Features
Performance
- Industry-leading pumping speed especially for light gases (up to 60% higher than existing products)
- Optimized rotor diameter for ISO 63, 100, 160 flanges to provide maximum pumping performance
Flexibility
- Vacuum port design flexibility; rotatable fore-vacuum port
- Interstage port options
- Variable rotor and drag stage configurations for perfect match to application requirements
Installation and operation
- Integrated 24/48V DC drive electronics to avoid expensive cabling
- Thermal isolation for optimized cooling of bearing and improved pump lifetime
- Supported shaft to reduce vibration
- Maintenance free upper passive magnetic bearing
- Oil free, lifetime lubricated lower mechanical ceramic ball bearing, field replaceable
Turbovac i
- Fitted with one accessory port to control an air cooling unit, venting/purge valve, as well as a flange heater or other accessories.
- USB, RS485 and digital I/O connections.
- Additional interface options are available on demand.
Turbovac iX
- Fitted with three accessory ports to control air cooling units, venting/purge valves, as well as relay boxes for operation of a forevacuum pump, a flange heater or other accessories.
- Integrated vacuum system controller
- USB and Digital I/O interfaces
- An additional Anybus port that can be equipped with further interfaces
Videos
Specifications Table
Pump Model | TurboVac 90i | TurboVac 250i | TurboVac 350i | TurboVac 450i |
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Pumping Speeds |
N2: 90.0 L/s
He: 90.0 L/s H2: 78.0 L/s Ar: 83.0 L/s |
N2: 255 L/s
He: 250 L/s H2: 210 L/s Ar: 210 L/s |
N2: 290 L/s
He: 360 L/s H2: 320 L/s Ar: 260 L/s |
N2: 430 L/s
He: 440 L/s H2: 420 L/s Ar: 400 L/s |
Max Gas Throughput |
Ar: 3.00 mbar*L/s H2: 11.0 mbar*L/s He: 11.0 mbar*L/s N2: 10.0 mbar*L/s |
Ar: 3.00 mbar*L/s H2: 10.0 mbar*L/s He: 6.00 mbar*L/s N2: 6.00 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
1.00 x 10-7 hPA 1.00 x 10-7 mbar 1.00 x 10-5 Pa 7.50 x 10-7 Torr
ISO-K Flange
8.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 6.00 x 10-8 Torr |
ConFlat Flange
1.00 x 10-7 hPA 1.00 x 10-7 mbar 1.00 x 10-5 Pa 7.50 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 hPA 5.00 x 10-10 mbar 5.00 x 10-8 Pa 3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 hPA 5.00 x 10-10 mbar 5.00 x 10-8 Pa 3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 6.00 x 10-8 Torr |
Max Foreline Pressure |
14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr |
14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr |
10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr |
10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr |
Cooling Method(s) |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Foreline Flange | KF16 |
KF16 |
KF25 |
KF25 |
Inlet Flange | ISO63-F DN63CF (4.50" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO160-F DN160CF (8.00" OD) |
Weight Lbs (kg) | 6.83 - 10.6 ( 3.10 - 4.80 ) | 8.82 - 14.6 ( 4.00 - 6.60 ) | 16.5 - 25.3 ( 7.50 - 11.5 ) | 27.5 - 28.5 ( 12.5 - 12.5 ) |
Lubrication Type | Dry |
Dry |
Dry |
Dry |
Technology Type | Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
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Pump Model | TurboVac 90iX | TurboVac 250iX | TurboVac 350iX | TurboVac 450iX |
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Pumping Speeds |
N2: 90.0 L/s
He: 90.0 L/s H2: 78.0 L/s Ar: 83.0 L/s |
N2: 255 L/s
He: 250 L/s H2: 210 L/s Ar: 210 L/s |
N2: 290 L/s
He: 360 L/s H2: 320 L/s Ar: 260 L/s |
N2: 430 L/s
He: 440 L/s H2: 420 L/s Ar: 400 L/s |
Max Gas Throughput |
Ar: 3.00 mbar*L/s H2: 11.0 mbar*L/s He: 11.0 mbar*L/s N2: 10.0 mbar*L/s |
Ar: 3.00 mbar*L/s H2: 10.0 mbar*L/s He: 6.00 mbar*L/s N2: 6.00 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
1.00 x 10-7 hPA 1.00 x 10-7 mbar 1.00 x 10-5 Pa 7.50 x 10-8 Torr
ISO-K Flange
8.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 hPA 5.00 x 10-10 mbar 5.00 x 10-8 Pa 3.75 x 10-10 Torr
ISO-K Flange
6.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 8.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 hPA 5.00 x 10-10 mbar 5.00 x 10-8 Pa 3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 hPA 5.00 x 10-10 mbar 5.00 x 10-8 Pa 3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 hPA 8.00 x 10-8 mbar 8.00 x 10-6 Pa 6.00 x 10-8 Torr |
Max Foreline Pressure |
14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr |
14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr |
10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr |
10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr |
Cooling Method(s) |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Foreline Flange | KF16 |
KF16 |
KF25 |
KF25 |
Inlet Flange | ISO63-F DN63CF (4.50" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO160-F DN160CF (8.00" OD) |
Weight Lbs (kg) | 7.94 - 11.7 ( 3.60 - 5.30 ) | 9.92 - 15.6 ( 4.50 - 7.10 ) | 16.6 - 26.5 ( 8.00 - 12.0 ) | 18.1 - 28.6 ( 8.20 - 13.0 ) |
Lubrication Type | Dry |
Dry |
Dry |
Dry |
Technology Type | Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
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Ordering Table
(Click column headers to sort data)
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Pump Model | Inlet Flange | Foreline Flange | Manual | Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
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Pump Model | Inlet Flange | Foreline Flange | Manual | Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
TurboVac 90i | ISO63-F | KF16 |
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TURBO PUMP, |
810031V1000 | P.O.R. |
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TurboVac 90iX | ISO63-F | KF16 |
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TURBO PUMP, |
810031V3300 | P.O.R. |
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TurboVac 90i | DN63CF (4.50" OD) | KF16 |
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TURBO PUMP, |
810041V1000 | P.O.R. |
