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Thin Film Deposition Systems Technical Notes

The range of products and processes that need a vacuum system is too extensive to describe. This section, therefore, will briefly describe the most important vacuum process (technically and commercially)-thin film deposition.

Film deposition by thermal evaporation was first reported in 1887. In the past 50 years, the number of vacuum deposition techniques has multiplied and the thin film uses have grown exponentially. Many modern products for consumer, commerce, military, medical, or research applications depend on thin films (see side bar.)

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