Offer high tolerance for dirty systems at a relatively low cost.
- Maximum leak rate of <1 x 10-6 mbar ls-1
- Works best in the pressure range 10,000 - 1 x 10-5 mbar
- Withstands bakeouts to 60° C
- Nitrile and Fluorocarbon diaphragm versions are available
Techniques, such as Finite Element Analysis, are used to optimize the design of these valves, while testing each valve with a helium mass spectrometer ensures it meets stringent specification standards.