Representative Image
V42 Series:
Heated Angle Valve with Temperature Controller
Applications
- Plasma Etch, CVD, Sputter Deposition
- Manufacturing of solar panels
- Semiconductor processing
- LCD/flat panel processes
- All other cluster vacuum systems
Features
- Pneumatic actuator with position indicators
- Integrated heater jacket with temperature controller
- Welded Inconel Bellows
- 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
- Available only in KF50
- Various o-ring compounds available
Specifications Table
| Temperature (°C) | Valve body: 150°C Valve actuator: 100°C |
| Pressure Range (torr) | 1 X 10-9 mbar - ATM |
| Differential Press (torr) | ≤ 1.2 bar in either direction |
| Material | Valve body, bonnet seal, gate: AL6061 Welded bellows: Inconel Valve actuator: SS 304, AL6061 |
| Seal Material | Fluorocarbon (option KALREZ, ETC) |
| Leak Rate (cc/sec) | <1 X 10-9 mbar. l/s |
| Cycles Until Service (approx.) | ≥ 1 million |
| Position Indicator | SMC D-A93 |
| Operation | Single acting |