Ebara Model EMT Turbomolecular Pumps

Features

5-Axis Magnetic Bearing
Temperature Controlled
Ultra Low Vibration
Corrosion-Resistant
Fan or water cooling
ISO or Conflat (CF) flanges
Integrated controller (select models)

Applications

Etching
PECVD, PVD
Load Locks
Thin Films
TCO
Sputter
SEM
Analytical

Specifications Table

EMT390 - EMT2400 Pumps
Integrated Controller Turbo Pumps

Pump Model	EMT390/C	EMT420/C	EMT900/C	EMT1300/C	EMT2400/C
Pumping Speeds	N2: 340 L/s H2: 290 L/s	N2: 400 L/s H2: 300 L/s	N2: 900 L/s H2: 1050 L/s	N2: 1300 L/s H2: 1200 L/s	N2: 2400 L/s H2: 2100 L/s
Max Gas Throughput	Ar: 700 mbarL/s N2:* 2000 mbar*L/s	Ar: 700 mbarL/s N2:* 2000 mbar*L/s	Ar: 1500 mbarL/s N2:* 3000 mbar*L/s	Ar: 1500 mbarL/s N2:* 3000 mbar*L/s	Ar: 2000 mbarL/s N2:* 3000 mbar*L/s
Ultimate Pressure	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Max Foreline Pressure	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr	5.05 hPA 5.05 mbar 506 Pa 3.80 Torr	5.05 hPA 5.05 mbar 506 Pa 3.80 Torr	2.00 hPA 2.00 mbar 199 Pa 1.50 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	NW25	NW25	NW40	NW40	NW40
Inlet Flange	ISO100-F	ISO160-F	ISO160-F	ISO200-F	ISO250-F
Weight Lbs (kg)	81.4 ( 37.0 )	37.4 ( 17.0 )	92.4 ( 42.0 )	92.4 ( 42.0 )	118 ( 54.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Pump Model	EMT2204MK/C	EMT3304/C
Pumping Speeds	N2: 2200 L/s H2: 1800 L/s	N2: 3200 L/s H2: 2700 L/s
Max Gas Throughput	Ar: 2600 mbarL/s N2:* 3000 mbar*L/s	N2: 3680 mbar*L/s
Ultimate Pressure	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Max Foreline Pressure	9.98 x 10^-1 hPA 9.98 x 10^-1 mbar 100.0 Pa 7.50 x 10^-1 Torr	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water
Foreline Flange	NW40/NW50	NW40
Inlet Flange	ISO250-F	ISO320-F
Weight Lbs (kg)	136 ( 62.0 )	211 ( 96.0 )
Lubrication Type	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Ordering Table

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Pump Model	Inlet Flange	Foreline Flange	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Foreline Flange	Description	Part Number	Price	In Stock	Add To Cart	Accessories
EMT1300/C	ISO200-F	NW40	TURBO PUMP, MAGNETICALLY LEVITATED EBARA 1300 L/S TURBO, ISO200F INLET FLANGE, AIR COOLED, WITH CONTROLLER, MAINS CABLE, AND FAN	EMT1300MBAB-PKG	P.O.R.
EMT2204MK/C	ISO250-F	NW40/NW50	TURBO PUMP, EMT2204MK, ISO-250F, WATER COOLED, MAG LEV, INT CNTRL, 2000 L/S	EMT2204MKBWB	P.O.R.
EMT2400/C	ISO250-F	NW40	TURBO PUMP, MAGNETICALLY LEVITATED EBARA 2400 L/S TURBO, ISO250F INLET FLANGE, AIR COOLED, WITH ETC010MA CONTROLLER, EMTCBL010M05M CABLE	EMT2400MBAB-PKG	P.O.R.
EMT3304/C	ISO320-F	NW40	TURBO PUMP, EMT3304MK, ISO-320F, WATER COOLED, MAG LEV, INT CNTRL, 3300 L/S	EMT3304MKBWB-PKG	$33,035.00
EMT390/C	ISO100-F	NW25	TURBO PUMP, MAGNETICALLY LEVITATED EBARA 390 L/S TURBO, ISO100F INLET FLANGE, AIR COOLED, WITH CONTROLLER, MAINS CABLE, AND FAN	EMT390MBAB-PKG	P.O.R.
EMT420/C	ISO160-F	NW25	TURBO PUMP, MAGNETICALLY LEVITATED EBARA 420 L/S TURBO, ISO160F INLET FLANGE, AIR COOLED, WITH CONTROLLER, MAINS CABLE, AND FAN	EMT420MBAB-PKG	P.O.R.
EMT900/C	ISO160-F	NW40	TURBO PUMP, MAGNETICALLY LEVITATED EBARA 900 L/S TURBO, ISO160F INLET FLANGE, AIR COOLED, WITH CONTROLLER, MAINS CABLE, AND FAN	EMT900MBAB-PKG	P.O.R.

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Accessories Table

Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Description	For Pump Model(s)	Accessory Type	Part Number	Price	In Stock	Add To Cart
Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EMT420/C, EMT900/C	CF Hardware Kit	DN160CF-HDKIT	$134.00
Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EMT1300/C	CF Hardware Kit	DN200CF-HDKIT	$144.35
Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EMT2400/C	CF Hardware Kit	DN250CF-HDKIT	$149.50
Bolting Kit, For DN320CF (16.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket		CF Hardware Kit	DN320CF-HDKIT	P.O.R.
Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	EMT390/C	CF Hardware Kit	DN100CF-HDKIT	$108.25
Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EMT420/C, EMT900/C	ISO-F Hardware Kit	QF160F-HDKIT	$144.85
Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EMT1300/C	ISO-F Hardware Kit	QF200F-HDKIT	$181.45
Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EMT2204MK/C, EMT2400/C	ISO-F Hardware Kit	QF250F-HDKIT	$208.75
Bolting Kit, For QF320 (ISO320-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring	EMT3304/C	ISO-F Hardware Kit	QF320F-HDKIT	$546.40
Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	EMT390/C, EMT420/C	KF Hardware Kit	QF25-HDKIT	$19.60
Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring	EMT1300/C, EMT2204MK/C, EMT2400/C, EMT3304/C, EMT900/C	KF Hardware Kit	QF40-HDKIT	$26.05
Clamping Kit, For QF50 Flange, Including Aluminum Clamp and FKM Centering Ring	EMT2204MK/C	KF Hardware Kit	QF50-HDKIT	$35.55
KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply	All EMT Models	Gauge Package	KJLC392-KF-US	$1,700.00
Mains Cable with Flying Leads for single phase pumps, 3m length	All EMT Models	Mains Cable	70010020305	P.O.R.
Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length	All EMT Models	Mains Cable	86221580	P.O.R.
Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length	All EMT Models	Mains Cable	86610100	P.O.R.

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