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Ebara Model EMT Turbomolecular Pumps

Features

  • 5-Axis Magnetic Bearing
  • Temperature Controlled
  • Ultra Low Vibration
  • Corrosion-Resistant
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)

Applications

  • Etching
  • PECVD, PVD
  • Load Locks
  • Thin Films
  • TCO
  • Sputter
  • SEM
  • Analytical

Specifications Table

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Accessories Table

For Pump Model(s) Description Part Number Price In Stock Add To Cart
For Pump Model(s) Description Part Number Price In Stock Add To Cart
EMT420/C, EMT900/C Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN160CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT1300/C Bolting Kit, For DN200CF (10.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN200CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT2400/C Bolting Kit, For DN250CF (12.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN250CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT390/C Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
DN100CF-HDKIT
P.O.R.
Contact KJLC for Availability
EMT420/C, EMT900/C Bolting Kit, For QF160 (ISO160-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF160F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT1300/C Bolting Kit, For QF200 (ISO200-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF200F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT2204MK/C, EMT2400/C Bolting Kit, For QF250 (ISO250-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF250F-HDKIT
P.O.R.
Contact KJLC for Availability
EMT3304/C Bolting Kit, For QF320 (ISO320-F) Flange, Including Bolt, Nut, and Washer Set and FKM Centering Ring
QF320F-HDKIT
P.O.R.
Contact KJLC for Availability
All EMT Models Cable, C13 Connector to Flying Leads, 3 meters, 10 Amps
70010020305
P.O.R.
Contact KJLC for Availability
All EMT Models Cable, C13 Connector to NEMA 5-15 Plug, 3 meters, 10 Amps
86221580
P.O.R.
Contact KJLC for Availability
All EMT Models Cable, C13 Connector to NEMA 6-15 Plug, 3 meters, 10 Amps
86610100
P.O.R.
Contact KJLC for Availability
EMT390/C, EMT420/C Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring
QF25-HDKIT
P.O.R.
Contact KJLC for Availability
EMT1300/C, EMT2204MK/C, EMT2400/C, EMT3304/C, EMT900/C Clamping Kit, For QF40 Flange, Including Aluminum Clamp and FKM Centering Ring
QF40-HDKIT
P.O.R.
Contact KJLC for Availability
EMT2204MK/C Clamping Kit, For QF50 Flange, Including Aluminum Clamp and FKM Centering Ring
QF50-HDKIT
P.O.R.
Contact KJLC for Availability
Contact Us - Ebara Model EMT Turbomolecular Pumps