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TurboVac 90iX | DN63CF (4.50" OD) | KF16 |
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TURBO PUMP, |
810041V3300 | P.O.R. |
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TurboVac 250i | ISO100-F | KF16 |
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TURBO PUMP, |
820051V1000 | P.O.R. |
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TurboVac 250iX | ISO100-F | KF16 |
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TURBO PUMP, |
820051V3300 | P.O.R. |
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TurboVac 250i | DN100CF (6.00" OD) | KF16 |
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TURBO PUMP, |
820061V1000 | P.O.R. |
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TurboVac 250iX | DN100CF (6.00" OD) | KF16 |
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TURBO PUMP, |
820061V3300 | P.O.R. |
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TurboVac 350i | ISO100-F | KF25 |
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TURBO PUMP, |
830051V1000 | P.O.R. |
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TurboVac 350iX | ISO100-F | KF25 |
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TURBOPUMP, |
830051V3300 | P.O.R. |
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TurboVac 350i | DN100CF (6.00" OD) | KF25 |
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TURBO PUMP, |
830061V1000 | P.O.R. |
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TurboVac 350iX | DN100CF (6.00" OD) | KF25 |
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TURBOPUMP, |
830061V3300 | P.O.R. |
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TurboVac 450i | ISO160-F | KF25 |
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TURBO PUMP, |
830071V1000 | P.O.R. |
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TurboVac 450iX | ISO160-F | KF25 |
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TURBO PUMP, |
830071V3300 | P.O.R. |
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TurboVac 450i | DN160CF (8.00" OD) | KF25 |
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TURBO PUMP, |
830081V1000 | P.O.R. |
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TurboVac 450iX | DN160CF (8.00" OD) | KF25 |
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TURBO PUMP, |
830081V3300 | P.O.R. |
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Accessories Table
For Pump Model(s) | Description | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
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For Pump Model(s) | Description | Accessory Type | Part Number | Price | In Stock | Add To Cart | |
TurboVac 450i, TurboVac 450iX | Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket |
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TurboVac 90i, TurboVac 90iX | Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket |
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TurboVac 250i, TurboVac 250iX, TurboVac 350i, TurboVac 350iX | Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket |
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TurboVac 250i, TurboVac 250iX, TurboVac 350i, TurboVac 350iX | Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring |
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TurboVac 250i, TurboVac 250iX, TurboVac 90i, TurboVac 90iX | Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring |
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TurboVac 450i, TurboVac 450iX | Clamping Kit, For QF160 (ISO160-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring |
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TurboVac 350i, TurboVac 350iX, TurboVac 450i, TurboVac 450iX | Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring |
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TurboVac 90i, TurboVac 90iX | Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring |
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All TurboVac Pumps | Leybold Interconnect Cable, 5m. |
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All TurboVac Pumps | Leybold PTR 90 N, CF40 |
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All TurboVac Pumps | Leybold PTR 90 N, KF40 |
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TurboVac 90i/iX | Leybold Radial Air Cooling Kit for TurboVac 90i(X) Pumps |
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TurboVac 90i/iX, 250i/iX | Leybold Axial Air Cooling Kit for TurboVac 90i(X) and 250i(X) |
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TurboVac 250i/iX | Air Cooling Unit,Radial | — |
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TurboVac 350/450i | Air Cooling Unit,Radial | — |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length |
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TurboVac 90i/250i/350i/450i | Mains Cable with Type G (UK) Plug for single phase pumps, 3m length |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Mains Cable with CEE 7/7 Plug (Northern Europe) for single phase pumps, 3m length |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold TurboVac i(X) to Turbo.Power Integra Power Cable, 1m Length |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold TurboVac i(X) to Turbo.Power Integra Power Cable, 3m Length |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold TurboVac i(X) to Turbo.Power Integra Power Cable, 5m Length |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold Turbo.Power Integra Power Supply for TurboVac i(X) Pumps |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold LEYASSIST Software (Requires USB Cable, Type A/B) |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold USB A to USB B Cable for TurboVac i(X) Pumps, 1.8m Length |
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TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX | Leybold Water Cooling Kit for TurboVac i(X) Pumps |
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