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Ebara Model EBT Turbomolecular Pumps

Features

Rugged bearing design ideal for mobile applications
High pumping speeds
High compression ratios for light gases
Fast starts and stops
Quick venting (no vent pulsing)
Fan or water cooling
ISO or Conflat (CF) flanges
Integrated controller (select models)

Applications

Surface treatment
Analytical instrument lamps
Electron/ X-ray tubes
Ion/ EB-source
Water bonding
Sputter
Glass/ film coating
Exhaust carts

Specifications Table

Pump Model	EBT70	EBT220	EBT240	EBT350	EBT450	EBT800	EBT1100	EBT1400	EBT2400
Pumping Speeds	N2: 75.0 L/s H2: 45.0 L/s	N2: 220 L/s H2: 100 L/s	N2: 240 L/s H2: 160 L/s	N2: 330 L/s H2: 210 L/s	N2: 450 L/s H2: 240 L/s	N2: 820 L/s H2: 650 L/s	N2: 1100 L/s H2: 720 L/s	N2: 1400 L/s H2: 750 L/s
Max Gas Throughput	Ar: 5.00 mbarL/s N2:* 10.0 mbar*L/s	Ar: 400 mbarL/s N2:* 400 mbar*L/s	Ar: 50.0 mbarL/s N2:* 70.0 mbar*L/s	Ar: 250 mbarL/s N2:* 500 mbar*L/s	Ar: 250 mbarL/s N2:* 500 mbar*L/s	Ar: 300 mbarL/s N2:* 330 mbar*L/s	Ar: 300 mbarL/s N2:* 330 mbar*L/s	Ar: 250 mbarL/s N2:* 450 mbar*L/s
Ultimate Pressure	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-7 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Foreline Flange	KF16	KF25	KF25	KF25	KF25	KF40	KF40	KF40	KF40
Inlet Flange	DN63CF (4.50" OD) ISO63-K	DN100CF (6.00" OD) ISO100-K	DN100CF (6.00" OD) ISO100-K	DN100CF (6.00" OD) ISO100-K	ISO160-F DN160CF (8.00" OD)	ISO160-F DN160CF (8.00" OD)	ISO200-F DN200CF (10.00" OD)	ISO200-F DN200CF (10.00" OD)	ISO250-F
Weight Lbs (kg)	11.0 ( 5.00 )	12.1 ( 5.50 )	23.1 ( 10.5 )	19.8 ( 9.00 )	22.0 ( 10.0 )	59.4 ( 27.0 )	61.6 ( 28.0 )	66.0 ( 30.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
EBT1100	ISO200-F	KF40		PUMP PACKAGE, TURBO, EBARA EBT1100, DN200 ISO-F, INCLUDES: ETC1104 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT1100FBAB-PKG	$14,716.00
EBT1100	DN200CF (10.00" OD)	KF40		PUMP PACKAGE, TURBO, EBARA MODEL EBT1100, DN200CF (10.00" OD), 1100 L/S, PACKAGE TO INCLUDE: TURBO PUMP, MODEL 1100 RACK MOUNT CONTROLLER, AIR COOLING FAN, WATER COOLING PORTS, 3 METER CABLE, AND INLET SCREEN	EBT1100FCAB-PKG	$15,252.00
EBT1400	ISO200-F	KF40		PUMP PACKAGE, TURBO, EBARA EBT1400, DN200 ISO-F, INCLUDES: ETC1103 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT1400FBAB-PKG	$17,718.00
EBT1400	DN200CF (10.00" OD)	KF40		PUMP PACKAGE, TURBO, EBARA EBT1400, DN200CF, INCLUDES: ETC1103 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT1400FCAB-PKG	$18,120.00
EBT220	DN100CF (6.00" OD)	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT220, DN100CF, INCLUDES: ETC223 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT220FCAB-PKG	$7,885.00
EBT220	ISO100-K	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT220, DN100 ISO-K, INCLUDES: ETC223 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT220FRAB-PKG	$7,430.00
EBT2400	ISO250-F	KF40		PUMP PACKAGE, TURBO, EBARA EBT2400, DN250 ISO-F, INCLUDES: ETC2403 RACK MOUNT CONTROLLER, 3M CABLE AND INLET SCREEN	EBT2400FBAB-PKG	$21,092.00
EBT240	DN100CF (6.00" OD)	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT240, DN100CF, INCLUDES: ETC246 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT240FCAB-20-PKG	P.O.R.
EBT240	DN100CF (6.00" OD)	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT240, DN100CF, INCLUDES: INTEGRATED CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT240FCAB-PKG	$10,077.00
EBT240	ISO100-K	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT240, DN100 ISO-K, INCLUDES: ETC246 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT240FRAB-20-PKG	P.O.R.
EBT240	ISO100-K	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT240, DN100 ISO-K, INCLUDES: INTEGRATED CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT240FRAB-PKG	$9,373.00
EBT350	DN100CF (6.00" OD)	KF25	—	PUMP PACKAGE, TURBO, EBARA MODEL EBT350, CF100, 350 L/S, PACKAGE TO INCLUDE: TURBO PUMP, MODEL 1353 RACK MOUNT CONTROLLER, AIR COOLING FAN, 5 METER CABLE, AND INLET SCREEN	EBT350FCAB-PKG	$9,968.00
EBT350	ISO100-K	KF25	—	PUMP PACKAGE, TURBO, EBARA MODEL EBT350, ISO100K, 350 L/S, PACKAGE TO INCLUDE: TURBO PUMP, MODEL 353 RACK MOUNT CONTROLLER, AIR COOLING FAN, 5 METER CABLE, AND INLET SCREEN	EBT350FRAB-PKG	$9,371.00
EBT450	ISO160-F	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT450, DN160 ISO-F, INCLUDES: ETC353 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT450FBAB-PKG	$10,099.00
EBT450	DN160CF (8.00" OD)	KF25	—	PUMP PACKAGE, TURBO, EBARA EBT450, DN160CF, INCLUDES: ETC353 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT450FCAB-PKG	$10,577.00
EBT70	DN63CF (4.50" OD)	KF16		PUMP PACKAGE, TURBO, EBARA EBT70, DN63CF, INCLUDES: ETC76 CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT70FCAB-20-PKG	$8,035.00
EBT70	DN63CF (4.50" OD)	KF16	—	PUMP PACKAGE, TURBO, EBARA EBT70, DN63CF, INCLUDES: INTEGRATED CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT70FCAB-PKG	$6,504.00
EBT70	DN63CF (4.50" OD)	KF16		PUMP PACKAGE, TURBO, EBARA EBT70, DN63CF, INCLUDES: ETC76 CONTROLLER, 3M CABLE AND INLET SCREEN	EBT70FCNB-20-PKG	$7,935.00
EBT70	DN63CF (4.50" OD)	KF16	—	PUMP PACKAGE, TURBO, EBARA EBT70, DN63CF, INCLUDES: INTEGRATED CONTROLLER AND INLET SCREEN	EBT70FCNB-PKG	$6,504.00
EBT70	ISO63-K	KF16		PUMP PACKAGE, TURBO, EBARA EBT70, DN63 ISO-K, INCLUDES: ETC76 CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT70FRAB-20-PKG	$6,680.00
EBT70	ISO63-K	KF16	—	PUMP PACKAGE, TURBO, EBARA EBT70, DN63 ISO-K, INCLUDES: INTEGRATED CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT70FRAB-PKG	$5,810.00
EBT70	ISO63-K	KF16		PUMP PACKAGE, TURBO, EBARA EBT70, DN63 ISO-K, INCLUDES: ETC76 CONTROLLER, 3M CABLE AND INLET SCREEN	EBT70FRNB-20-PKG	$6,680.00
EBT70	ISO63-K	KF16	—	PUMP PACKAGE, TURBO, EBARA EBT70, DN63 ISO-K, INCLUDES: INTEGRATED CONTROLLER AND INLET SCREEN	EBT70FRNB-PKG	$5,810.00
EBT800	ISO160-F	KF40		PUMP PACKAGE, TURBO, EBARA EBT800, DN160 ISO-F, INCLUDES: ETC1104 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT800FBAB-PKG	$14,180.00
EBT800	DN160CF (8.00" OD)	KF40		PUMP PACKAGE, TURBO, EBARA EBT800, DN160CF, INCLUDES: ETC1104 RACK MOUNT CONTROLLER, FAN, 3M CABLE AND INLET SCREEN	EBT800FCAB-PKG	$14,716.00

