New from Kurt J. Lesker Company-our patented Protection Vacuum Gate Valve's fast action (<0.3 secs to close) protects products that are "in-process" in the event of a vacuum pump failure. This bellows sealed, pneumatic actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display.
The internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation-leading to long life under adverse process conditions.
For vacuum pump or chamber isolation in demanding processes:
|Pressure Range (torr)||1.0 x 10-6 ~ 12 x 105 Pa (abs)|
|Differential Press (torr)||Opening Direction: 0.12MPa
Closing Direction: 0.12MPa
|Max ΔPress Before Open (torr)||0.005MPa|
|Material||Bellows: STS 316L
Gate (seat): STS 304, AL6061
Valve housing, Bonnet, Shaft (Stem), Bellows end piece: STS 304
Bonnet seal, Pneumatic seal: FKM (Viton®)
Gate seal, Vacuum seal: FKM (Viton®), FFKM (Kalrez®) on request
|Leak Rate (cc/sec)||Housing: <1.0 x 10-10 PA* m3/sec
Seat (Gate): <1.3 x 10-10 PA* m3/sec (±)
|Bakeout Limit. (°C)||Body: 105°C (Viton® o-ring) | 150°C (FFKM o-ring)
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