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V42 Series:
Heated Angle Valve with Temperature Controller


  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems


  • Pneumatic actuator with position indicators
  • Integrated heater jacket with temperature controller
  • Welded Inconel Bellows
  • 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
  • Available only in KF50
  • Various o-ring compounds available

Specifications Table

Temperature (°C) Valve body: 150°C
Valve actuator: 100°C
Pressure Range (torr) 1 X 10-9 mbar - ATM
Differential Press (torr) ≤ 1.2 bar in either direction
Material Valve body, bonnet seal, gate: AL6061
Welded bellows: Inconel
Valve actuator: SS 304, AL6061
Seal Material Fluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec) <1 X 10-9 mbar. l/s
Cycles Until Service (approx.) ≥ 1 million
Position Indicator SMC D-A93
Operation Single acting

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Contact Us - V42 Series: Heated Angle Valve with Temperature Controller