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V77 Series:
Rectangular Transfer Valve (Slit Valves) - Door

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems

Features

  • Semi standard application (Semi E21-94, Semi E24-92, Semi E21.1-1296)
  • Dust seal on the vacuum side of the bonnet flange that virtually eliminates particulate from entering the bellows
  • Particle and vibration free
  • Realization of exact L-motion
  • Easy maintenance

Options

  • Custom sizes available
  • Various o-ring compounds (Kalrez®, Chemraz®, etc.)
  • Double gate seal door valve available

Specifications Table

Temperature (°C) Valve body: 120°C
Valve actuator: 80°C
Pressure Range (torr) 1 X 10-9 mbar - ATM
Differential Press (torr) ≤ 1.0 bar in either direction
Material Valve body, bonnet seal: AL6061
Gate: AM350
Valve actuator: SS 304, AL6061
Seal Material Fluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec) <1 X 10-9 mbar. l/s
Cycles Until Service (approx.) ≥ 3 million
Position Indicator SMC: D-A93
Operation Double acting

Dimensional Drawings

Videos

Rectangular Transfer Valve (Slit Valves) - Door

Runtime: 02:31

Product Datasheet
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Contact Us - V77 Series: Rectangular Transfer Valve (Slit Valves) - Door