Leybold TurboVac i/iX Series Features
Performance
- Industry-leading pumping speed especially for light gases (up to 60% higher than existing products)
- Optimized rotor diameter for ISO 63, 100, 160 flanges to provide maximum pumping performance
Flexibility
- Vacuum port design flexibility; rotatable fore-vacuum port
- Interstage port options
- Variable rotor and drag stage configurations for perfect match to application requirements
Installation and operation
- Integrated 24/48V DC drive electronics to avoid expensive cabling
- Thermal isolation for optimized cooling of bearing and improved pump lifetime
- Supported shaft to reduce vibration
- Maintenance free upper passive magnetic bearing
- Oil free, lifetime lubricated lower mechanical ceramic ball bearing, field replaceable
Turbovac i
- Fitted with one accessory port to control an air cooling unit, venting/purge valve, as well as a flange heater or other accessories.
- USB, RS485 and digital I/O connections.
- Additional interface options are available on demand.
Turbovac iX
- Fitted with three accessory ports to control air cooling units, venting/purge valves, as well as relay boxes for operation of a forevacuum pump, a flange heater or other accessories.
- Integrated vacuum system controller
- USB and Digital I/O interfaces
- An additional Anybus port that can be equipped with further interfaces
Videos
Specifications Table
Specifications Table
Pump Model | TurboVac 90i | TurboVac 250i | TurboVac 350i | TurboVac 450i |
---|---|---|---|---|
Pumping Speeds |
N2: 90.0 L/s
He: 90.0 L/s H2: 78.0 L/s Ar: 83.0 L/s |
N2: 255 L/s
He: 250 L/s H2: 210 L/s Ar: 210 L/s |
N2: 290 L/s
He: 360 L/s H2: 320 L/s Ar: 260 L/s |
N2: 430 L/s
He: 440 L/s H2: 420 L/s Ar: 400 L/s |
Max Gas Throughput |
Ar: 3.00 mbar*L/s H2: 11.0 mbar*L/s He: 11.0 mbar*L/s N2: 10.0 mbar*L/s |
Ar: 3.00 mbar*L/s H2: 10.0 mbar*L/s He: 6.00 mbar*L/s N2: 6.00 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
1.00 x 10-7 mbar 7.50 x 10-7 Torr
ISO-F Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-F Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-F Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
Max Foreline Pressure |
1.40 x 100
mbar 1.05 x 100 Torr |
1.40 x 100
mbar 1.05 x 100 Torr |
1.00 x 100
mbar 7.50 x 10-1 Torr |
1.00 x 100
mbar 7.50 x 10-1 Torr |
Cooling Method(s) |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Foreline Flange | KF16 |
KF16 |
KF25 |
KF25 |
Inlet Flange | ISO63-F DN63CF (4.50" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO160-F DN160CF (8.00" OD) |
Weight Lbs (kg) | 6.83 - 10.6 ( 3.10 - 4.80 ) | 8.82 - 14.6 ( 4.00 - 6.60 ) | 16.5 - 25.3 ( 7.50 - 11.5 ) | 27.5 - 28.5 ( 12.5 - 12.5 ) |
Lubrication Type | Dry |
Dry |
Dry |
Dry |
Technology Type | Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
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Specifications Table
Pump Model | TurboVac 90iX | TurboVac 250iX | TurboVac 350iX | TurboVac 450iX |
---|---|---|---|---|
Pumping Speeds |
N2: 90.0 L/s
He: 90.0 L/s H2: 78.0 L/s Ar: 83.0 L/s |
N2: 255 L/s
He: 250 L/s H2: 210 L/s Ar: 210 L/s |
N2: 290 L/s
He: 360 L/s H2: 320 L/s Ar: 260 L/s |
N2: 430 L/s
He: 440 L/s H2: 420 L/s Ar: 400 L/s |
Max Gas Throughput |
Ar: 3.00 mbar*L/s H2: 11.0 mbar*L/s He: 11.0 mbar*L/s N2: 10.0 mbar*L/s |
Ar: 3.00 mbar*L/s H2: 10.0 mbar*L/s He: 6.00 mbar*L/s N2: 6.00 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ar: 2.00 mbar*L/s H2: 8.00 mbar*L/s He: 8.00 mbar*L/s N2: 4.50 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
1.00 x 10-7 mbar 7.50 x 10-8 Torr
ISO-F Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-F Flange
8.00 x 10-8 mbar 8.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-F Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
ConFlat Flange
5.00 x 10-10 mbar 3.75 x 10-10 Torr
ISO-K Flange
8.00 x 10-8 mbar 6.00 x 10-8 Torr |
Max Foreline Pressure |
1.40 x 100
mbar 1.05 x 100 Torr |
1.40 x 100
mbar 1.05 x 100 Torr |
1.00 x 100
mbar 7.50 x 10-1 Torr |
1.00 x 100
mbar 7.50 x 10-1 Torr |
Cooling Method(s) |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Method Forced Air Water |
Foreline Flange | KF16 |
KF16 |
KF25 |
KF25 |
