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CF Flanged SS 3-Position Gate Valves (Pneumatic)

Typically used for upstream pressure control applications in conjunction with mass flow controllers.

These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position. The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity. This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.

Features

  • Electropolished stainless steel
  • One of the smallest interior surface areas in the vacuum valve industry
  • Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
  • Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
  • Ideal for semiconductor and other sensitive processes

Specifications Table

Manufacturer KJLC
Bellows
Edge-welded
Shaft Seal
Material
Bellows
Pressure Torr
Min: 7.501 x 10-10 Torr
Max: 760 Torr

mbar
Min: 1.000 x 10-9 mbar
Max: 1013 mbar

Rates Helium Leak Rate
2.000 x 10-9 mbar*L/s
2.000 x 10-10 Pa*m^3/s
1.980 x 10-7 sccm
1.500 x 10-9 Torr*L/s
Temperature Actuator
60.0 ºC
140 ºF

Bakeable
150 ºC
302 ºF

Cycle
Life
1,000,000
Solenoid Kit
Included
Yes
Position
Indicators
Yes
Max Δ P
Before Open
22.5  Torr
X CLOSE
Product Datasheet
For a download of the product datasheet, click here.
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Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at +1 412 387 9200 or email international@lesker.com with your inquiry.
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Contact Us - CF Flanged SS 3-Position Gate Valves (Pneumatic)