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Ebara Model EBT Turbomolecular Pumps

Features

Rugged bearing design ideal for mobile applications
High pumping speeds
High compression ratios for light gases
Fast starts and stops
Quick venting (no vent pulsing)
Fan or water cooling
ISO or Conflat (CF) flanges
Integrated controller (select models)

Applications

Surface treatment
Analytical instrument lamps
Electron/ X-ray tubes
Ion/ EB-source
Water bonding
Sputter
Glass/ film coating
Exhaust carts

Specifications Table

Pump Model	EBT70	EBT220	EBT240	EBT350	EBT450	EBT800	EBT1100	EBT1400	EBT2400
Pumping Speeds	N2: 75.0 L/s H2: 45.0 L/s	N2: 220 L/s H2: 100 L/s	N2: 240 L/s H2: 160 L/s	N2: 330 L/s H2: 210 L/s	N2: 450 L/s H2: 240 L/s	N2: 820 L/s H2: 650 L/s	N2: 1100 L/s H2: 720 L/s	N2: 1400 L/s H2: 750 L/s
Max Gas Throughput	Ar: 5.00 mbarL/s N2:* 10.0 mbar*L/s	Ar: 400 mbarL/s N2:* 400 mbar*L/s	Ar: 50.0 mbarL/s N2:* 70.0 mbar*L/s	Ar: 250 mbarL/s N2:* 500 mbar*L/s	Ar: 250 mbarL/s N2:* 500 mbar*L/s	Ar: 300 mbarL/s N2:* 330 mbar*L/s	Ar: 300 mbarL/s N2:* 330 mbar*L/s	Ar: 250 mbarL/s N2:* 450 mbar*L/s
Ultimate Pressure	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-7 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-K Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ConFlat Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Foreline Flange	KF16	KF25		KF25	KF25	KF40
Inlet Flange	DN63CF (4.50" OD) ISO63-K	DN100CF (6.00" OD) ISO100-K		DN100CF (6.00" OD) ISO100-K	ISO160-F DN160CF (8.00" OD)	ISO160-F DN160CF (8.00" OD)
Weight Lbs (kg)	11.0 ( 5.00 )	12.1 ( 5.50 )		19.8 ( 9.00 )	22.0 ( 10.0 )	59.4 ( 27.0 )
Lubrication Type	Dry	Dry		Dry	Dry	Dry
Technology Type	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage		Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage

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Ebara Model EBT Turbomolecular Pumps Pump Packages
Ebara Model EBT Turbomolecular Pumps Individual Pumps

Introducing Our Comprehensive Pump Packages

Ebara Model EBT Turbomolecular Pumps Pump Packages

We're excited to unveil our all-inclusive pump packages. With our pump packages, you can say goodbye to the hassle of searching for compatible parts. These thoughtfully curated packages contain all the essential parts, from power supplies and cables to valves and fans, ensuring a seamless setup process. See below to find the perfect solution for your needs.

For those who prefer the individual components, we still offer standalone vacuum pumps, conveniently accessible through the Ebara Model EBT Turbomolecular Pumps Individual Pumps tab.

For those who prefer the individual components, we still offer standalone vacuum pumps, conveniently accessible through the Ebara Model EBT Turbomolecular Pumps Individual Pumps tab located below.

For any further inquiries or assistance, our dedicated customer support team is here to help. Please click here and let us guide you towards the perfect solution.

