Gate Valves handle applications in semiconductor, R&D and industrial processes. They are most often used to isolate pumps and sample entry locks from HV or UHV work chambers.
Features
- CF Flanged (with Copper Gasket): Operate in the atmosphere to 10-11 torr pressure range, bakeable up to 200°C (with actuator removed)
- General purpose polished Stainless Steel
- Provide high conductance within a compact design
- 100,000-cycle service before requiring maintenance
- Pneumatic valves close or remain closed in the event of power loss or loss of air pressure
- All Pneumatic 2.75" flange O.D. and larger models incorporate magnetic REED switches for position indication (micro-switch optional)
Specifications Table
Manufacturer | KJLC |
---|---|
Pressure |
Torr Min: 1.000 x 10-11 Torr Max: 760 Torr mbar Min: 1.333 x 10-11 mbar Max: 1013 mbar |
Rates |
Helium Leak Rate 5.000 x 10-10 mbar*L/s 4.950 x 10-10 sccm 3.759 x 10-10 Torr*L/s |
Temperature |
Closed Bake 150 ºC 302 ºF Open Bake 200 ºC 392 ºF |
Bellows |
Edge-welded
|
Shaft Seal Material |
Bellows
|
Cycle Life |
100,000 |
Solenoid Kit Included |
No
|
Position Indicators |
Yes
|
Max Δ P Before Open |
27.0
Torr
|
Bonnet Seal Type |
Copper
|
Actuator Type |
Pneumatic
|
Valve Body Material |
304L SS
|
Valve Seal Material |
Viton
|
X CLOSE
Ordering Table
All dimensions listed in the table below, unless otherwise stated, are in inches.
All dimensions listed in the table below, unless otherwise stated, are in millimeters.
(Click column headers to sort data)
Drawing | Flange Size | Thread | Manual | Description |
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Part Number | Price | In Stock | Add To Cart | Accessories | ||||
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Drawing | Flange Size | Thread | Manual | Description |
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Part Number | Price | In Stock | Add To Cart | Accessories | ||||
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DN35CF-DN40CF (2.75" OD) |
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GATE VALVE, UHV, 2-3/4” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0150PCCFM | P.O.R. |
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DN63CF (4.50" OD) |
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GATE VALVE, UHV, 4-1/2” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0250PCCFM | P.O.R. |
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DN100CF (6.00" OD) |
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GATE VALVE, UHV, 6” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0400PCCFM | P.O.R. |
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DN160CF (8.00" OD) |
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— |
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GU0600PCCFM | P.O.R. |
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DN200CF (10.00" OD) |
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GATE VALVE, UHV, 10” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
|
GU0800PCCFM | P.O.R. |
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Drawing | Flange Size | Thread | Manual | Description |
|
Part Number | Price | In Stock | Add To Cart | Accessories | ||||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Drawing | Flange Size | Thread | Manual | Description |
|
Part Number | Price | In Stock | Add To Cart | Accessories | ||||
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DN35CF-DN40CF (69.85 mm OD) |
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GATE VALVE, UHV, 2-3/4” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0150PCCFM | P.O.R. |
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DN63CF (114.30 mm OD) |
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GATE VALVE, UHV, 4-1/2” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0250PCCFM | P.O.R. |
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DN100CF (152.40 mm OD) |
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GATE VALVE, UHV, 6” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0400PCCFM | P.O.R. |
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DN160CF (203.20 mm OD) |
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— |
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GU0600PCCFM | P.O.R. |
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DN200CF (254.00 mm OD) |
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GATE VALVE, UHV, 10” CF FLANGE, METRIC THREADS, PNEUMATIC ACTUATION, WITH REED SENSOR |
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GU0800PCCFM | P.O.R. |
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