TurboVac SL 80 Features:
- High pressure foreline tolerance
- Installation in any orientation
Specifications Table
Pump Model | TurboVac SL80 |
---|---|
Pumping Speeds |
N2: 65.0 L/s
He: 55.0 L/s H2: 49.0 L/s Ar: 60.0 L/s |
Max Gas Throughput |
N2: 2.00 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
2.00 x 10-10 hPA 2.00 x 10-10 mbar 2.00 x 10-8 Pa 1.50 x 10-10 Torr |
Max Foreline Pressure |
20.0 hPA 20.0 mbar 1999 Pa 15.0 Torr |
Foreline Flange | KF16 |
Inlet Flange | DN63CF (4.50" OD) |
Weight Lbs (kg) | 6.82 ( 3.10 ) |
Lubrication Type | Dry |
Technology Type | Turbo - Single Stage |
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