Pump Package Ordering Table

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Pump Model	Package Includes	Description	Part Number	Price	In Stock	Add To Cart
Pump Model	Package Includes	Description	Part Number	Price	In Stock	Add To Cart
EBT220	Ebara EBT220 Pump Package includes: EBT220 with ISO100-K Inlet Flange Turbo Pump (EBT220FRAB), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	EBARA EBT220 Turbomolecular Pump, ISO100-K inlet flange, 220 L/s, Forced Air Cooling	EBT220FRAB-PKG	P.O.R.
EBT220	Ebara EBT220 Pump Package includes: EBT220 with DN100CF Inlet Flange Turbo Pump (EBT220FCAB), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	EBARA EBT220 Turbomolecular Pump, DN100CF (6.00" OD) inlet flange, 220 L/s, Forced Air Cooling	EBT220FCAB-PKG	P.O.R.
EBT350	Ebara EBT350 Pump Package includes: EBT350 with ISO100-K Inlet Flange Turbo Pump (EBT350FRAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	EBARA EBT350 Turbomolecular Pump, ISO100-K inlet flange, 330 L/s, Forced Air Cooling	EBT350FRAB-PKG	$9,371.00
EBT350	Ebara EBT350 Pump Package includes: EBT350 with DN100CF Inlet Flange Turbo Pump (EBT350FCAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	EBARA EBT350 Turbomolecular Pump, DN100CF (6.00" OD) inlet flange, 330 L/s, Forced Air Cooling	EBT350FCAB-PKG	$9,752.00
EBT450	Ebara EBT450 Pump Package includes: EBT450 with ISO160-F Inlet Flange Turbo Pump (EBT450FBAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	EBARA EBT450 Turbomolecular Pump, ISO160-F inlet flange, 450 L/s, Forced Air Cooling	EBT450FBAB-PKG	P.O.R.
EBT450	Ebara EBT450 Pump Package includes: EBT450 with DN160CF Inlet Flange Turbo Pump (EBT450FCAB), Controller (ETC353), Comms Cable (EBTCBL02M05M), Fan and Can Cable (EBTCBL02F05M), Inlet Screen, 115 VDC	EBARA EBT450 Turbomolecular Pump, DN160CF (8.00" OD) inlet flange, 450 L/s, Forced Air Cooling	EBT450FCAB-PKG	P.O.R.
EBT70	Ebara EBT70 Pump Package includes: EBT70 with ISO63 Inlet Flange Turbo Pump (EBT70FRAB-20), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	EBARA EBT70 Turbomolecular Pump, ISO63-K inlet flange, 75 L/s, Forced Air Cooling	EBT70FRAB-20-PKG	P.O.R.
EBT70	Ebara EBT70 Pump Package includes: EBT70 with DN63CF Inlet Flange Turbo Pump (EBT70FCAB-20), Controller (ETC76), Comms Cable (EBTCBL01M05M), Fan and Can Cable (EBTCBL01F05M), Inlet Screen, 115 VDC	EBARA EBT70 Turbomolecular Pump, DN63CF (4.50" OD) inlet flange, 75 L/s, Forced Air Cooling	EBT70FCAB-20-PKG	P.O.R.
EBT800	Ebara EBT800 Pump Package includes: EBT800 with ISO160-F Inlet Flange Turbo Pump (EBT800FBAB), Controller (ETC1104), Comms Cable (EBTCBL03M05M), Fan and Can Cable (EBTCBL03F05M), Inlet Screen, 115/230 VDC	EBARA EBT800 Turbomolecular Pump, ISO160-F inlet flange, 820 L/s, Forced Air Cooling	EBT800FBAB-PKG	P.O.R.
EBT800	Ebara EBT800 Pump Package includes: EBT800 with DN160CF Inlet Flange Turbo Pump (EBT800FCAB), Controller (ETC1104), Comms Cable (EBTCBL03M05M), Fan and Can Cable (EBTCBL03F05M), Inlet Screen, 115/230 VDC	EBARA EBT800 Turbomolecular Pump, DN160CF (8.00" OD) inlet flange, 820 L/s, Forced Air Cooling	EBT800FCAB-PKG	$14,716.00

