Close

Please select your country or region to be
directed to the appropriate Lesker site.

Representative Image

V42 Series:
Heated Angle Valve with Temperature Controller

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems

Features

  • Pneumatic actuator with position indicators
  • Integrated heater jacket with temperature controller
  • Welded Inconel Bellows
  • 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
  • Available only in KF50
  • Various o-ring compounds available

Specifications Table

Temperature (°C) Valve body: 150°C
Valve actuator: 100°C
Pressure Range (torr) 1 X 10-9 mbar - ATM
Differential Press (torr) ≤ 1.2 bar in either direction
Material Valve body, bonnet seal, gate: AL6061
Welded bellows: Inconel
Valve actuator: SS 304, AL6061
Seal Material Fluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec) <1 X 10-9 mbar. l/s
Cycles Until Service (approx.) ≥ 1 million
Position Indicator SMC D-A93
Operation Single acting

Contact Us
Contact Us
To contact someone directly, please click here, or call +1 412 387 9200 to get in contact with your dedicated sales team.
Would You Like More Information?

Do you have any questions? Click below to get in contact with one of our many experienced team members.

Contact Us - V42 Series: Heated Angle Valve with Temperature Controller