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Auto-Soft Flow Actuated Check Valves (For KF Flanged)

Replaces a KF centering ring for easy installation. Used for throttling roughing pumps during their initial evacuation. When the roughing pump is operated, the initial flow causes the vane assembly to close—automatically throttling the pump. The valves open automatically when a set pressure differential is reached.

Features

  • 304 stainless steel construction with Elgiloy® spring
  • 100°C max temperature
  • Reduces turbulence in a system by reducing initial pumping speed*
  • Ideal for applications that are sensitive to the disruption of particles within the system (semiconductor, thin film, etc.)
  • Also used in conjunction with vent valves when venting a system to avoid extreme pressure differentials and high turbulence
  • Helps prevent substrate damage
  • Replaces expensive pressure control bypass valves
  • Fast-action vane closing-12ms or better during testing**
  • Operates without electrical power

*Typical pump down time using the soft start check valve is increased by 3X.
**Test times measured using a 27 CFM pump evacuating a volume of 100 liters. Results will vary based on system configuration.

Dimensional Drawings

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Ordering Table

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Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at +1 412 387 9200 or email international@lesker.com with your inquiry.

Accessories Table

Type Description
VacuCADSM
Part Number Price In Stock Add Item
Type Description
VacuCADSM
Part Number Price In Stock Add Item
Clamp
CLAMP,ALUMINUM,QF40,CAST 1-1/2"
(please log in)
QF40-150-C
P.O.R.
In Stock
Clamp
CLAMP,ALUMINUM,QF50,CAST 2"
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QF50-200-C
P.O.R.
In Stock
O-Rings (Fluorocarbon)
O-RING,FKM,1.600"ID X .210"W ACT)1-5/8"ID X 3/16"W(NOM),QF40
(please log in)
O-V326
$8.55
In Stock
O-Rings (Fluorocarbon)
O-RING,FKM,2.100"ID X .210"W ACT)2-1/8"ID X 3/16"W(NOM),QF50
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O-V330
$21.30
In Stock
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Contact Us - Auto-Soft Flow Actuated Check Valves (For KF Flanged)