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Bakeable leak valves are used to control the flow of gas into a vacuum system from an external source. A soft metal pad is compressed against a harder metal seat, creating the necessary seal for precise gas flow control.

  • Available in two different series
  • Each series utilizes different types of sealing materials tailored for specific applications
  • Typical applications include argon processing, sputtering, system purging, precision gas control, and laser back-filling

MD5 Series

  • Stellite knife-edge and nickel diaphragm seals for hot or corrosive gas applications
  • Inlet pressure to 10 bar maximum
  • Operating pressure from 1 bar to 10-7 mbar
  • Diaphragm use minimizes the valve's internal volume
  • Bakeable to 450° C (open)/ 250° C (closed)
  • User serviceable

Product Manual
For a download of the product manual, click here.
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