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Accessories Table

Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT450, EBT800	CF Hardware Kit	DN160CF-HDKIT	$134.00
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT1100 , EBT1400	CF Hardware Kit	DN200CF-HDKIT	$144.35
Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT70	CF Hardware Kit	DN63CF-HDKIT	$80.40
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT220, EBT240, EBT350	CF Hardware Kit	DN100CF-HDKIT	$108.25
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT450, EBT800	ISO-F Hardware Kit	QF160F-HDKIT	$144.85
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT450, EBT800	ISO-F Hardware Kit	QF160F-HDKIT	$144.85
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT1100 , EBT1400	ISO-F Hardware Kit	QF200F-HDKIT	$181.45
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT2400	ISO-F Hardware Kit	QF250F-HDKIT	$208.75
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	EBT220, EBT240, EBT350	ISO-K Hardware Kit	QF100K-HDKIT	$316.50
Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring	EBT70	KF Hardware Kit	QF16-HDKIT	$15.45
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	EBT220, EBT240, EBT350, EBT450	KF Hardware Kit	QF25-HDKIT	$19.60
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	EBT1100 , EBT1400, EBT2400, EBT800	KF Hardware Kit	QF40-HDKIT	$26.05
Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring	EBT70	ISO-K Hardware Kit	QF63K-HDKIT	$177.85
KJLC 392 Package with DN35CF-DN40CF Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	All EBT Models	Gauge Package	KJLC392-CF-US	$1,700.00
KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	All EBT Models	Gauge Package	KJLC392-KF-US	$1,700.00
Mains Cable with Flying Leads for single phase pumps, 3m length	All EBT Models	Mains Cable	70010020305	P.O.R.
Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length	All EBT Models	Mains Cable	86221580	P.O.R.
Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length	All EBT Models	Mains Cable	86610100	P.O.R.

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