CMS (Combinatorial Materials Science) Series – Advanced Research System utilizing Sputtering or Electron Beam Techniques

KJLC^® eKLipse™ Control Software

Kurt J. Lesker Company^® eKLipse™ Controls Software is utilized on all KJLC platforms. The eKLipse™ controls platform utilizes a .NET application running on a Windows PC for its User Interface and Recipe Editor. Equipment automation is accomplished via a standalone Real Time Controller.

Recipes

• Graphical Recipe Builder – Easily create recipes by clicking on the desired component and set that item's attributes

• Scripted Recipe Builder – A more traditional "scripted" recipe editor exposes more details for setting or checking the value of any system component during a process.

• Real Time Controller – The system operates independently of the Windows software package and will continue the recipe should the software / computer malfunction.
• Independent Thermal Evaporation Thin Film Control – There is no third party software requiring a "handshake" or "handoff" between the Systems Manufacturers software and the thin film controller's software.

Unlimited Recipes, (import/export capable)

• Unlimited recipes with user security level features
• Recipe import/export capability (for transferring recipes between similarly equipped tools)
• Any recipe step can be configured to allow the user to alter a value, enabling process condition changes, without affecting the master recipe. As an example, at the time of execution, the recipe can prompt the user for the desired deposition thickness, or power setting.

• Consistent User experience across all deposition techniques and KJLC platforms (Sputter, Thermal, EBeam, ALD)
• Multi chamber and multi PC control for cluster tools

Custom Chart Recorder and Datalogging

• Custom Chart with up to 10 simultaneous plots
• Chart Recorder can be used to display any setpoint or feedback parameter

• Automatic datalogging of each recipe step for all recipes
• Chart data and configuration can be saved

• Graphical selection of signals to be recorded

• Custom Maintenance Counters are available for each component
• Periodic Maintenance interlocks and recipe checks can be configured for any maintenance counter
• Sputter Target kiloWatt*Hour and custom material usage tracking

User Security

• Supports multiple user accounts and password levels with custom security access for recipes and screens
• Software screen access can be customized per user
• Recipe editing and manual operation features can be assigned on a per user basis;
• Users with full access have the ability to edit recipes and control interlocks. Restricted access users will be limited to running certain recipes and have no control over interlocks.
• Every control object can be assigned to a standard user security level.
• Individual screen access can be separately assigned to any user.

• System event log captures all user login/logout events, all recipes executed, and system status messages
• Interlocking of vacuum and deposition equipment provides continuous system status monitoring while restricting unapproved system usage (no need to 'power off' system screen or PC)

Remote Support Utility and Apps

• Customized Version of TeamViewer allows remote support (free Android and IOS apps)
• Remote connection supports system monitoring/control and file transfer