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Ebara Model EMT Turbomolecular Pumps

Features

  • 5-Axis Magnetic Bearing
  • Temperature Controlled
  • Ultra Low Vibration
  • Corrosion-Resistant
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)

Applications

  • Etching
  • PECVD, PVD
  • Load Locks
  • Thin Films
  • TCO
  • Sputter
  • SEM
  • Analytical

Specifications Table

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Accessories Table

Description For Pump Model(s) Accessory Type Part Number Price In Stock Add To Cart
Description For Pump Model(s) Accessory Type Part Number Price In Stock Add To Cart
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EMT420/C, EMT900/C
CF Hardware Kit
DN160CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EMT1300/C
CF Hardware Kit
DN200CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EMT2400/C
CF Hardware Kit
DN250CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket EMT390/C
CF Hardware Kit
DN100CF-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EMT420/C, EMT900/C
ISO-F Hardware Kit
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EMT1300/C
ISO-F Hardware Kit
QF200F-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EMT2204MK/C, EMT2400/C
ISO-F Hardware Kit
QF250F-HDKIT
P.O.R.
Contact KJLC for Availability
Bolting Kit, For QF320 (ISO320-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring EMT3304/C
ISO-F Hardware Kit
QF320F-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring EMT390/C, EMT420/C
KF Hardware Kit
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring EMT1300/C, EMT2204MK/C, EMT2400/C, EMT3304/C, EMT900/C
KF Hardware Kit
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
Clamping Kit, For QF50 Flange, Including Aluminum Clamp and FKM Centering Ring EMT2204MK/C
KF Hardware Kit
QF50-HDKIT
P.O.R.
Contact KJLC for Availability
KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply All EMT Models
Gauge Package
KJLC392-KF-US
P.O.R.
Contact KJLC for Availability
Mains Cable with Flying Leads for single phase pumps, 3m length All EMT Models
Mains Cable
70010020305
P.O.R.
In Stock
Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length All EMT Models
Mains Cable
86221580
P.O.R.
Contact KJLC for Availability
Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length All EMT Models
Mains Cable
86610100
P.O.R.
Contact KJLC for Availability
Contact Us - Ebara Model EMT Turbomolecular Pumps