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3-Position SS Gate Valves (CF flanged)

Typically used for upstream pressure control applications in conjunction with mass flow controllers.

These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position. The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity. This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.

Features

  • Electropolished stainless steel
  • One of the smallest interior surface areas in the vacuum valve industry
  • Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
  • Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
  • Ideal for semiconductor and other sensitive processes

Specifications Table

Pressure Range (torr) 1 x 10-9 to 760
Differential Press (torr) 760 either direction
Max ΔPress Before Open (torr) 20
Material Body: Electropolished 304 stainless steel
Gate: Electropolished 304 stainless steel
Bellows: AM-350
Drive Shaft/Pins: Hardened, electropolished, stainless steel
Seals: Fluorocarbon o-ring
Leak Rate (cc/sec) 2 x 10-10 ATM
Cycles Until Service (approx.) 1,000,000
Bakeout Limit. (°C) Seal Bonnet & Gate: 150
Actuator: 60
Solenoid Voltage* (VAC, Hz): 120, 50/60
Power Required (Watts): 4.0
*Other voltages available.
Position Indicator Reed Switch (for open & closed position): 115 VAC MAX or 28 VDC MAX - 20 mA MAX
Micro Switch (for third position): 5A@115 VAC— 5A@250 VAC
                                                           <5A@28 VDC— Resistive Load
                                                             3A@28 VDC—Inductive Load
Options Custom flanges
Requirements Up to 80 psi filtered, dry air

Dimensional Drawings


Product Datasheet
For a download of the product datasheet, click here.
Contact Us
Contact Us
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Ordering Table

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Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at +1 412 387 9200 or email international@lesker.com with your inquiry.

Accessories Table

Type Description
VacuCADSM
Part Number Price In Stock Add Item
Type Description
VacuCADSM
Part Number Price In Stock Add Item
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL, (25) 5/16-24 X 1.75" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK31224175
$32.20
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL, (32) 5/16-24 X 1.75" LONG HEX BOLTS AND (32) FLAT WASHERS
(please log in)
HBL31224175
$38.20
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL, (30) 3/8-24 X 2.00" LONG HEX BOLTS AND (30) FLAT WASHERS
(please log in)
HBK37524200
$41.25
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL, (30) 3/8-24 X 2.00" LONG HEX BOLTS AND (30) FLAT WASHERS
(please log in)
HBK37524200
$41.25
In Stock
Anti-Seize Thread Lube
THREAD LUBRICANT, 4 OUNCE TUBE
N/A
VZTL-4OZ
P.O.R.
In Stock
Gasket Tool
GASKET REMOVAL TOOL, FOR ALL CONFLAT (CF) FLANGE SIZES
N/A
VZGRT
$38.20
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN50CF (3.375" OD) FLANGE, 2.425" OD , 2.010" ID, (10) PER PACKAGE
(please log in)
GA-0337
$31.10
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN16CF (1.33" OD) FLANGE , 0.837" OD, 0.640" ID, (10) PER PACKAGE
(please log in)
GA-0133
$21.05
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN35CF-DN40CF (2.75" OD) FLANGE, 1.895" OD, 1.451" ID, (10) PER PACKAGE
(please log in)
GA-0275
$27.35
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN63CF (4.50" OD) FLANGE, 3.243" OD, 2.506" ID, (10) PER PACKAGE
(please log in)
GA-0450
$37.20
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN75CF (4.625" OD) FLANGE, 3.598" OD X 3.010" ID, (10) PER PACKAGE
(please log in)
GA-0462
$44.25
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN100CF (6.00" OD) FLANGE, 4.743" OD,4.006" ID, (10) PER PACKAGE
(please log in)
GA-0600
$55.30
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN160CF (8.00" OD) FLANGE, 6.743" OD, 6.007" ID, (10) PER PACKAGE
(please log in)
GA-0800
$78.40
Contact KJLC for Availability
OFHC Copper Gasket
GASKET, COPPER, DN200CF (10.00" OD) FLANGE, 8.743" OD, 8.007" ID, (10) PER PACKAGE
(please log in)
GA-1000
$96.50
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN250CF (12.00" OD) FLANGE, 10.743" OD X 10.007" ID, (1) PER PACKAGE
(please log in)
GA-1200
$61.35
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN275CF (13.25" OD) FLANGE, 11.590" OD, 10.845" ID, (1) PER PACKAGE
(please log in)
GA-1325
$54.30
In Stock
OFHC Copper Gasket
GASKET, COPPER, DN295CF (14.00" OD) FLANGE, 12.33" OD, 11.81" ID, (1) PER PACKAGE
(please log in)
GA-1400
$61.35
In Stock
Bolt & Nut Set
SOCKET HEAD CAP SCREWS, STAINLESS STEEL, (25) 8-32 X 0.50" LONG SOCKET HEAD CAP SCREWS
N/A
SBK832050S4-25
$13.50
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL, (25) 1/4-28 X 0.875" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK25028088
$15.60
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL,(25) 5/16-24 X 1.25" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK31224125
$31.10
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL,(25) 5/16-24 X 1.25" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK31224125
$31.10
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL,(25) 5/16-24 X 1.25" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK31224125
$31.10
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL,(25) 5/16-24 X 1.25" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK31224125
$31.10
In Stock
Bolt Kit
HEX BOLT & WASHER KIT, STAINLESS STEEL, (25) 5/16-24 X 1.75" LONG HEX BOLTS AND (25) FLAT WASHERS
(please log in)
HBK31224175
$32.20
In Stock
How to Combine Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
Contact Us - 3-Position SS Gate Valves (CF flanged)