Representative Image

Ebara Model EBT Turbomolecular Pumps

Features

Rugged bearing design ideal for mobile applications
High pumping speeds
High compression ratios for light gases
Fast starts and stops
Quick venting (no vent pulsing)
Fan or water cooling
ISO or Conflat (CF) flanges
Integrated controller (select models)

Applications

Surface treatment
Analytical instrument lamps
Electron/ X-ray tubes
Ion/ EB-source
Water bonding
Sputter
Glass/ film coating
Exhaust carts

Specifications Table

Pump Model	EBT70	EBT220	EBT240	EBT350	EBT450	EBT800	EBT1100	EBT1400	EBT2400
Pumping Speeds	N2: 75.0 L/s H2: 45.0 L/s	N2: 220 L/s H2: 100 L/s	N2: 240 L/s H2: 160 L/s	N2: 330 L/s H2: 210 L/s	N2: 450 L/s H2: 240 L/s	N2: 820 L/s H2: 650 L/s	N2: 1100 L/s H2: 720 L/s	N2: 1400 L/s H2: 750 L/s
Max Gas Throughput	Ar: 5.00 mbarL/s N2:* 10.0 mbar*L/s	Ar: 400 mbarL/s N2:* 400 mbar*L/s	Ar: 50.0 mbarL/s N2:* 70.0 mbar*L/s	Ar: 250 mbarL/s N2:* 500 mbar*L/s	Ar: 250 mbarL/s N2:* 500 mbar*L/s	Ar: 300 mbarL/s N2:* 330 mbar*L/s	Ar: 300 mbarL/s N2:* 330 mbar*L/s	Ar: 250 mbarL/s N2:* 450 mbar*L/s
Ultimate Pressure	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 mbar 7.50 x 10^-9 Torr
Foreline Flange	KF16	KF25	KF25	KF25	KF25	KF40	KF40	KF40	KF40
Inlet Flange	DN63CF (4.50" OD) ISO63-K	DN100CF (6.00" OD) ISO100-K	DN100CF (6.00" OD) ISO100-K	DN100CF (6.00" OD) ISO100-K	ISO160-F DN160CF (8.00" OD)	ISO160-F DN160CF (8.00" OD)	ISO200-F DN200CF (10.00" OD)	ISO200-F DN200CF (10.00" OD)	ISO250-F
Weight Lbs (kg)	11.0 ( 5.00 )	12.1 ( 5.50 )	23.1 ( 10.5 )	19.8 ( 9.00 )	22.0 ( 10.0 )	59.4 ( 27.0 )	61.6 ( 28.0 )	66.0 ( 30.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage

X CLOSE

Ebara Model EBT Turbomolecular Pumps Pump Packages
Ebara Model EBT Turbomolecular Pumps Individual Pumps

Introducing Our Comprehensive Pump Packages

Ebara Model EBT Turbomolecular Pumps Pump Packages

We're excited to unveil our all-inclusive pump packages. With our pump packages, you can say goodbye to the hassle of searching for compatible parts. These thoughtfully curated packages contain all the essential parts, from power supplies and cables to valves and fans, ensuring a seamless setup process. See below to find the perfect solution for your needs.

For those who prefer the individual components, we still offer standalone vacuum pumps, conveniently accessible through the Ebara Model EBT Turbomolecular Pumps Individual Pumps tab.

For those who prefer the individual components, we still offer standalone vacuum pumps, conveniently accessible through the Ebara Model EBT Turbomolecular Pumps Individual Pumps tab located below.

For any further inquiries or assistance, our dedicated customer support team is here to help. Please click here and let us guide you towards the perfect solution.

