Representative Image
3-Position SS Gate Valves (CF flanged)
Typically used for upstream pressure control applications in conjunction with mass flow controllers.
These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position. The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity. This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.
Features
- Electropolished stainless steel
- One of the smallest interior surface areas in the vacuum valve industry
- Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
- Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
- Ideal for semiconductor and other sensitive processes
Specifications Table
| Pressure Range (torr) | 1 x 10-9 to 760 |
| Differential Press (torr) | 760 either direction |
| Max ΔPress Before Open (torr) | 20 |
| Material | Body: Electropolished 304 stainless steel Gate: Electropolished 304 stainless steel Bellows: AM-350 Drive Shaft/Pins: Hardened, electropolished, stainless steel Seals: Fluorocarbon o-ring |
| Leak Rate (cc/sec) | 2 x 10-10 ATM |
| Cycles Until Service (approx.) | 1,000,000 |
| Bakeout Limit. (°C) | Seal Bonnet & Gate: 150 Actuator: 60 |
| Solenoid | Voltage* (VAC, Hz): 120, 50/60 Power Required (Watts): 4.0 *Other voltages available. |
| Position Indicator | Reed Switch (for open & closed position): 115 VAC MAX or 28 VDC MAX - 20 mA MAX Micro Switch (for third position): 5A@115 VAC— 5A@250 VAC <5A@28 VDC— Resistive Load 3A@28 VDC—Inductive Load |
| Options | Custom flanges |
| Requirements | Up to 80 psi filtered, dry air |
Dimensional Drawings
Drawing: SGP0800CF
Ordering Table
(Click column headers to sort data)
Accessories Table
| Type | Description | Manual | Part Number | Price | In Stock | Add Item |
|---|---|---|---|---|---|---|
| Type | Description | Manual | Part Number | Price | In Stock | Add Item |
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