Reliable, economical, general-purpose components for HV and UHV applications requiring cleanliness and corrosion resistance.
In the open position
- Edge-welded bellows and valve seat move out of the gas path thereby achieving high conductance
Features
- Feature fluorocarbon o-ring seat seals, bellows-sealed shafts, and bonnet seals (select copper for higher temperature bakeout and better ultimate vacuum)
- Normal repairs can be made without removing the valve body from the system
Pneumatic models also feature
- Air to open, air to close operation; 60–80 psi air pressure opens the valves
- Require a solenoid (sold separately, see accessories)
Specifications Table
Manufacturer | KJLC |
---|---|
Pressure |
Torr 7.520 x 10-9 Torr mbar 1.000 x 10-8 mbar |
Rates |
Leak Rate 2.000 x 10-9 mbar*L/s 1.504 x 10-9 Torr*L/s |
Temperature |
Actuator 80.0 ºC 176 ºF Closed Bake 100 ºC 212 ºF Open Bake 100 ºC 212 ºF |
Solenoid Kit Included |
No
|
Position Indicators |
No
|
Bonnet Seal Type |
Fluorocarbon
|
Actuator Type |
Pneumatic Double Acting
|
Valve Body Material |
304L SS
|
Poppet Material |
Fluorocarbon
|
Shaft Seal |
Welded Bellows
|
X CLOSE