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3-Position SS Gate Valves (ISO flanged)

Typically used for upstream pressure control applications in conjunction with mass flow controllers.

These valves utilize a micrometer-set third position from which the valve can be remotely actuated to some degree of the open position. The body and all major internal components are vacuum furnace brazed at 1100°C, at 10-6 torr, ensuring maximum joint integrity. This eliminates the possibility of "virtual leaks" or entrapment areas while minimizing body distortion found in conventionally welded valves. For maintenance purposes, the carriage assembly can be removed from the body without removing the valve from the system.

Features

  • Electropolished stainless steel
  • One of the smallest interior surface areas in the vacuum valve industry
  • Positive shut off—valve will maintain its closed position in the event of a power loss followed by a pressure drop
  • Unique air cylinder design with no mechanical locks inside the vacuum reduces shock and vibration to a minimum
  • Ideal for semiconductor and other sensitive processes

Specifications Table

Pressure Range (torr) 1 x 10-9 to 760
Differential Press (torr) 760 either direction
Max ΔPress Before Open (torr) 20
Material Body: Electropolished 304 stainless steel
Gate: Electropolished 304 stainless steel
Bellows: AM-350
Drive Shaft/Pins: Hardened, electropolished, stainless steel
Seals: Fluorocarbon o-ring
Leak Rate (cc/sec) 2 x 10-10 ATM
Cycles Until Service (approx.) 1,000,000
Bakeout Limit. (°C) Seal Bonnet & Gate: 150
Actuator: 60
Solenoid Voltage* (VAC, Hz): 120, 50/60
Power Required (Watts): 4.0
*Other voltages available.
Position Indicator Reed Switch (for open & closed position): 115 VAC MAX or 28 VDC MAX - 20 mA MAX
Micro Switch (for third position): 5A@115 VAC— 5A@250 VAC
                                                           <5A@28 VDC— Resistive Load
                                                             3A@28 VDC—Inductive Load
Options Custom flanges
Requirements Up to 80 psi filtered, dry air

Dimensional Drawings


Product Datasheet
For a download of the product datasheet, click here.
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Ordering Table

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Accessories Table

Type Description Manual Part Number Price In Stock Add
Item
Type Description Manual Part Number Price In Stock Add
Item
Anti-Seize Thread Lube
Prevents Seizing and Corrosion
--
VZTL-4OZ
P.O.R.
In Stock
Bolt Kit
M10-35 for ISO200 - ISO250 "F" Flanges (12/pkg)
--
HBKM10X35-12
$31.10
In Stock
Bolt Kit
M10-35 for ISO160 "F" Flanges (8/pkg)
--
HBKM10X35-8
$25.95
Contact KJLC for Availability
Bolt Kit
M8-30 for ISO63 "F" Flanges (4 /pkg)
--
HBKM8X30-4
$14.60
In Stock
Bolt Kit
M8-30 for ISO80 - ISO100 "F" Flanges (8/pkg)
--
HBKM8X30-8
$25.00
Contact KJLC for Availability
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO100 Flanges (1/pkg)
--
QF100-SAVR
$68.35
In Stock
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO160 Flanges (1/pkg)
--
QF160-SAVR
$89.45
In Stock
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO200 Flanges (1/pkg)
--
QF200-SAVR
$124.65
In Stock
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO250 Flanges (1/pkg)
--
QF250-SAVR
$148.75
In Stock
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO320 Flanges (1/pkg)
--
QF320-SAVR
$425.15
In Stock
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO63 Flanges (1/pkg)
--
QF63-SAVR
$51.30
In Stock
Centering Ring (SS/AL with Fluorocarbon O-Ring)
For ISO80 Flanges (1/pkg)
--
QF80-SAVR
$71.40
In Stock
Clamp - Aluminum Cast
KF16 Flange
--
QF16-075-C
P.O.R.
In Stock
Clamp - Aluminum Cast
KF40 Flange
--
QF40-150-C
P.O.R.
In Stock
Clamp - Aluminum Cast
KF50 Flange
--
QF50-200-C
P.O.R.
In Stock
Double Clamps (AL)
For ISO63 - ISO100 "K" Flanges (1/pkg)
--
QF-SDC-AL1
$6.75
In Stock
Double Clamps (AL)
For ISO160 - ISO250 "K" Flanges (1/pkg)
--
QF-SDC-AL2
$7.35
In Stock
Double Clamps (AL)
For ISO320 - ISO500 "K" Flanges (1/pkg)
--
QF-SDC-AL3
$14.10
In Stock
Fluorocarbon Centering Ring
For KF16 Flange
--
QF16-075-SRV
$6.75
In Stock
Fluorocarbon Centering Ring
For KF40 Flange
--
QF40-150-SRV
$13.10
In Stock
Fluorocarbon Centering Ring
For KF50 Flange
--
QF50-200-SRV
$15.10
In Stock
Single Camp (AL)
Metric Aluminum Single Clamp ISO 320 - ISO500
--
QF-LSC-ALM
$8.05
In Stock
Single Camp (AL)
Metric Aluminum Single Clamp ISO 160 - ISO250
--
QF-MSC-ALM
$5.95
In Stock
Single Camp (AL)
Metric Aluminum Single Clamp ISO 60 - ISO100
--
QF-SSC-ALM
$4.85
In Stock
Contact Us - 3-Position SS Gate Valves (ISO flanged)