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TurboVac 350iX with air cooling, power supply, and controller

Leybold TurboVac i/iX Series

Features

Performance

Industry-leading pumping speed especially for light gases (up to 60% higher than existing products)
Optimized rotor diameter for ISO 63, 100, 160 flanges to provide maximum pumping performance

Flexibility

Vacuum port design flexibility; rotatable fore-vacuum port
Interstage port options
Variable rotor and drag stage configurations for perfect match to application requirements

Installation and operation

Integrated 24/48V DC drive electronics to avoid expensive cabling
Thermal isolation for optimized cooling of bearing and improved pump lifetime
Supported shaft to reduce vibration
Maintenance free upper passive magnetic bearing
Oil free, lifetime lubricated lower mechanical ceramic ball bearing, field replaceable

Turbovac i

Fitted with one accessory port to control an air cooling unit, venting/purge valve, as well as a flange heater or other accessories.
USB, RS485 and digital I/O connections.
Additional interface options are available on demand.

Turbovac iX

Fitted with three accessory ports to control air cooling units, venting/purge valves, as well as relay boxes for operation of a forevacuum pump, a flange heater or other accessories.
Integrated vacuum system controller
USB and Digital I/O interfaces
An additional Anybus port that can be equipped with further interfaces

Dimensional Drawings

Charts

Videos

TURBOVAC i family - turbomolecular vacuum pumps

Best in class modular line of turbomolecular vacuum pumps with hybrid bearing concept for applications requiring clean high and ultra-high vacuum.

Runtime: 05:22

Pump Model	TurboVac 90i	TurboVac 250i	TurboVac 350i	TurboVac 450i
Pumping Speeds	N2: 90.0 L/s He: 90.0 L/s H2: 78.0 L/s Ar: 83.0 L/s	N2: 255 L/s He: 250 L/s H2: 210 L/s Ar: 210 L/s	N2: 290 L/s He: 360 L/s H2: 320 L/s Ar: 260 L/s	N2: 430 L/s He: 440 L/s H2: 420 L/s Ar: 400 L/s
Max Gas Throughput	Ar: 3.00 mbarL/s H2:* 11.0 mbarL/s He:* 11.0 mbarL/s N2:* 10.0 mbar*L/s	Ar: 3.00 mbarL/s H2:* 10.0 mbarL/s He:* 6.00 mbarL/s N2:* 6.00 mbar*L/s	Ar: 2.00 mbarL/s H2:* 8.00 mbarL/s He:* 8.00 mbarL/s N2:* 4.50 mbar*L/s	Ar: 2.00 mbarL/s H2:* 8.00 mbarL/s He:* 8.00 mbarL/s N2:* 4.50 mbar*L/s
Ultimate Pressure	ConFlat Flange 1.00 x 10^-7 hPA 1.00 x 10^-7 mbar 1.00 x 10^-5 Pa 7.50 x 10^-7 Torr ISO-K Flange 8.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 6.00 x 10^-8 Torr	ConFlat Flange 1.00 x 10^-7 hPA 1.00 x 10^-7 mbar 1.00 x 10^-5 Pa 7.50 x 10^-8 Torr	ConFlat Flange 5.00 x 10^-10 hPA 5.00 x 10^-10 mbar 5.00 x 10^-8 Pa 3.75 x 10^-10 Torr ISO-K Flange 8.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 6.00 x 10^-8 Torr	ConFlat Flange 5.00 x 10^-10 hPA 5.00 x 10^-10 mbar 5.00 x 10^-8 Pa 3.75 x 10^-10 Torr ISO-K Flange 8.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 6.00 x 10^-8 Torr
Max Foreline Pressure	14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr	14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr	10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr	10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	KF16	KF16	KF25	KF25
Inlet Flange	ISO63-F DN63CF (4.50" OD)	ISO100-F DN100CF (6.00" OD)	ISO100-F DN100CF (6.00" OD)	ISO160-F DN160CF (8.00" OD)
Weight Lbs (kg)	6.83 - 10.6 ( 3.10 - 4.80 )	8.82 - 14.6 ( 4.00 - 6.60 )	16.5 - 25.3 ( 7.50 - 11.5 )	27.5 - 28.5 ( 12.5 - 12.5 )
Lubrication Type	Dry	Dry	Dry	Dry
Technology Type	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage

