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CF Flanged SS Fluorocarbon Bonnet Gate Valves (Pneumatic)

Image Note The position of the leak slots may not be as pictured.

Note Due to extended lead times we recommend our KJLC Bellows Sealed Stainless Steel Gate Valves (Pneumatic).
Any questions, please feel free to contact our technical experts by clicking here.

Valves handle applications in semiconductor and other processing, and are used most often to isolate pumps and sample entry locks from HV or UHV work chambers.

Features

  • CF Flanged (with Fluorocarbon O-Ring): Operate in the atmosphere to 10-9 torr pressure range, bakeable up to 150° C (in the open position)
  • General purpose Electropolished Stainless Steel
  • Vacuum brazed at 1,100° C to ensure reliable operation at HV and UHV pressures
  • Provide high conductance within a compact design
  • Shock-free operation with minimum vibration
  • 100,000-cycle service before requiring maintenance
  • Available in manual or pneumatic operation
  • Pneumatic valves close or remain closed in the event of power loss or loss of air pressure
  • All 1.5" flange O.D. and larger models incorporate magnetic REED switches for position indication
  • Pneumatic valves feature a 120VAC solenoid operator at no extra charge (other voltages, both AC and DC, available on request)

Specifications Table

Manufacturer KJLC
Pressure Torr
Min: 7.501 x 10-10 Torr
Max: 760 Torr

mbar
Min: 1.000 x 10-9 mbar
Max: 1013 mbar

Rates Helium Leak Rate
2.000 x 10-9 mbar*L/s
2.000 x 10-10 Pa*m^3/s
1.980 x 10-7 sccm
1.500 x 10-9 Torr*L/s
Temperature Actuator
60.0 ºC
140 ºF

Bakeable
150 ºC
302 ºF

Bellows
Edge-welded
Shaft Seal
Material
Bellows
Cycle
Life
100,000
Solenoid Kit
Included
No
Yes
Max Δ P
Before Open
22.5  Torr
Bonnet
Seal Type
Viton
Actuator
Type
Pneumatic
Valve Body
Material
304L SS
Valve Seal
Material
Fluorocarbon
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Product Datasheet
For a download of the product datasheet, click here.
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Ordering Table

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Flange Selection Guide
With a variety of flanges to choose from, the Flange Selection Guide is designed to help you find one to meet your vacuum requirements. Shop Now!
Can't find the flange you need or want a custom configuration? Please call us at +1 412 387 9200 or email international@lesker.com with your inquiry.
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Contact Us - CF Flanged SS Fluorocarbon Bonnet Gate Valves (Pneumatic)