Inlet Flange | ISO63-F DN63CF (4.50" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO100-F DN100CF (6.00" OD) |
ISO160-K DN160CF (8.00" OD) |
Weight Lbs (kg) | 7.94 - 11.7 ( 3.60 - 5.30 ) | 9.92 - 15.6 ( 4.50 - 7.10 ) | 16.6 - 26.5 ( 8.00 - 12.0 ) | 18.1 - 28.6 ( 8.20 - 13.0 ) |
Lubrication Type | Dry |
Dry |
Dry |
Dry |
Technology Type | Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
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Specifications Table
Pump Model | TurboVac 850i | TurboVac 950i | TurboVac 1350i | TurboVac 1450i |
---|---|---|---|---|
Pumping Speeds |
N2: 720 L/s
He: 850 L/s H2: 755 L/s Ar: 655 L/s |
N2: 900 L/s
He: 925 L/s H2: 770 L/s Ar: 840 L/s |
N2: 1250 L/s
He: 1350 L/s H2: 1150 L/s Ar: 1150 L/s |
N2: 1380 L/s
He: 1390 L/s H2: 1210 L/s Ar: 1280 L/s |
Max Gas Throughput |
Ar: 3.50 mbar*L/s H2: 15.0 mbar*L/s He: 21.0 mbar*L/s N2: 14.0 mbar*L/s |
Ar: 3.50 mbar*L/s H2: 15.0 mbar*L/s He: 21.0 mbar*L/s N2: 14.0 mbar*L/s |
Ar: 12.0 mbar*L/s H2: 10.0 mbar*L/s He: 18.0 mbar*L/s N2: 24.0 mbar*L/s |
Ar: 12.0 mbar*L/s H2: 10.0 mbar*L/s He: 18.0 mbar*L/s N2: 24.0 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
3.00 x 10-10 mbar 2.25 x 10-10 Torr
ISO-K Flange
3.00 x 10-8 mbar 2.25 x 10-8 Torr |
ConFlat Flange
3.00 x 10-10 mbar 2.25 x 10-10 Torr
ISO-K Flange
3.00 x 10-8 mbar 2.25 x 10-8 Torr |
ISO-F Flange
7.50 x 10-8 mbar 7.56 x 10-8 Torr
ISO-K Flange
7.50 x 10-8 mbar 5.60 x 10-8 Torr |
ISO-F Flange
7.50 x 10-8 mbar 5.60 x 10-8 Torr
ISO-K Flange
7.50 x 10-8 mbar 5.60 x 10-8 Torr |
Max Foreline Pressure |
1.50 x 100
mbar 1.13 x 100 Torr |
1.50 x 100
mbar 1.13 x 100 Torr |
4.00 x 10-1
mbar 3.00 x 10-1 Torr |
4.00 x 10-1
mbar 3.00 x 10-1 Torr |
Cooling Method(s) |
Method Forced Air Water |
Method Forced Air Water |
Water Flow Rate 60 L/hr |
Water Flow Rate 60 L/hr |
Foreline Flange | KF25 |
KF25 |
KF40 |
KF40 |
Inlet Flange | ISO160-K DN160CF (8.00" OD) |
ISO200-K DN200CF (10.00" OD) |
ISO200-K ISO200-F |
ISO250-K ISO250-F |
Weight Lbs (kg) | 32.2 - 43.2 ( 14.6 - 43.2 ) | 34.0 - 47.8 ( 15.4 - 21.7 ) | 34.0 ( 23.5 ) | 34.0 ( 24.4 ) |
Lubrication Type | Dry |
Dry |
Dry |
Dry |
Technology Type | Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
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Specifications Table
Pump Model | TurboVac 850iX | TurboVac 950iX |
---|---|---|
Pumping Speeds |
N2: 720 L/s
He: 850 L/s H2: 755 L/s Ar: 655 L/s |
N2: 900 L/s
He: 925 L/s H2: 770 L/s Ar: 840 L/s |
Max Gas Throughput |
Ar: 3.50 mbar*L/s H2: 15.0 mbar*L/s He: 21.0 mbar*L/s N2: 14.0 mbar*L/s |
Ar: 3.50 mbar*L/s H2: 15.0 mbar*L/s He: 21.0 mbar*L/s N2: 14.0 mbar*L/s |
Ultimate Pressure |
ConFlat Flange
3.00 x 10-8 mbar 2.25 x 10-8 Torr
ISO-K Flange
3.00 x 10-8 mbar 2.25 x 10-7 Torr |
ConFlat Flange
3.00 x 10-8 mbar 2.25 x 10-8 Torr
ISO-K Flange
3.00 x 10-8 mbar 2.25 x 10-8 Torr |
Max Foreline Pressure |
1.50 x 100
mbar 1.13 x 100 Torr 1.50 x 100 mbar 1.13 x 100 Torr |
1.50 x 100
mbar 1.13 x 100 Torr 1.50 x 100 mbar 1.13 x 100 Torr |
Cooling Method(s) |
Method Forced Air Water |
Method Forced Air Water |
Foreline Flange | KF25 |
KF25 |
Inlet Flange | ISO160-K DN160CF (8.00" OD) |
ISO200-K DN200CF (10.00" OD) |
Weight Lbs (kg) | 32.2 - 43.2 ( 14.6 - 43.2 ) | 34.0 - 47.8 ( 15.4 - 21.7 ) |
Lubrication Type | Dry |
Dry |
Technology Type | Turbo - Compound Drag Stage |
Turbo - Compound Drag Stage |
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Pump Package Ordering Table
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Pump Model | Package Includes | Description | Part Number | Price | In Stock | Add To Cart | |
---|---|---|---|---|---|---|---|
Pump Model | Package Includes | Description | Part Number | Price | In Stock | Add To Cart | |
TurboVac 250iX | Leybold Turbovac 250iX Basic Package (Stop/Start) (US) includes: 250iX pump with DN100 ISO-K Inlet Flange (820051V3300), Radial Air Cooling Kit (800136V0009), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
820051V3300-A1-PKG |
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TurboVac 250iX | Leybold Turbovac 250iX Basic Package (Stop/Start) (US) includes: 250iX pump with DN100CF Inlet Flange (820061V3300), Radial Air Cooling Kit (800136V0009), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
820061V3300-A1-PKG |
