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Offer high tolerance for dirty systems at a relatively low cost.

  • Maximum leak rate of <1 x 10-6 mbar ls-1
  • Works best in the pressure range 10,000 - 1 x 10-5 mbar
  • Withstands bakeouts to 60° C
  • Nitrile and Fluorocarbon diaphragm versions are available

Techniques, such as Finite Element Analysis, are used to optimize the design of these valves, while testing each valve with a helium mass spectrometer ensures it meets stringent specification standards.

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