3-Position SS Gate Valves (ASA flanged)
Typically used for upstream pressure control applications in conjunction with mass flow controllers.
These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position.
The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity.
This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves.
For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.
- Electropolished stainless steel
- One of the smallest interior surface areas in the vacuum valve industry
- Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
- Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
- Ideal for semiconductor and other sensitive processes
NOTE for ASA/ ANSI only: To specify o-ring grooves, add appropriate suffix to end of aprt number when ordering.
No extra charge! GT-groove on top side, GB-groove on bottom, GC-grooves on both sides.
|Pressure Range (torr)
||1 x 10-9 to 760
|Differential Press (torr)
||760 either direction
|Max ΔPress Before Open (torr)
||Body: Electropolished 304 stainless steel
Gate: Electropolished 304 stainless steel
Drive Shaft/Pins: Hardened, electropolished, stainless steel
Seals: Fluorocarbon o-ring
|Leak Rate (cc/sec)
||2 x 10-10 ATM
|Cycles Until Service (approx.)
|Bakeout Limit. (°C)
||Seal Bonnet & Gate: 150
||Voltage* (VAC, Hz): 120, 50/60
Power Required (Watts): 4.0
*Other voltages available.
||Reed Switch (for open & closed position): 115 VAC MAX or 28 VDC MAX - 20 mA MAX
Micro Switch (for third position): 5A@115 VAC— 5A@250 VAC
<5A@28 VDC— Resistive Load
3A@28 VDC—Inductive Load
||Up to 80 psi filtered, dry air