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V75 Series:
Large Rectangular Transfer Valve (Slit Valves)

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems

Features

  • Removable valve housing cover
  • Patented L-motion link and dual shifts without springs in the actuator enable faster, smoother actuation with significantly reduced vibration
  • Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
  • Mechanical locking so at the end of gate travel the valve locks into position
  • Welded bellows actuator seal
  • Bonnet flange bolts are designed with retainers to eliminate bolts from falling out upon disassembly
  • Available with gates up to 150mm tall and 1500mm wide

Options

  • Custom sizes available
  • Various o-ring compounds (Kalrez®, Chemraz®, etc.)

Specifications Table

Temperature (°C) Valve body: 120°C
Valve actuator: 80°C
Pressure Range (torr) 1 X 10-7 mbar - ATM
Differential Press (torr) ≤ 1.2 bar in either direction
Material Valve body, bonnet seal, gate: AL6061
Welded bellows: AM350
Valve actuator: SS 304, AL6061
Seal Material Fluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec) <1 X 10-7 mbar. l/s
Cycles Until Service (approx.) ≥ 1 million
Position Indicator Festo: SME-8M-DS-24V-k-2.5-OE
Operation Double acting

Videos

Large Rectangular Transfer Valve (Slit Valves)

Runtime: 03:49

Product Datasheet
For a download of the product datasheet, click here.
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