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CF Flanged SS Copper Bonnet Bellows Sealed Gate Valves (Pneumatic)

Gate Valves handle applications in semiconductor, R&D and industrial processes. They are most often used to isolate pumps and sample entry locks from HV or UHV work chambers.

Features

  • CF Flanged (with Copper Gasket): Operate in the atmosphere to 10-11 torr pressure range, bakeable up to 200°C (with actuator removed)
  • General purpose polished Stainless Steel
  • Provide high conductance within a compact design
  • 100,000-cycle service before requiring maintenance
  • Pneumatic valves close or remain closed in the event of power loss or loss of air pressure
  • All Pneumatic 2.75" flange O.D. and larger models incorporate magnetic REED switches for position indication (micro-switch optional)

Specifications Table

Manufacturer KJLC
Pressure Torr
Min: 1.000 x 10-11 Torr
Max: 760 Torr

mbar
Min: 1.333 x 10-11 mbar
Max: 1013 mbar

Rates Helium Leak Rate
5.000 x 10-10 mbar*L/s
4.950 x 10-10 sccm
3.759 x 10-10 Torr*L/s
Temperature Closed Bake
150 ºC
302 ºF

Open Bake
200 ºC
392 ºF

Bellows
Edge-welded
Shaft Seal
Material
Bellows
Cycle
Life
100,000
Solenoid Kit
Included
No
Position
Indicators
Yes
Max Δ P
Before Open
27.0  Torr
Bonnet
Seal Type
Copper
Actuator
Type
Pneumatic
Valve Body
Material
304L SS
Valve Seal
Material
Viton
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To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Notes:
  • For ease of maintenance, the carriage assembly can be removed from the body without requiring removal of the valve from the system. Please contact us for options such as roughing ports or valves that remain open in the event of power failure.
  • Please contact us for options such as roughing ports or valves that remain open in the event of power failure.

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Ordering Table

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Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at +1 412 387 9200 or email international@lesker.com with your inquiry.
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Contact Us - CF Flanged SS Copper Bonnet Bellows Sealed Gate Valves (Pneumatic)