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CF Flanged SS Copper Bonnet Bellows Sealed Gate Valves (Pneumatic)
Gate Valves handle applications in semiconductor, R&D and industrial processes. They are most often used to isolate pumps and sample entry locks from HV or UHV work chambers.
Features
- CF Flanged (with Copper Gasket): Operate in the atmosphere to 10-11 torr pressure range, bakeable up to 200°C (with actuator removed)
- General purpose polished Stainless Steel
- Provide high conductance within a compact design
- 100,000-cycle service before requiring maintenance
- Pneumatic valves close or remain closed in the event of power loss or loss of air pressure
- All Pneumatic 2.75" flange O.D. and larger models incorporate magnetic REED switches for position indication (micro-switch optional)
Specifications Table
| Manufacturer | KJLC |
|---|---|
| Pressure |
Torr Min: 1.000 x 10-11 Torr Max: 760 Torr mbar Min: 1.333 x 10-11 mbar Max: 1013 mbar |
| Rates |
Helium Leak Rate 5.000 x 10-10 mbar*L/s 4.950 x 10-10 sccm 3.759 x 10-10 Torr*L/s |
| Temperature |
Closed Bake 150 ºC 302 ºF Open Bake 200 ºC 392 ºF |
|
Bellows |
Edge-welded
|
|
Shaft Seal Material |
Bellows
|
|
Cycle Life |
100,000 |
|
Solenoid Kit Included |
No
|
|
Position Indicators |
Yes
|
|
Max Δ P Before Open |
27.0
Torr
|
|
Bonnet Seal Type |
Copper
|
|
Actuator Type |
Pneumatic
|
|
Valve Body Material |
304L SS
|
|
Valve Seal Material |
Viton
|
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