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TurboVac 350iX | Leybold Turbovac 350iX Basic Package (Stop/Start) (US) includes: 350iX pump with DN100CF Inlet Flange (830061V3300), Radial Air Cooling Kit (800136V0005), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
830061V3300-A1-PKG |
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TurboVac 350iX | Leybold Turbovac 350iX Basic Package (Stop/Start) (US) includes: 350iX pump with DN100 ISO-K Inlet Flange (830051V3300), Radial Air Cooling Kit (800136V0005), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
830051V3300-A1-PKG |
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TurboVac 450iX | Leybold Turbovac 450iX Basic Package (Stop/Start) (US) includes: 450iX pump with DN160CF Inlet Flange (830081V3300), Radial Air Cooling Kit (800136V0005), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
830081V3300-A1-PKG |
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TurboVac 450iX | Leybold Turbovac 450iX Basic Package (Stop/Start) (US) includes: 450iX pump with DN160 ISO-K Inlet Flange (830071V3300), Radial Air Cooling Kit (800136V0005), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
830071V3300-A1-PKG |
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TurboVac 90iX | Leybold Turbovac 90iX Basic Package (Stop/Start) (US) includes: 90iX pump with DN100 ISO-K Inlet Flange (810031V3300), Radial Air Cooling Kit (800136V0007), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
810031V3300-A1-PKG |
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TurboVac 90iX | Leybold Turbovac 90iX Basic Package (Stop/Start) (US) includes: 90iX pump with DN100CF Inlet Flange (810041V3300), Radial Air Cooling Kit (800136V0007), US Mains Cable (800102V0002), Power Integr Power Supply (800100V0003), Stop/Start Switch (800110V0021) |
TURBO PUMP PACKAGE, |
810041V3300-A1-PKG |
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Ordering Table
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Pump Model | Inlet Flange | Foreline Flange | Manual | Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
---|---|---|---|---|---|---|---|---|---|---|
Pump Model | Inlet Flange | Foreline Flange | Manual | Description | Part Number | Price | In Stock | Add To Cart | Accessories | |
TurboVac 90i | ISO63-F | KF16 |
|
Leybold TurboVac 90i Turbomolecular Pump, |
810031V1000 | P.O.R. |
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TurboVac 90iX | ISO63-F | KF16 |
|
Leybold TurboVac 90iX Turbomolecular Pump, |
810031V3300 | $8,699.00 |
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TurboVac 90i | DN63CF (4.50" OD) | KF16 |
|
Leybold TurboVac 90i Turbomolecular Pump, |
810041V1000 | P.O.R. |
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TurboVac 90iX | DN63CF (4.50" OD) | KF16 |
|
Leybold TurboVac 90iX Turbomolecular Pump, |
810041V3300 | $9,776.00 |
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TurboVac 250i | ISO100-F | KF16 |
|
Leybold TurboVac 250i Turbomolecular Pump, |
820051V1000 | P.O.R. |
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TurboVac 250iX | ISO100-F | KF16 |
|
Leybold TurboVac 250iX Turbomolecular Pump, |
820051V3300 | P.O.R. |
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TurboVac 250i | DN100CF (6.00" OD) | KF16 |
|
Leybold TurboVac 250i Turbomolecular Pump, |
820061V1000 | P.O.R. |
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TurboVac 250iX | DN100CF (6.00" OD) | KF16 |
|
Leybold TurboVac 250iX Turbomolecular Pump, |
820061V3300 | $13,403.00 |
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TurboVac 350i | ISO100-F | KF25 |
|
Leybold TurboVac 350i Turbomolecular Pump, |
830051V1000 | P.O.R. |
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TurboVac 350iX | ISO100-F | KF25 |
|
Leybold TurboVac 350iX Turbomolecular Pump, |
830051V3300 | $15,615.00 |
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TurboVac 350i | DN100CF (6.00" OD) | KF25 |
|
Leybold TurboVac 350i Turbomolecular Pump, |
830061V1000 | P.O.R. |
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TurboVac 350iX | DN100CF (6.00" OD) | KF25 |
|
Leybold TurboVac 350iX Turbomolecular Pump, |
830061V3300 | $16,213.00 |
