT70F
Incl: Pump, Integrated Controller, Fan, 3 m Cable, and Inlet Screen
DN63CF (4.50" OD)
KF16
--
EBT70FCAB-PKG
P.O.R.
EBT70F
Incl: Pump, ETC46 Controller, 3 m Cable, and Inlet Screen
ISO63-K
KF16
Download PDF
EBT70FRNB-20-PKG
P.O.R.
EBT70F
Incl: Pump, ETC46 Controller, Fan, 3 m Cable, and Inlet Screen
ISO63-K
KF16
Download PDF
EBT70FRAB-20-PKG
P.O.R.
EBT70F
Incl: Pump, ETC46 Controller 3 m Cable, and Inlet Screen
DN63CF (4.50" OD)
KF16
Download PDF
EBT70FCNB-20-PKG
P.O.R.
EBT70F
Incl: Pump, ETC46 Controller, Fan, 3 m Cable, and Inlet Screen
DN63CF (4.50" OD)
KF16
Download PDF
EBT70FCAB-20-PKG
P.O.R.
EBT220F
Incl: Pump, ETC223 Controller, Fan, 3 m Cable, and Inlet Screen
ISO100-K
KF25
--
EBT220FRAB-PKG
P.O.R.
EBT220F
Incl: Pump, ETC223 Controller, Fan, 3 m Cable, and Inlet Screen
DN100CF (6.00" OD)
KF25
--
EBT220FCAB-PKG
P.O.R.
EBT240F
Incl: Pump, Integrated Controller, Fan, 3 m Cable, and Inlet Screen
DN100CF (6.00" OD)
KF25
--
EBT240FCAB-PKG
P.O.R.
EBT240F
Incl: Pump, ETC246 Controller, Fan, 3 m Cable, and Inlet Screen
DN100CF (6.00" OD)
KF25
--
EBT240FCAB-20-PKG
P.O.R.
EBT240F
Incl: Pump, Integrated Controller, Fan, 3 m Cable, and Inlet Screen
ISO100-K
KF25
--
EBT240FRAB-PKG
P.O.R.
EBT240F
Incl: Pump, ETC246 Controller, Fan, 3 m Cable, and Inlet Screen
ISO100-K
KF25
--
EBT240FRAB-20-PKG
P.O.R.
EBT350F
Incl: Pump, ETC353 Controller, Fan, 3 m Cable, and Inlet Screen
ISO100-K
KF25
--
EBT350FRAB-PKG
P.O.R.
EBT350F
Incl: Pump, ETC353 Controller, Fan, 3 m Cable, and Inlet Screen
DN100CF (6.00" OD)
KF25
--
EBT350FCAB-PKG
P.O.R.
EBT450F
Incl: Pump, ETC353 Controller, Fan, 3 m Cable, and Inlet Screen
ISO160-F
KF25
--
EBT450FBAB-PKG
P.O.R.
EBT450F
Incl: Pump, ETC353 Controller, Fan, 3 m Cable, and Inlet Screen
DN160CF (8.00" OD)
KF25
--
EBT450FCAB-PKG
P.O.R.
EBT800F
Incl: Pump, ETC1104 Controller, Fan, 3 m Cable, and Inlet Screen
ISO160-F
KF40
Download PDF
EBT800FBAB-PKG
P.O.R.
EBT800F
Incl: Pump, ETC1104 Controller, Fan, 3 m Cable, and Inlet Screen
DN160CF (8.00" OD)
KF40
Download PDF
EBT800FCAB-PKG
P.O.R.
EBT1100F
Incl: Pump, ETC1104 Controller, Fan, 3 m Cable, and Inlet Screen
ISO200-F
KF40
Download PDF
EBT1100FBAB-PKG
P.O.R.
EBT1100F
Incl: Pump, ETC1104 Controller, Fan, 3 m Cable, and Inlet Screen
DN200CF (10.00" OD)
KF40
Download PDF
EBT1100FCAB-PKG
P.O.R.
EBT1400F
Incl: Pump, ETC1103 Controller, Fan, 3 m Cable, and Inlet Screen
ISO200-F
KF40
Download PDF
EBT1400FBAB-PKG
P.O.R.
EBT1400F
Incl: Pump, ETC1103 Controller, Fan, 3 m Cable, and Inlet Screen
DN200CF (10.00" OD)
KF40
Download PDF
EBT1400FCAB-PKG
P.O.R.
EBT2400F
Incl: Pump, ETC2403 Controller, Fan, 3 m Cable, and Inlet Screen
ISO250-F
KF40
Download PDF
EBT2400FBAB-PKG
P.O.R.

Can't Find The Pump You're Looking For? Let our new Pump Selection Guide help! With over 450 vacuum pumps to choose from, the KJLC® Vacuum Pump Selection Guide is designed to help you find one that meets your vacuum requirements. You can narrow down our pump offering by simply choosing from a list of different search criteria. For more information please e-mail international@lesker.com.

Accessories Table

For Pump Model(s) Description PartNo Price Add
To Cart
For Pump Model(s) Description PartNo Price Add
To Cart
EBT450, EBT800
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
EBT1100 , EBT1400
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
EBT70
Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN63CF-HDKIT
P.O.R.
EBT220, EBT240, EBT350
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
EBT450, EBT800
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
EBT450, EBT800
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
EBT1100 , EBT1400
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
EBT2400
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF250F-HDKIT
P.O.R.
EBT220, EBT240, EBT350
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring
QF100K-HDKIT
P.O.R.
EBT70
Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring
QF16-HDKIT
P.O.R.
EBT220, EBT240, EBT350, EBT450
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
EBT1100 , EBT1400, EBT2400, EBT800
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
EBT70
Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring
QF63K-HDKIT
P.O.R.