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Ebara Model EMT Turbomolecular Pumps


  • 5-Axis Magnetic Bearing
  • Temperature Controlled
  • Ultra Low Vibration
  • Corrosion-Resistant
  • Fan or water cooling
  • ISO or Conflat (CF) flanges
  • Integrated controller (select models)


  • Etching
  • Load Locks
  • Thin Films
  • TCO
  • Sputter
  • SEM
  • Analytical

Specifications Table

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