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Pump Model	TurboVac 90iX	TurboVac 250iX	TurboVac 350iX	TurboVac 450iX
Pumping Speeds	N2: 90.0 L/s He: 90.0 L/s H2: 78.0 L/s Ar: 83.0 L/s	N2: 255 L/s He: 250 L/s H2: 210 L/s Ar: 210 L/s	N2: 290 L/s He: 360 L/s H2: 320 L/s Ar: 260 L/s	N2: 430 L/s He: 440 L/s H2: 420 L/s Ar: 400 L/s
Max Gas Throughput	Ar: 3.00 mbarL/s H2:* 11.0 mbarL/s He:* 11.0 mbarL/s N2:* 10.0 mbar*L/s	Ar: 3.00 mbarL/s H2:* 10.0 mbarL/s He:* 6.00 mbarL/s N2:* 6.00 mbar*L/s	Ar: 2.00 mbarL/s H2:* 8.00 mbarL/s He:* 8.00 mbarL/s N2:* 4.50 mbar*L/s	Ar: 2.00 mbarL/s H2:* 8.00 mbarL/s He:* 8.00 mbarL/s N2:* 4.50 mbar*L/s
Ultimate Pressure	ConFlat Flange 1.00 x 10^-7 hPA 1.00 x 10^-7 mbar 1.00 x 10^-5 Pa 7.50 x 10^-8 Torr ISO-K Flange 8.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 6.00 x 10^-8 Torr	ConFlat Flange 5.00 x 10^-10 hPA 5.00 x 10^-10 mbar 5.00 x 10^-8 Pa 3.75 x 10^-10 Torr ISO-K Flange 6.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 8.00 x 10^-8 Torr	ConFlat Flange 5.00 x 10^-10 hPA 5.00 x 10^-10 mbar 5.00 x 10^-8 Pa 3.75 x 10^-10 Torr ISO-K Flange 8.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 6.00 x 10^-8 Torr	ConFlat Flange 5.00 x 10^-10 hPA 5.00 x 10^-10 mbar 5.00 x 10^-8 Pa 3.75 x 10^-10 Torr ISO-K Flange 8.00 x 10^-8 hPA 8.00 x 10^-8 mbar 8.00 x 10^-6 Pa 6.00 x 10^-8 Torr
Max Foreline Pressure	14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr	14.0 hPA 14.0 mbar 1400 Pa 10.5 Torr	10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr	10.0 hPA 10.0 mbar 1000 Pa 7.50 Torr
Cooling Method(s)	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water	Method Forced Air Water
Foreline Flange	KF16	KF16	KF25	KF25
Inlet Flange	ISO63-F DN63CF (4.50" OD)	ISO100-F DN100CF (6.00" OD)	ISO100-F DN100CF (6.00" OD)	ISO160-F DN160CF (8.00" OD)
Weight Lbs (kg)	7.94 - 11.7 ( 3.60 - 5.30 )	9.92 - 15.6 ( 4.50 - 7.10 )	16.6 - 26.5 ( 8.00 - 12.0 )	18.1 - 28.6 ( 8.20 - 13.0 )
Lubrication Type	Dry	Dry	Dry	Dry
Technology Type	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage	Turbo - Compound Drag Stage

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Note:

For operation of a TURBOVAC I, a fore-vacuum pump, power supply and mains cable are mandatory. Further accessories might be required depending on the application and operating conditions.

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Ordering Table

(Click column headers to sort data)

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Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
Pump Model	Inlet Flange	Foreline Flange	Manual	Description	Part Number	Price	In Stock	Add To Cart	Accessories
TurboVac 90i	ISO63-F	KF16		TURBO PUMP, TURBOVAC 90I, DN63 ISO-K	810031V1000	P.O.R.
TurboVac 90iX	ISO63-F	KF16		TURBO PUMP, TURBOVAV 90iX, DN63 ISO-K	810031V3300	P.O.R.
TurboVac 90i	DN63CF (4.50" OD)	KF16		TURBO PUMP, TURBOVAC 90I, DN63 CF	810041V1000	P.O.R.
TurboVac 90iX	DN63CF (4.50" OD)	KF16		TURBO PUMP, TURBOVAC 90iX, RS485, DN63CF	810041V3300	P.O.R.
TurboVac 250i	ISO100-F	KF16		TURBO PUMP, TURBOVAC 250i, DN100 ISO-K	820051V1000	P.O.R.
TurboVac 250iX	ISO100-F	KF16		TURBO PUMP, TURBOVAV 250iX, RS485, DN100 ISO-K	820051V3300	P.O.R.
TurboVac 250i	DN100CF (6.00" OD)	KF16		TURBO PUMP, TURBOVAC 250i, DN100 CF	820061V1000	P.O.R.
TurboVac 250iX	DN100CF (6.00" OD)	KF16		TURBO PUMP, TURBOVAC 250iX, RS485, DN100CF	820061V3300	P.O.R.
TurboVac 350i	ISO100-F	KF25		TURBO PUMP, TURBOVAC 350i, DN100 ISO-K	830051V1000	P.O.R.
TurboVac 350iX	ISO100-F	KF25		TURBOPUMP, TURBOVAC, 350IX, RS485, ISO100K	830051V3300	P.O.R.
TurboVac 350i	DN100CF (6.00" OD)	KF25		TURBO PUMP, TURBOVAC 350i, DN100 CF	830061V1000	P.O.R.
TurboVac 350iX	DN100CF (6.00" OD)	KF25		TURBOPUMP, TURBOVAC, 350iX, RS 485, DN100CF	830061V3300	P.O.R.
TurboVac 450i	ISO160-F	KF25		TURBO PUMP, TURBOVAC 450i, DN160 ISO-K	830071V1000	P.O.R.
TurboVac 450iX	ISO160-F	KF25		TURBO PUMP, TURBOVAC 450iX, DN160 ISO-K	830071V3300	P.O.R.
TurboVac 450i	DN160CF (8.00" OD)	KF25		TURBO PUMP, TURBOVAC 450i, DN160 CF	830081V1000	P.O.R.
TurboVac 450iX	DN160CF (8.00" OD)	KF25		TURBO PUMP, TURBOVAC 450iX, DN160 CF, RS485	830081V3300	P.O.R.

