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V41 Series:
Remote Plasma Control Valves
Applications
- High Vacuum processes
- ALL CVD processes (Including MO, PE, HDP, LP, and AP)
- Photovoltaic and semiconductor applications
Features
- Pneumatic actuator with position indicators
- Unique triple O-ring shaft seal features primary and secondary vacuum seal along with tertiary pneumatic seal
- Grease counter flow pocket and upper piston seal work to significantly reduce particle generation
- 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
- Available in ISO-KF 16 and 25 as standard
Options
- Custom sizes available
- Various o-ring compounds (Kalrez®, Chemraz®, etc.)
Specifications Table
| Temperature (°C) | Valve body: 150°C Valve actuator: 100°C |
| Pressure Range (torr) | 1 X 10-8 mbar - ATM |
| Differential Press (torr) | ≤ 1.5 bar in either direction |
| Material | Valve body, bonnet seal, gate: AL6061 Valve actuator: AL6061 |
| Seal Material | Fluorocarbon (option KALREZ, ETC) |
| Leak Rate (cc/sec) | <1 X 10-8 mbar. l/s |
| Cycles Until Service (approx.) | ≥ 1 million |
| Position Indicator | SMC D-A93 |
| Operation | Double acting |
Videos
Remote Plasma Control Valves
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