Offer high tolerance for dirty systems at a relatively low cost.

• Maximum leak rate of <1 x 10^-6 mbar ls^-1
• Works best in the pressure range 10,000 - 1 x 10^-5 mbar
• Withstands bakeouts to 60° C
• Nitrile and Fluorocarbon diaphragm versions are available

Techniques, such as Finite Element Analysis, are used to optimize the design of these valves, while testing each valve with a helium mass spectrometer ensures it meets stringent specification standards.