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Your Ultimate Vacuum Pump Selection Guide is Here!

Find your perfect pump with ease! Our NEW comprehensive guide allows you to cross-reference over 450 vacuum pumps, search various pump types based on multiple criteria, and offers both new and remanufactured options.

Ebara Model EMT Turbomolecular Pumps

Features

5-Axis Magnetic Bearing
Temperature Controlled
Ultra Low Vibration
Corrosion-Resistant
Fan or water cooling
ISO or Conflat (CF) flanges
Integrated controller (select models)

Applications

Etching
PECVD, PVD
Load Locks
Thin Films
TCO
Sputter
SEM
Analytical

Specifications Table

EMT390 - EMT2400 Pumps
Integrated Controller Turbo Pumps

Pump Model	EMT390/C	EMT420/C	EMT900/C	EMT1300/C	EMT2400/C
Pumping Speeds	N2: 340 L/s H2: 290 L/s	N2: 400 L/s H2: 300 L/s	N2: 900 L/s H2: 1050 L/s	N2: 1300 L/s H2: 1200 L/s	N2: 2400 L/s H2: 2100 L/s
Max Gas Throughput	Ar: 700 mbarL/s N2:* 2000 mbar*L/s	Ar: 700 mbarL/s N2:* 2000 mbar*L/s	Ar: 1500 mbarL/s N2:* 3000 mbar*L/s	Ar: 1500 mbarL/s N2:* 3000 mbar*L/s	Ar: 2000 mbarL/s N2:* 3000 mbar*L/s
Ultimate Pressure	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Max Foreline Pressure	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr 3.99 hPA 3.99 mbar 399 Pa 3.00 Torr	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr 3.99 hPA 3.99 mbar 399 Pa 3.00 Torr	5.05 hPA 5.05 mbar 506 Pa 3.80 Torr 5.05 hPA 5.05 mbar 506 Pa 3.80 Torr	5.05 hPA 5.05 mbar 506 Pa 3.80 Torr 5.05 hPA 5.05 mbar 506 Pa 3.80 Torr	2.00 hPA 2.00 mbar 199 Pa 1.50 Torr 2.00 hPA 2.00 mbar 199 Pa 1.50 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	NW25	NW25	NW40	NW40	NW40
Inlet Flange	ISO100-F	ISO160-F	ISO160-F	ISO200-F	ISO250-F
Weight Lbs (kg)	81.4 ( 37.0 )	37.4 ( 17.0 )	92.4 ( 42.0 )	92.4 ( 42.0 )	118 ( 54.0 )
Lubrication Type	Dry	Dry	Dry	Dry	Dry
Technology Type	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated	Turbo - Magnetically Levitated

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Pump Model	EMT2204MK/C	EMT3304/C
Pumping Speeds	N2: 2200 L/s H2: 1800 L/s	N2: 3200 L/s H2: 2700 L/s
Max Gas Throughput	Ar: 2600 mbarL/s N2:* 3000 mbar*L/s	N2: 3680 mbar*L/s
Ultimate Pressure	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr	ISO-F Flange 1.00 x 10^-8 hPA 1.00 x 10^-8 mbar 1.00 x 10^-6 Pa 7.50 x 10^-9 Torr
Max Foreline Pressure	9.98 x 10^-1 hPA 9.98 x 10^-1 mbar 100.0 Pa 7.50 x 10^-1 Torr	3.99 hPA 3.99 mbar 399 Pa 3.00 Torr 3.99 hPA 3.99 mbar 399 Pa 3.00 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water
Foreline Flange		NW40
Inlet Flange		ISO320-F
Weight Lbs (kg)		211 ( 96.0 )
Lubrication Type		Dry
Technology Type		Turbo - Magnetically Levitated

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