Pump Package Ordering Table

X CLOSE

Pump Model	Package Includes	Description	Part Number	Price	In Stock	Add To Cart
Pump Model	Package Includes	Description	Part Number	Price	In Stock	Add To Cart
EBT220	Ebara EBT220 Pump Package includes: EBT220 with ISO100-K Inlet Flange Turbo Pump (EBT220FRAB), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	Ebara EBT220 Pump Package, includes: EBT220 with ISO100-K Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115 VDC	EBT220FRAB-PKG	$7,109.00
EBT220	Ebara EBT220 Pump Package includes: EBT220 with DN100CF Inlet Flange Turbo Pump (EBT220FCAB), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	Ebara EBT220 Pump Package, includes: EBT220 with DN100CF Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115 VDC	EBT220FCAB-PKG	$7,541.00
EBT350	Ebara EBT350 Pump Package includes: EBT350 with ISO100-K Inlet Flange Turbo Pump (EBT350FRAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	Ebara EBT350 Pump Package, includes: EBT350 with ISO100-K Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen	EBT350FRAB-PKG	$8,405.00
EBT350	Ebara EBT350 Pump Package includes: EBT350 with DN100CF Inlet Flange Turbo Pump (EBT350FCAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	Ebara EBT350 Pump Package, includes: EBT350 with DN100CF Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen	EBT350FCAB-PKG	$8,837.00
EBT450	Ebara EBT450 Pump Package includes: EBT450 with ISO160-F Inlet Flange Turbo Pump (EBT450FBAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	Ebara EBT450 Pump Package, includes: EBT450 with ISO160-F Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115 VDC	EBT450FBAB-PKG	$8,945.00
EBT450	Ebara EBT450 Pump Package includes: EBT450 with DN160CF Inlet Flange Turbo Pump (EBT450FCAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	Ebara EBT450 Pump Package, includes: EBT450 with DN160CF Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115 VDC	EBT450FCAB-PKG	$9,377.00
EBT70	Ebara EBT70 Pump Package includes: EBT70 with ISO63 Inlet Flange Turbo Pump (EBT70FRAB-20), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	Ebara EBT70 Pump Package, includes: EBT70 with ISO63 Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115 VDC	EBT70FRAB-20-PKG	$6,137.00
EBT70	Ebara EBT70 Pump Package includes: EBT70 with DN63CF Inlet Flange Turbo Pump (EBT70FCAB-20), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	Ebara EBT70 Pump Package, includes: EBT70 with DN63CF Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115 VDC	EBT70FCAB-20-PKG	$6,569.00
EBT800	Ebara EBT800 Pump Package includes: EBT800 with ISO160-F Inlet Flange Turbo Pump (EBT800FBAB), Controller (ETC1104), Comms Cable (EBTCBL03M05M), Fan and Can Cable (EBTCBL03F05M), Inlet Screen, 115/230 VDC	Ebara EBT800 Pump Package, includes: EBT800 with ISO160-F Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115/230 VDC	EBT800FBAB-PKG	$11,429.00
EBT800	Ebara EBT800 Pump Package includes: EBT800 with DN160CF Inlet Flange Turbo Pump (EBT800FCAB), Controller (ETC1104), Comms Cable (EBTCBL03M05M), Fan and Can Cable (EBTCBL03F05M), Inlet Screen, 115/230 VDC	Ebara EBT800 Pump Package, includes: EBT800 with DN160CF Inlet Flange Turbo Pump , Controller, Comms Cable, Fan and Can Cable, Inlet Screen, 115/230 VDC	EBT800FCAB-PKG	$11,681.00

X CLOSE

Ordering Table

X CLOSE

Pump Model	Inlet Flange	Foreline Flange	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Foreline Flange	Description	Part Number	Price	In Stock	Add To Cart	Accessories
EBT1100	ISO200-F	KF40	EBARA EBT1100 Turbomolecular Pump, ISO200-F inlet flange, 1100 L/s, Forced Air Cooling	EBT1100FBAB	P.O.R.
EBT1100	DN200CF (10.00" OD)	KF40	TURBO PUMP,EBARA MODEL EBT1100, DN200CF(10.00" OD), 1100 L/S	EBT1100FCAB	P.O.R.
EBT1400	ISO200-F	KF40	EBARA EBT1400 Turbomolecular Pump, ISO200-F inlet flange, 1400 L/s, Forced Air Cooling	EBT1400FBAB	P.O.R.
EBT1400	DN200CF (10.00" OD)	KF40	EBARA EBT1400 Turbomolecular Pump, DN200CF (10.00" OD) inlet flange, 1400 L/s, Forced Air Cooling	EBT1400FCAB	P.O.R.
EBT220	DN100CF (6.00" OD)	KF25	—	EBT220FCAB	P.O.R.
EBT220	ISO100-K	KF25	—	EBT220FRAB	P.O.R.
EBT2400	ISO250-F	KF40	Ebara EBT2400 Turbomolecular Pump, DN250 ISO-F Inlet Flange, Air Cooled	EBT2400FBAB	P.O.R.
EBT240	DN100CF (6.00" OD)	KF25	—	EBT240FCAB	P.O.R.
EBT240	DN100CF (6.00" OD)	KF25	—	EBT240FCAB-20	P.O.R.
EBT240	ISO100-K	KF25	—	EBT240FRAB	P.O.R.
EBT240	ISO100-K	KF25	—	EBT240FRAB-20	P.O.R.
EBT350	DN100CF (6.00" OD)	KF25	EBARA EBT350 Turbomolecular Pump, DN100CF inlet flange, 330 L/s, Forced Air Cooling	EBT350FCAB	P.O.R.
EBT350	ISO100-K	KF25	EBARA EBT350 Turbomolecular Pump, ISO100-K inlet flange, 330 L/s, Forced Air Cooling	EBT350FRAB	P.O.R.
EBT450	ISO160-F	KF25	—	EBT450FBAB	P.O.R.
EBT450	DN160CF (8.00" OD)	KF25	—	EBT450FCAB	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCAB	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCAB-20	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCNB	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCNB-20	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRAB	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRAB-20	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRNB	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRNB-20	P.O.R.
EBT800	ISO160-F	KF40	TURBO PUMP, EBARA EBT800, ISO160-F, 820 L/S, CERAMIC BEARING, AIR COOLED	EBT800FBAB	$11,389.00
EBT800	DN160CF (8.00" OD)	KF40	TURBO PUMP,EBARA MODEL EBT800, DN160CF(8.00" OD), 820 L/S	EBT800FCAB	P.O.R.

CloseX

X CLOSE

Your Ultimate Vacuum Pump Selection Guide is Here!

Find your perfect pump with ease! Our NEW comprehensive Vacuum Pump Selection Guide allows you to cross-reference over 450 vacuum pumps, search various pump types based on multiple criteria, and offers both new and remanufactured options. Still can't find the vacuum pump you're looking, click here to contact us.