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CF Flanged SS 3-Position Gate Valves (Pneumatic)
Typically used for upstream pressure control applications in conjunction with mass flow controllers.
These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position. The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity. This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.
Features
- Electropolished stainless steel
- One of the smallest interior surface areas in the vacuum valve industry
- Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
- Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
- Ideal for semiconductor and other sensitive processes
Specifications Table
| Manufacturer | KJLC |
|---|---|
| Pressure |
Torr Min: 7.501 x 10-10 Torr Max: 760 Torr mbar Min: 1.000 x 10-9 mbar Max: 1013 mbar |
| Rates |
Helium Leak Rate 2.000 x 10-9 mbar*L/s 2.000 x 10-10 Pa*m^3/s 1.980 x 10-7 sccm 1.500 x 10-9 Torr*L/s |
| Temperature |
Actuator 60.0 ºC 140 ºF Bakeable 150 ºC 302 ºF |
|
Bellows |
Edge-welded
|
|
Shaft Seal Material |
Bellows
|
|
Cycle Life |
1,000,000 |
|
Solenoid Kit Included |
Yes
|
|
Position Indicators |
Yes
|
|
Max Δ P Before Open |
22.5
Torr
|
|
Bonnet Seal Type |
Viton
|
|
Actuator Type |
Pneumatic
|
|
Valve Body Material |
304L SS
|
|
Valve Seal Material |
Viton
|
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