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V41 Series:
Remote Plasma Control Valves

Applications

  • High Vacuum processes
  • ALL CVD processes (Including MO, PE, HDP, LP, and AP)
  • Photovoltaic and semiconductor applications

Features

  • Pneumatic actuator with position indicators
  • Unique triple O-ring shaft seal features primary and secondary vacuum seal along with tertiary pneumatic seal
  • Grease counter flow pocket and upper piston seal work to significantly reduce particle generation
  • 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
  • Available in ISO-KF 16 and 25 as standard

Options

  • Custom sizes available
  • Various o-ring compounds (Kalrez®, Chemraz®, etc.)

Specifications Table

Temperature (°C) Valve body: 150°C
Valve actuator: 100°C
Pressure Range (torr) 1 X 10-8 mbar - ATM
Differential Press (torr) ≤ 1.5 bar in either direction
Material Valve body, bonnet seal, gate: AL6061
Valve actuator: AL6061
Seal Material Fluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec) <1 X 10-8 mbar. l/s
Cycles Until Service (approx.) ≥ 1 million
Position Indicator SMC D-A93
Operation Double acting

Videos

Remote Plasma Control Valves

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