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Description	Part Number	Price	In Stock	Add To Cart
Pump Model	Inlet Flange	Foreline Flange	Description	Part Number	Price	In Stock	Add To Cart
EBT1100	ISO200-F	KF40	PUMP PACKAGE, TURBO, EBARA MODEL EBT1100, DN200 ISO−F, 1100 L/S, PACKAGE TO INCLUDE: TURBO PUMP, AIR COOLING FAN AND INLET SCREEN	EBT1100FBAB	P.O.R.
EBT1100	DN200CF (10.00" OD)	KF40	TURBO PUMP,EBARA MODEL EBT1100, DN200CF(10.00" OD), 1100 L/S	EBT1100FCAB	P.O.R.
EBT1400	ISO200-F	KF40	PUMP PACKAGE, TURBO, EBARA MODEL EBT1400, DN200 ISO-F, 1400 L/S, PACKAGE TO INCLUDE: TURBO PUMP, WATER COOLING PORTS AND INLET SCREEN	EBT1400FBAB	P.O.R.
EBT1400	DN200CF (10.00" OD)	KF40	PUMP, TURBO, EBARA MODEL EBT1400, DN200 CF (10.00" OD), 1400 L/S	EBT1400FCAB	P.O.R.
EBT220	DN100CF (6.00" OD)	KF25	—	EBT220FCAB	P.O.R.
EBT220	ISO100-K	KF25	—	EBT220FRAB	P.O.R.
EBT2400	ISO250-F	KF40	EBARA EBT2400 TURBOMOLECULAR PUMP, DN250 ISO-F INLET FLANGE, AIR COOLED	EBT2400FBAB	P.O.R.
EBT240	DN100CF (6.00" OD)	KF25	—	EBT240FCAB	P.O.R.
EBT240	DN100CF (6.00" OD)	KF25	—	EBT240FCAB-20	P.O.R.
EBT240	ISO100-K	KF25	—	EBT240FRAB	P.O.R.
EBT240	ISO100-K	KF25	—	EBT240FRAB-20	P.O.R.
EBT350	DN100CF (6.00" OD)	KF25	PUMP, TURBOMOLECULAR PUMP, EBARA EBT350F, DN100CF FLANGE, AIR COOLED, PUMP ONLY	EBT350FCAB	$8,064.00
EBT350	ISO100-K	KF25	TURBO PUMP, EBARA EBT350, ISO100-K, 350 L/S, CERAMIC BEARING, AIR COOLED	EBT350FRAB	P.O.R.
EBT450	ISO160-F	KF25	—	EBT450FBAB	P.O.R.
EBT450	DN160CF (8.00" OD)	KF25	—	EBT450FCAB	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCAB	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCAB-20	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCNB	P.O.R.
EBT70	DN63CF (4.50" OD)	KF16	—	EBT70FCNB-20	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRAB	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRAB-20	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRNB	P.O.R.
EBT70	ISO63-K	KF16	—	EBT70FRNB-20	P.O.R.
EBT800	ISO160-F	KF40	—	EBT800FBAB	P.O.R.
EBT800	DN160CF (8.00" OD)	KF40	TURBO PUMP,EBARA MODEL EBT800, DN160CF(8.00" OD), 820 L/S	EBT800FCAB	P.O.R.

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Accessories Table

Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT450, EBT800	CF Hardware Kit	DN160CF-HDKIT	$134.00
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT1100 , EBT1400	CF Hardware Kit	DN200CF-HDKIT	$144.35
Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT70	CF Hardware Kit	DN63CF-HDKIT	$80.40
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EBT220, EBT240, EBT350	CF Hardware Kit	DN100CF-HDKIT	$108.25
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT450, EBT800	ISO-F Hardware Kit	QF160F-HDKIT	$144.85
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT450, EBT800	ISO-F Hardware Kit	QF160F-HDKIT	$144.85
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT1100 , EBT1400	ISO-F Hardware Kit	QF200F-HDKIT	$181.45
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EBT2400	ISO-F Hardware Kit	QF250F-HDKIT	$208.75
Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	EBT220, EBT240, EBT350	ISO-K Hardware Kit	QF100K-HDKIT	$316.50
Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring	EBT70	KF Hardware Kit	QF16-HDKIT	$15.45
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	EBT220, EBT240, EBT350, EBT450	KF Hardware Kit	QF25-HDKIT	$19.60
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	EBT1100 , EBT1400, EBT2400, EBT800	KF Hardware Kit	QF40-HDKIT	$26.05
Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring	EBT70	ISO-K Hardware Kit	QF63K-HDKIT	$177.85
KJLC 392 Package with DN35CF-DN40CF Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	All EBT Models	Gauge Package	KJLC392-CF-US	$1,900.00
KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	All EBT Models	Gauge Package	KJLC392-KF-US	$1,900.00
Mains Cable with Flying Leads for single phase pumps, 3m length	All EBT Models	Mains Cable	70010020305	P.O.R.
Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length	All EBT Models	Mains Cable	86221580	P.O.R.
Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length	All EBT Models	Mains Cable	86610100	P.O.R.