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V44 Series:
Soft Start Valves

Applications

  • Plasma Etch, CVD, Sputter Deposition
  • Manufacturing of solar panels
  • Semiconductor processing
  • LCD/flat panel processes
  • All other cluster vacuum systems

Features

  • Pneumatic actuator with position indicators
  • 2 Step (Soft or Fast) pumping
  • Inline and right angle configurations available
  • 1 million plus cycle life plus easy maintenance reduces overall cost of ownership
  • Available in ISO 25 to ISO 200 sizes as standard

Options

  • Custom sizes available
  • Bellows Material (SS316L, Inconel)
  • Various o-ring compounds (Kalrez®, Chemraz®, etc.)

Specifications Table

Temperature (°C) Valve body: 120°C
Valve actuator: 80°C
Pressure Range (torr) 1 X 10-9 mbar - ATM
Differential Press (torr) ≤ 1.2 bar in either direction
Material Valve body, bonnet seal, gate: AL6061
Welded bellows: AM350
Valve actuator: SS 304, AL6061
Seal Material Fluorocarbon (option KALREZ, ETC)
Leak Rate (cc/sec) <1 X 10-9 mbar. l/s
Cycles Until Service (approx.) ≥ 1 million
Position Indicator SMC D-A93
Operation Double acting

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