Used with cryopumps, turbomolecular pumps, and ion pumps; ideal for applications requiring clean, high-vacuum, low-maintenance valves.
- Rugged valves share the design features of the standard valves
- Enhanced to withstand 1 million+ cycles before requiring service
- Bellows reinforced for longer operating life
- All moving joints are made of 304 stainless steel, hardened to increase durability, reduce particulate generation, and provide smoother actuation
- Maintain closed status in the event of a power failure
- Feature fluorocarbon seals (bakeable to 150° C) and electropneumatic operators
- Body-mounted solenoid with manual override provides easy control
- 120 VAC Solenoid incorporates speed controls for smoother actuation
- 1.5" to 12.0" models are equipped with magnetic reed switches for position indicator
NOTE: Available options include larger sizes, microswitches, custom flanges, and latching-type solenoids. Please call if ordering options.
Specifications Table
Pressure Range (torr) | 1 x 10-9 to 760 |
Differential Press (torr) | 760 either direction |
Max ΔPress Before Open (torr) | 20 |
Material | Body: Electropolished 304 stainless steel Gate: Electropolished 304 stainless steel Bellows: AM-350 Drive Shaft/Pins: Hardened, electropolished, stainless steel Seals: Fluorocarbon o-ring |
Requirements | Up to 80 psi filtered, dry air |
Dimensional Drawings
Ordering Table
All dimensions listed in the table below, unless otherwise stated, are in inches.
All dimensions listed in the table below, unless otherwise stated, are in millimeters.
(Click column headers to sort data)
Flange Size | Port ID | Max Conductance (L/Sec.) | Dim A | Dim B | Dim C | Thread | Weight (lbs.) |
Manual |
|
Part Number | Price | In Stock | Add Item | |||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Flange Size | Port ID | Max Conductance (L/Sec.) | Dim A | Dim B | Dim C | Thread | Weight (lbs.) |
Manual |
|
Part Number | Price | In Stock | Add Item | |||
KF16 | 0.625" | 10 | 2.96 | 1.31 | 4.97 | N/A | 3 |
|
|
|
||||||
KF40 | 1.5" | 85 | 2.00 | 2.46 | 9.99 | N/A | 10 |
|
|
|
||||||
KF50 | 2" | 315 | 2.00 | 2.96 | 10.89 | N/A | 13 |
|
|
|
||||||
ISO63-F | 2.5" | 615 | 2.03 | 3.52 | 12.65 | M8 x 1.25 | 18 |
|
|
|
||||||
ISO63-K | 2.5" | 360 | 3.46 | 3.52 | 12.65 | N/A | 25 |
|
|
|
||||||
ISO80-F | 3" | 1,070 | 1.97 | 4.28 | 13.91 | M8 x 1.25 | 22 |
|
|
|
||||||
ISO80-K | 3" | 540 | 3.84 | 4.28 | 13.80 | N/A | 32 |
|
|
|
||||||
ISO100-F | 4" | 2,120 | 2.41 | 5.65 | 18.34 | M8 x 1.25 | 33 |
|
|
|
||||||
ISO100-K | 4" | 1,190 | 4.25 | 5.65 | 18.46 | N/A | 43 |
|
|
|
||||||
ISO160-F | 6" | 7,140 | 2.36 | 7.55 | 22.02 | M10 x 1.5 | 50 |
|
|
|
||||||
ISO160-K | 6" | 3,960 | 4.25 | 7.55 | 22.09 | N/A | 70 |
|
|
|
||||||
ISO200-F | 8" | 11,590 | 2.66 | 10.02 | 26.51 | M10 x 1.5 | 75 |
|
|
|
||||||
ISO200-K | 8" | 9,440 | 4.25 | 10.02 | 26.38 | N/A | 95 |
|
|
|
||||||
ISO250-F | 10" | 24,990 | 3.15 | 11.99 | 34.37 | M10 x 1.5 | 160 |
|
|
|
||||||
ISO250-K | 10" | 17,535 | 5.51 | 11.99 | 34.27 | N/A | 190 |
|
|
|
||||||
ISO320-F | 12" | 43,260 | 3.15 | 14.28 | 39.87 | M12 x 1.75 | 170 |
|
|
|
||||||
ISO320-K | 12" | 24,500 | 5.51 | 14.28 | 39.67 | N/A | 230 |
|
|
|
Flange Size | Port ID | Max Conductance (L/Sec.) | Dim A | Dim B | Dim C | Thread | Weight (kg) |
Manual |
|
Part Number | Price | In Stock | Add Item | |||
---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Flange Size | Port ID | Max Conductance (L/Sec.) | Dim A | Dim B | Dim C | Thread | Weight (kg) |
Manual |
|
Part Number | Price | In Stock | Add Item | |||
KF16 | 16 | 10 | 75.2 | 33.3 | 126.2 | N/A | 1.36 |
|
|
|
||||||
KF40 | 38.1 | 85 | 50.8 | 62.5 | 253.8 | N/A | 4.53 |
|
|
|
||||||
KF50 | 50.8 | 315 | 50.8 | 75.2 | 276.6 | N/A | 5.89 |
|
|
|
||||||
ISO63-F | 63.5 | 615 | 51.6 | 89.4 | 321.3 | M8 x 1.25 | 8.15 |
|
|
|
||||||
ISO63-K | 63.5 | 360 | 87.9 | 89.4 | 321.3 | N/A | 11.33 |
|
|
|
||||||
ISO80-F | 76.2 | 1,070 | 50 | 108.7 | 353.3 | M8 x 1.25 | 9.97 |
|
|
|
||||||
ISO80-K | 76.2 | 540 | 97.5 | 108.7 | 350.5 | N/A | 14.5 |
|
|
|
||||||
ISO100-F | 101.6 | 2,120 | 61.2 | 143.5 | 465.8 | M8 x 1.25 | 14.95 |
|
|
|
||||||
ISO100-K | 101.6 | 1,190 | 108 | 143.5 | 468.9 | N/A | 19.48 |
|
|
|
||||||
ISO160-F | 152.4 | 7,140 | 59.9 | 191.8 | 559.3 | M10 x 1.5 | 22.65 |
|
|
|
||||||
ISO160-K | 152.4 | 3,960 | 108 | 191.8 | 561.1 | N/A | 31.71 |
|
|
|
||||||
ISO200-F | 203.2 | 11,590 | 67.6 | 254.5 | 673.4 | M10 x 1.5 | 33.98 |
|
|
|
||||||
ISO200-K | 203.2 | 9,440 | 108 | 254.5 | 670.1 | N/A | 43.04 |
|
|
|
||||||
ISO250-F | 254 | 24,990 | 80 | 304.6 | 873 | M10 x 1.5 | 72.48 |
|
|
|
||||||
ISO250-K | 254 | 17,535 | 140 | 304.6 | 870.5 | N/A | 86.07 |
|
|
|
||||||
ISO320-F | 304.8 | 43,260 | 80 | 362.7 | 1012.7 | M12 x 1.75 | 77.01 |
|
|
|
||||||
ISO320-K | 304.8 | 24,500 | 140 | 362.7 | 1007.6 | N/A | 104.19 |
|
|
|
All dimensions listed in the table above, unless otherwise stated, are in inches.
All dimensions listed in the table above, unless otherwise stated, are in millimeters.