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CF Flanged SS 3-Position Gate Valves (Pneumatic)

Typically used for upstream pressure control applications in conjunction with mass flow controllers.

These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position. The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity. This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.


  • Electropolished stainless steel
  • One of the smallest interior surface areas in the vacuum valve industry
  • Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
  • Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
  • Ideal for semiconductor and other sensitive processes

Specifications Table

Manufacturer KJLC
Shaft Seal
Pressure Torr
Min: 7.501 x 10-10 Torr
Max: 760 Torr

Min: 1.000 x 10-9 mbar
Max: 1013 mbar

Rates Helium Leak Rate
2.000 x 10-9 mbar*L/s
2.000 x 10-10 Pa*m^3/s
1.980 x 10-7 sccm
1.500 x 10-9 Torr*L/s
Temperature Actuator
60.0 ºC
140 ºF

150 ºC
302 ºF

Solenoid Kit
Max Δ P
Before Open
22.5  Torr
Product Datasheet
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Ordering Table

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Flange Selection Guide
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