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Accessories Table

For Pump Model(s)	Description	Accessory Type	Part Number	Price	In Stock	Add To Cart
For Pump Model(s)	Description	Accessory Type	Part Number	Price	In Stock	Add To Cart
TurboVac 450i, TurboVac 450iX	Bolting Kit, For DN160CF (8.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	CF Hardware Kit	DN160CF-HDKIT	P.O.R.
TurboVac 90i, TurboVac 90iX	Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	CF Hardware Kit	DN63CF-HDKIT	P.O.R.
TurboVac 250i, TurboVac 250iX, TurboVac 350i, TurboVac 350iX	Bolting Kit, For Dn100CF (6.00" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket	CF Hardware Kit	DN100CF-HDKIT	P.O.R.
TurboVac 250i, TurboVac 250iX, TurboVac 350i, TurboVac 350iX	Clamping Kit, For QF100 (ISO100-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	ISO-K Hardware Kit	QF100K-HDKIT	P.O.R.
TurboVac 250i, TurboVac 250iX, TurboVac 90i, TurboVac 90iX	Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring	KF Hardware Kit	QF16-HDKIT	P.O.R.
TurboVac 450i, TurboVac 450iX	Clamping Kit, For QF160 (ISO160-K) Flange, Including (8) Cold Steel (Zinc Plated) Clamp and FKM Centering Ring	ISO-K Hardware Kit	QF160K-HDKIT	P.O.R.
TurboVac 350i, TurboVac 350iX, TurboVac 450i, TurboVac 450iX	Clamping Kit, For QF25 Flange, Including Aluminum Clamp and FKM Centering Ring	KF Hardware Kit	QF25-HDKIT	P.O.R.
TurboVac 90i, TurboVac 90iX	Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring	ISO-K Hardware Kit	QF63K-HDKIT	P.O.R.
All TurboVac Pumps	Leybold Interconnect Cable, 5m.	Interconnect Cable	12426	P.O.R.
All TurboVac Pumps	Leybold PTR 90 N, CF40	Gauge	230072V02	P.O.R.
All TurboVac Pumps	Leybold PTR 90 N, KF40	Gauge	230071V02	P.O.R.
TurboVac 90i/iX	Leybold Radial Air Cooling Kit for TurboVac 90i(X) Pumps	Turbo Accessory	800136V0007	P.O.R.
TurboVac 90i/iX, 250i/iX	Leybold Axial Air Cooling Kit for TurboVac 90i(X) and 250i(X)	Turbo Accessory	800136V0008	P.O.R.
TurboVac 250i/iX	Air Cooling Unit,Radial	—	800136V0009	P.O.R.
TurboVac 350/450i	Air Cooling Unit,Radial	—	800136V0005	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length	Mains Cable	800102V1002	P.O.R.
TurboVac 90i/250i/350i/450i	Mains Cable with Type G (UK) Plug for single phase pumps, 3m length	Mains Cable	800102V0003	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Mains Cable with CEE 7/7 Plug (Northern Europe) for single phase pumps, 3m length	Mains Cable	800102V0002	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold TurboVac i(X) to Turbo.Power Integra Power Cable, 1m Length	Interconnect Cable	800096V0100	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold TurboVac i(X) to Turbo.Power Integra Power Cable, 3m Length	Interconnect Cable	800096V0300	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold TurboVac i(X) to Turbo.Power Integra Power Cable, 5m Length	Interconnect Cable	800096V0500	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold Turbo.Power Integra Power Supply for TurboVac i(X) Pumps	Power Supply	800100V0003	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold LEYASSIST Software (Requires USB Cable, Type A/B)	Pump Software	230439V01	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold USB A to USB B Cable for TurboVac i(X) Pumps, 1.8m Length	Interconnect Cable	800110V0108	P.O.R.
TurboVac 90i/iX, 250i/iX, 350i/iX, 450i/iX	Leybold Water Cooling Kit for TurboVac i(X) Pumps	Turbo Accessory	800135V0005	P.O.R.

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