Close

Please select your country or region to be
directed to the appropriate Lesker site.

Ebara Model EMT Turbomolecular Pumps

Features

  • 5-Axis Magnetic Bearing
  • Temperature Controlled
  • Ultra Low Vibration
  • Corrosion-Resistant
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)

Applications

  • Etching
  • PECVD, PVD
  • Load Locks
  • Thin Films
  • TCO
  • Sputter
  • SEM
  • Analytical

Specifications Table

Vacuum Pump Repair
& Services
World class service center for scheduled maintenance, evaluation, and vacuum pump repair.
Request a Service Quote
Request a Pump RMA
Remanufactured Vacuum
Pumps
Click here to view a list of remanufactured vacuum pumps available from The KJLC's Remanufactured Vacuum Pump Division.
Pumps FAQ
Click here for answers to some of the most common questions we are asked.
Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.

Accessories Table

For Pump Model(s) Description Accessory Type Part Number Price In Stock Add To Cart
For Pump Model(s) Description Accessory Type Part Number Price In Stock Add To Cart
EMT420/C, EMT900/C Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
CF Hardware Kit
DN160CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT1300/C Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
CF Hardware Kit
DN200CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT2400/C Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
CF Hardware Kit
DN250CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT390/C Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
CF Hardware Kit
DN100CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT420/C, EMT900/C Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
ISO-F Hardware Kit
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT1300/C Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
ISO-F Hardware Kit
QF200F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT2204MK/C, EMT2400/C Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
ISO-F Hardware Kit
QF250F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT3304/C Bolting Kit, For QF320 (ISO320-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
ISO-F Hardware Kit
QF320F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT390/C, EMT420/C Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
KF Hardware Kit
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
EMT1300/C, EMT2204MK/C, EMT2400/C, EMT3304/C, EMT900/C Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
KF Hardware Kit
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
EMT2204MK/C Clamping Kit, For QF50 Flange, Including Aluminum Clamp and FKM Centering Ring
KF Hardware Kit
QF50-HDKIT
P.O.R.
Contact KJLC for Availability
All EMT Models KJLC 392 Package with KF40 Flanges, including KJLC 392, 2x Convection Gauges, 10 ft. Interconnector Cables, & US Power Supply
Gauge Package
KJLC392-KF-US
P.O.R.
Contact KJLC for Availability
All EMT Models Mains Cable with Flying Leads for single phase pumps, 3m length
Mains Cable
70010020305
P.O.R.
In Stock
All EMT Models Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length
Mains Cable
86221580
P.O.R.
Contact KJLC for Availability
All EMT Models Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length
Mains Cable
86610100
P.O.R.
Contact KJLC for Availability
Contact Us - Ebara Model EMT Turbomolecular Pumps