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TurboVac 450i | ISO160-F | KF25 |
|
Leybold TurboVac 450i Turbomolecular Pump, |
830071V1000 | P.O.R. |
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TurboVac 450iX | ISO160-K | KF25 |
|
Leybold TurboVac 450iX Turbomolecular Pump, |
830071V3300 | $17,014.00 |
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TurboVac 450i | DN160CF (8.00" OD) | KF25 |
|
Leybold TurboVac 450i Turbomolecular Pump, |
830081V1000 | P.O.R. |
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TurboVac 450iX | DN160CF (8.00" OD) | KF25 |
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Leybold TurboVac 450iX Turbomolecular Pump, |
830081V3300 | P.O.R. |
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TurboVac 850i | ISO160-K | KF25 |
|
Leybold TurboVac 850i Turbomolecular Pump, |
840071V1000 | $24,908.00 |
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TurboVac 850i | ISO160-K | KF25 | — | — | 840071V2000 | P.O.R. |
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— | ||
TurboVac 850iX | ISO160-K | KF25 |
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Leybold TurboVac 850iX Turbomolecular Pump, |
840071V3300 | P.O.R. |
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TurboVac 850i | DN160CF (8.00" OD) | KF25 |
|
Leybold TurboVac 850i Turbomolecular Pump, |
840081V1000 | P.O.R. |
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TurboVac 850iX | DN160CF (8.00" OD) | KF25 |
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Leybold TurboVac 850iX Turbomolecular Pump, |
840081V3300 | P.O.R. |
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TurboVac 950i | ISO200-K | KF25 |
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Leybold TurboVac 950i Turbomolecular Pump, |
840091V1000 | P.O.R. |
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TurboVac 950iX | ISO200-K | KF25 |
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Leybold TurboVac 950iX Turbomolecular Pump, |
840091V3300 | $28,397.00 |
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TurboVac 950i | DN200CF (10.00" OD) | KF25 |
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Leybold TurboVac 950i Turbomolecular Pump, |
840111V1000 | P.O.R. |
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TurboVac 950iX | DN200CF (10.00" OD) | KF25 |
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Leybold TurboVac 950iX Turbomolecular Pump, |
840111V3300 | P.O.R. |
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TurboVac 1350i | ISO200-K | KF40 |
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Leybold TurboVac 1350i Turbomolecular Pump, |
850092V1000 | $28,683.00 |
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TurboVac 1350i | ISO200-K | KF40 |
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Leybold TurboVac 1350i Turbomolecular Pump, |
850092V1000U | P.O.R. |
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TurboVac 1350i | ISO200-F | KF40 |
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Leybold TurboVac 1350i Turbomolecular Pump, |
850102V1000 | P.O.R. |
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TurboVac 1350i | ISO200-F | KF40 |
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Leybold TurboVac 1350i Turbomolecular Pump, |
850102V1000U | P.O.R. |
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TurboVac 1450i | ISO250-K | KF40 |
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Leybold TurboVac 1450i Turbomolecular Pump, |
850122V1000 | P.O.R. |
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TurboVac 1450i | ISO250-K | KF40 |
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Leybold TurboVac 1450i Turbomolecular Pump, |
850122V1000U | $29,103.00 |
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TurboVac 1450i | ISO250-F | KF40 |
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Leybold TurboVac 1450i Turbomolecular Pump, |
850132V1000 | P.O.R. |
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TurboVac 1450i | ISO250-F | KF40 |
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Leybold TurboVac 1450i Turbomolecular Pump, |
850132V1000U | P.O.R. |
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CloseX
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