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EBT240 EBT350 EBT450 EBT70 EBT1100

Ebara Model EBT Turbomolecular Pumps

Features

  • Rugged bearing design ideal for mobile applications
  • High pumping speeds
  • High compression ratios for light gases
  • Fast starts and stops
  • Quick venting (no vent pulsing)
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)

Applications

  • Surface treatment
  • Analytical instrument lamps
  • Electron/ X-ray tubes
  • Ion/ EB-source
  • Water bonding
  • Sputter
  • Glass/ film coating
  • Exhaust carts

Product Brochure
For a download of the product brochure, click here.
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Contact Us
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Specifications Table

Pump Model EBT70 EBT220 EBT240 EBT350 EBT450 EBT800 EBT1100 EBT1400 EBT2400
Pumping Speeds
N2: 75.0 L/s
H2: 45.0 L/s
N2: 220 L/s
H2: 100 L/s
N2: 240 L/s
H2: 160 L/s
N2: 330 L/s
H2: 210 L/s
N2: 450 L/s
H2: 240 L/s
N2: 820 L/s
H2: 650 L/s
N2: 1100 L/s
H2: 720 L/s
N2: 1400 L/s
H2: 750 L/s
Max Gas Throughput Ar: 5.00 mbar*L/s
N2: 10.0 mbar*L/s
Ar: 400 mbar*L/s
N2: 400 mbar*L/s
Ar: 50.0 mbar*L/s
N2: 70.0 mbar*L/s
Ar: 250 mbar*L/s
N2: 500 mbar*L/s
Ar: 250 mbar*L/s
N2: 500 mbar*L/s
Ar: 300 mbar*L/s
N2: 330 mbar*L/s
Ar: 300 mbar*L/s
N2: 330 mbar*L/s
Ar: 250 mbar*L/s
N2: 450 mbar*L/s
Ultimate Pressure
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ConFlat Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ISO-K Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
ISO-K Flange
1.00 x 10-8 hPA
1.00 x 10-8 mbar
1.00 x 10-6 Pa
7.50 x 10-9 Torr
Foreline Flange KF16
KF25
KF25
KF25
KF25
KF40
KF40
KF40
KF40
Inlet Flange DN63CF (4.50" OD)
ISO63-K
DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
DN100CF (6.00" OD)
ISO100-K
ISO160-F
DN160CF (8.00" OD)
ISO160-F
DN160CF (8.00" OD)
ISO200-F
DN200CF (10.00" OD)
ISO200-F
DN200CF (10.00" OD)
ISO250-F
Weight Lbs (kg) 11.0 ( 5.00 ) 12.1 ( 5.50 ) 23.1 ( 10.5 ) 19.8 ( 9.00 ) 22.0 ( 10.0 ) 59.4 ( 27.0 ) 61.6 ( 28.0 ) 66.0 ( 30.0 )
Lubrication Type Dry
Dry
Dry
Dry
Dry
Dry
Dry
Dry
Dry
Technology Type Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
Turbo - Compound Drag Stage
X CLOSE

Accessories Table

Description For Pump Model(s) Accessory Type Part Number Price In Stock Add To Cart
Description For Pump Model(s) Accessory Type Part Number Price In Stock Add To Cart
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EBT450, EBT800
CF Hardware Kit
DN160CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EBT1100 , EBT1400
CF Hardware Kit
DN200CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EBT70
CF Hardware Kit
DN63CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EBT220, EBT240, EBT350
CF Hardware Kit
DN100CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EBT450, EBT800
ISO-F Hardware Kit
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EBT450, EBT800
ISO-F Hardware Kit
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EBT1100 , EBT1400
ISO-F Hardware Kit
QF200F-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EBT2400
ISO-F Hardware Kit
QF250F-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring EBT220, EBT240, EBT350
ISO-K Hardware Kit
QF100K-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring EBT70
KF Hardware Kit
QF16-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring EBT220, EBT240, EBT350, EBT450
KF Hardware Kit
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring EBT1100 , EBT1400, EBT2400, EBT800
KF Hardware Kit
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring EBT70
ISO-K Hardware Kit
QF63K-HDKIT
P.O.R.
Contact KJLC for Availability
KJLC 392 Package with DN35CF-DN40CF Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply All EBT Models
Gauge Package
KJLC392-CF-US
P.O.R.
Contact KJLC for Availability
KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply All EBT Models
Gauge Package
KJLC392-KF-US
P.O.R.
Contact KJLC for Availability
Mains Cable with Flying Leads for single phase pumps, 3m length All EBT Models
Mains Cable
70010020305
P.O.R.
In Stock
Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length All EBT Models
Mains Cable
86221580
P.O.R.
Contact KJLC for Availability
Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length All EBT Models
Mains Cable
86610100
P.O.R.
Contact KJLC for Availability
Contact Us - Ebara Model EBT Turbomolecular Pumps